00195982-03_SM_SWS_EN.pdf - 第398页
15 Calibration 15.4 Calibration of the complete wafer handling 398 Service Manual SIPLACE Wafer System (SWS) 11/2018 15.4.2 Wafer table calibration menu Fig.580: ► To start the calibration, first choose the Service menu…
15 Calibration
15.4 Calibration of the complete wafer handling
Service Manual SIPLACE Wafer System (SWS) 11/2018 397
15.4.1.4 Calibrating the wafer lift position – magazine change position
Fig.578:
► (1) Choose the Go to position button next to Magazine change position to move the lifting
axis into this position.
► (2) The plastic rail on the magazine plate and the one on the lift frame should now be on the
same level (see figure below).
Fig.579:
► (3) If not, correct the position with the up and down arrow keys after choosing the appropriate
step size.
15 Calibration
15.4 Calibration of the complete wafer handling
398 Service Manual SIPLACE Wafer System (SWS) 11/2018
15.4.2 Wafer table calibration menu
Fig.580:
► To start the calibration, first choose the Service menu button in the bottom menu bar and
then choose the Calibration of wafer table button.
15.4.2.1 Wafer table calibration
NO RISK OF SERIOUS INJURIES
► Setup mode not activated!
Machine covers are closed!
Fig.581:
The standard procedure is to perform all single steps of the wafer table calibration in one process.
This procedure contains the same sequence of calibration steps as the Single step calibration.
In case of problems, the wafer table calibration can be done with the single-step calibration.
15 Calibration
15.4 Calibration of the complete wafer handling
Service Manual SIPLACE Wafer System (SWS) 11/2018 399
All in one calibration
► Choose One-magic-button calibration beneath Full calibration.
ð The center and the collision contours of the wafer table are calibrated all at once.
Single Step Calibration
First step
1 – Determining the collision structures
●
In a first step, the table is moved to detect the collision structures.
●
To prevent a crash, the collision structures of the wafer table are checked compared to the
result of the old zero position result.
Second step
2 – Calibrating the zero point
●
In the second step, the reference position of the wafer table is calibrated by using the pin (as
a fiducial for calculating the position of the table).
●
The wafer frame center is calibrated.
Third step
3 – Determining the collision structures
●
The third step repeats the collision structure determination to refine the result.
●
The collision contours of the wafer table are calibrated with the new zero position result.
15.4.2.2 Wafer table positions
NO RISK OF SERIOUS INJURIES
► Setup mode not activated!
Machine covers are closed!
This calibration adjusts the wafer table in such a way that it is aligned with the wafer magazine and
that a position for the optional wafer heater is defined.
Fig.582:
Wafer change position adjustment
Precondition
●
Magazine with one wafer set up in, at least, one slot.
●
Magazine and wafer must be assigned to each other in the software.