00195982-03_SM_SWS_EN.pdf - 第246页

10 Option Die Attach Unit SWS 10.2 Dissambling Die-Attach-Unit SWS 246 Service Manual SIPLACE Wafer System (SWS) 11/2018 Fig.331: ► Disconnect the black vacuum tube (8) from valve Y6 (valve Y6 switches the vacuum for th…

10 Option Die Attach Unit SWS

10.2 Dissambling Die-Attach-Unit SWS

Service Manual SIPLACE Wafer System (SWS) 11/2018 245

Fig.329:

► Remove the screws of the encoder cables (5) for Die Attach segment motor and transfer X

motor and disconnect the connectors.

► Unplug the power connectors of the encoder cables (6) for the Die Attach segment motor and

the transfer X motor.

Fig.330:

► Disconnect the blue and the grey tube (7).

Blue tube: Connected to valve Y8, air pressure control for the Die Attach segment air kiss

Grey tube: 5bar for releasing the transfer X motor.

10 Option Die Attach Unit SWS

10.2 Dissambling Die-Attach-Unit SWS

246 Service Manual SIPLACE Wafer System (SWS) 11/2018

Fig.331:

► Disconnect the black vacuum tube (8) from valve Y6 (valve Y6 switches the vacuum for the

Die Attach segment).

► Remove the three safety screws of the Die Attach Unit and lift it out.

One screw is covered by the vacuum valve Y6. In order to access the screw, the valve must

be rotated.

Continue with the following steps:

Fig.332:

► Remove the two lower safety screws of valve Y6 (9).

► Loosen (don't remove) the single upper screw (10).

10 Option Die Attach Unit SWS

10.2 Dissambling Die-Attach-Unit SWS

Service Manual SIPLACE Wafer System (SWS) 11/2018 247

Fig.333:

► Rotate valve Y8 to access the Die Attach Unit safety screw (11).

► Remove the safety screw (12).

Fig.334:

► Remove the safety screw (13).