00195982-03_SM_SWS_EN.pdf - 第226页

10 Option Die Attach Unit SWS 10.1 Installing the Option Die Attach Unit SWS 226 Service Manual SIPLACE Wafer System (SWS) 11/2018 Fig.296: ► Rotate vacuum valve Y6 back into its position, insert the safety screws and t…

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10 Option Die Attach Unit SWS
10.1 Installing the Option Die Attach Unit SWS
Service Manual SIPLACE Wafer System (SWS) 11/2018 225
Fig.295:
► Insert the safety screw No. 3 (M5x16) of the Die Attach Unit and slightly tighten it.
► Check whether the transfer X axis of the Die Attach Unit can smoothly be moved by hand.
– If not or if the jaw of the transfer X axis is slightly twisted, loosen all three safety screws
again.
– Move the Die Attach Unit, then press it down. Tighten the three safety screws stepwise.
– Sometimes, the Die Attach Unit is stuck on the alignment bolt. As a result, the Die Attach
Unit is slightly tilted and cannot be placed down onto the ground plate completely. In this
case the jaw of the transfer X axis is misaligned.
– Now fully tighten all three safety screws of the Die Attach Unit.
– Move the transfer X axis manually.
If the jaw is touching the raceway of the flip head, loosen the three safety screws of the Die
Attach Unit.
Move the Die Attach Unit, then press it down.
Tighten the three safety screws stepwise.
Sometimes, the Die Attach Unit is stuck on the alignment bolt and cannot be placed down
on the ground plate completely.
10 Option Die Attach Unit SWS
10.1 Installing the Option Die Attach Unit SWS
226 Service Manual SIPLACE Wafer System (SWS) 11/2018
Fig.296:
► Rotate vacuum valve Y6 back into its position, insert the safety screws and tighten them.
Fig.297:
► Loosen the screw shown in the figure, run the grounding cable beneath it and tighten the
screw again.
10 Option Die Attach Unit SWS
10.1 Installing the Option Die Attach Unit SWS
Service Manual SIPLACE Wafer System (SWS) 11/2018 227
Fig.298:
► Insert the long Die Attach reject bin as shown in the figure.
Fig.299:
► Connect the black vacuum tube to valve Y6 (valve Y6 switches the vacuum for the Die Attach
segment).