00195982-03_SM_SWS_EN.pdf - 第404页

15 Calibration 15.4 Calibration of the complete wafer handling 404 Service Manual SIPLACE Wafer System (SWS) 11/2018 Alignment of the wafer heater position (optional only with installed stretcher) NO RISK OF SERIOUS INJU…

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15 Calibration
15.4 Calibration of the complete wafer handling
Service Manual SIPLACE Wafer System (SWS) 11/2018 403
Fig.589:
► Choose Save in the Wafer change position line after you have finished the adjustment.
Fig.590:
NOTICE
Especially for large wafers (12”), make sure that the wafer frame (2) is rectangularly aligned
in wafer magazine.
Otherwise, the edges of the wafer frame (2) are touching the edges of the wafer rails (1)
diagonally and the wafer can´t be moved out.
Wafer frame (2) and wafer rail (1) should be in parallel!
15 Calibration
15.4 Calibration of the complete wafer handling
404 Service Manual SIPLACE Wafer System (SWS) 11/2018
Alignment of the wafer heater position (optional only with installed stretcher)
NO RISK OF SERIOUS INJURIES
► Setup mode not activated!
Machine covers are closed!
Fig.591:
► Choose Go to Position to move the wafer table to the estimated wafer heater position.
► Activate the emergency stop by opening the machine covers of the CA machine!
ð All axes of the SWS are powerless.
Fig.592:
► Move the wafer table manually until the wafer table (2) is centered above the wafer heater (1).
Our example is only for demonstration purposes. Normally, a stretcher unit is mounted to the wafer
table instead of the cover shield (1) if a wafer heater installed.
15 Calibration
15.4 Calibration of the complete wafer handling
Service Manual SIPLACE Wafer System (SWS) 11/2018 405
Fig.593:
► Choose Save.
15.4.3 Calibration wafer changer menu
To access the calibration menu, choose Calibration of wafer changer.
Fig.594:
Wafer changer calibration
HIGH RISK OF SERIOUS INJURIES
► Setup mode must be activated!
As a precondition for this calibration, the wafer transfer position must be correctly adjusted (see
chapter 15.4.1.3 "Calibrating the wafer transfer position of the magazine with respect to the wafer
table" [}394]).
With this calibration, the wafer changer zero point and the limits of the wafer changer axis are calib-
rated.
Follow the sequence of calibration as shown below: