00195982-03_SM_SWS_EN.pdf - 第492页
18 Appendix 18.4 Control system IN/OUT 492 Service Manual SIPLACE Wafer System (SWS) 11/2018 18.4.2.1 Signal tracking DMC-18x6 Input/output DMC-1886(1866) PCI - DMC1886(66) Amplifier 1 AMP19540 Adapter board DMC-INT2 &qu…
18 Appendix
18.4 Control system IN/OUT
Service Manual SIPLACE Wafer System (SWS) 11/2018 491
Adapter board AD-WT Rev.0 (229 x 65 mm), installation location: table plate for
wafer table
Connections for:
●
21x feed-through terminals for in/outputs
●
12x feed-through terminals for home and limit sensors, (for servo motor 1-4)
●
15x terminals (orange) 24V, secured via F1/2AT, control LED1 green.
●
15x terminals (gray) GND.
●
1x fuse for 5V logic voltage, F2/0.5AF, control LED2 green.
●
Integrated logic control for the wafer table limit cutoff, which protects the die ejector, with
jumper J1/2/3/4/5 for logic setting.
●
2x stepping motor control for X/Y axis die ejector, = option.
●
1x feed-through terminals for a servo motor, Hall sensors and encoder
18.4.2 Structure of DMC-18x6 I/O system
The complete input/output system is integrated into the Galil motion controllers 1x "DMC1886" or
"DMC1866" and "DMC1826".
The signal line is run via 3 100 pin cables, from the Galil DMC18x6 and is looped through via three
"AMP-19540"(19520") amplifiers.
At the amplifier, the signals are transmitted via the "AUX-IO J3x" (44 pin) connector to the "DMC-
INT2" or "DMC-INT1" board.
The analog input and the digital input 5V are each transmitted via the 15 pin "analog 1" connector
to the amplifier on the "DMC-INT2" board.
At the "DMC-INT1(2)" boards, the signals are picked off from the terminal connections and either
directly distributed in the machine or distributed via the connection cable with sub-D connector.
The inputs on the "DMC18x6" can be operated either with NPN or PNP.
The joint "INCOM" connection for the inputs to the "DMC18x6" is run via the "DMC-INT1(2)" adap-
ter board with jumper "J2(J4)" to COM24, so that the inputs use PNP logic.
Label DMC1886(66) Input 1 to 24 = IN1, IN2,…IN24
Analog input 1 to 8 = ANA1, ANA2,…ANA3
Output 1 to 16 = OUT1, OUT2,…OUT16
Label DMC1826 Input 1 to 8 = IN1.1, IN1.2,…IN1.8
Output 1 to 8 = OUT1.1, OUT1.2,…OUT1.8
Label USB-IO Input-1 to 8 = DI1, DI2,…DI8
Analog input 1 to 8 = AI1, AI2,…AI3
Output-1 to 8 = DO1, DO2,…DO8
Current output (current control) 1 to 8 = ILED1, ILED2,…ILED8
18 Appendix
18.4 Control system IN/OUT
492 Service Manual SIPLACE Wafer System (SWS) 11/2018
18.4.2.1 Signal tracking DMC-18x6
Input/output DMC-1886(1866)
PCI - DMC1886(66) Amplifier 1 AMP19540 Adapter board DMC-INT2
"AXIS 1-4" Cable 100 pin "J1 axis1-4" "J31 AUX-
IO"
Cable 44 pin " X1"
Connector 100
pin.
Connector
100 pin.
Connector
44 pin.
Connector 44 pin. Terminals
Pin69 = LSCOM Pin69 Pin44 Pin44 -- J1 INC-X1 INC-X1
Pin70 = IN1 Pin70 Pin24 Pin24 IN1
Pin71 = IN2 Pin71 Pin38 Pin38 IN2
Pin72 = IN3 Pin72 Pin 8 Pin 8 IN3
Pin73 = IN4 Pin73 Pin25 Pin25 IN4
Pin74 = IN5 Pin74 Pin39 Pin39 IN5
Pin75 = IN6 Pin75 Pin9 Pin9 IN6
Pin76 = IN7 Pin76 Pin26 Pin26 IN7
Pin77 = IN8 Pin77 Pin40 Pin40 IN8
Pin79 = OUT1 Pin79 Pin20 Pin20 OUT1
Pin80 = OUT2 Pin80 Pin 5 Pin 5 OUT2
Pin81 = OUT3 Pin81 Pin21 Pin21 OUT3
Pin82 = OUT4 Pin82 Pin19 Pin19 OUT4
Pin83 = OUT5 Pin83 Pin4 Pin4 OUT1
Pin84 = OUT6 Pin84 Pin2 Pin2 OUT2
Pin85 = OUT7 Pin85 Pin18 Pin18 OUT3
Pin86 = OUT8 Pin86 Pin3 Pin3 OUT4
"ANALOG-1" X 15 pin cable 15 pin "X2"
Pin 1 = AGND Pin 1 Pin1/9 Pin1/9 AGND
Pin91 = ANA1 Pin91 Pin 2 Pin 2 ANA1
Pin92 = ANA2 Pin92 Pin10 Pin10 ANA2
Pin93 = ANA1 Pin93 Pin 3 Pin 3 ANA3
Pin94 = ANA2 Pin94 Pin11 Pin11 ANA4
Pin91 = ANA1 Pin91 Pin 2 Pin 2 ANA1
Pin92 = ANA2 Pin92 Pin10 Pin10 ANA2
Pin93 = ANA1 Pin93 Pin 3 Pin 3 ANA3
Pin94 = ANA2 Pin94 Pin11 Pin11 ANA4
18 Appendix
18.4 Control system IN/OUT
Service Manual SIPLACE Wafer System (SWS) 11/2018 493
Amplifier 2 AMP19540(19520)
"AXIS 5-8" Cable 100 pin "J1 axis 5-8" "J32 AUX-IO" Cable 44 pin "X3"
Connector 100
pin.
Connector
100 pin.
Connector 44
pin.
Connector 44 pin. Terminals
Pin69 = LSCOM Pin69 Pin44 Pin44 -- J3 INC-X3 INC-X3
Pin70 = IN9 Pin70 Pin24 Pin24 IN9
Pin71 = IN10 Pin71 Pin38 Pin38 IN10
Pin72 = IN11 Pin72 Pin 8 Pin 8 IN11
Pin73 = IN12 Pin73 Pin25 Pin25 IN12
Pin74 = IN13 Pin74 Pin39 Pin39 IN13
Pin75 = IN14 Pin75 Pin9 Pin9 IN14
Pin76 = IN15 Pin76 Pin26 Pin26 IN15
Pin77 = IN16 Pin77 Pin40 Pin40 IN16
Pin79 = OUT9 Pin79 Pin20 Pin20 OUT9
Pin80 = OUT10 Pin80 Pin 5 Pin 5 OUT10
Pin81 = OUT11 Pin81 Pin21 Pin21 OUT11
Pin82 = OUT12 Pin82 Pin19 Pin19 OUT12
Pin83 = OUT13 Pin83 Pin #4 Pin #4 OUT13
Pin84 = OUT14 Pin84 Pin 2 Pin 2 OUT14
Pin85 = OUT15 Pin85 Pin18 Pin18 OUT15
Pin86 = OUT16 Pin86 Pin 3 Pin 3 OUT16
"ANALOG 2" X 15 pin cable 15 pin "X4"
Pin91 = in17 Pin91 Pin 2 Pin 2 --- Converter ----- IN17
Pin92 = in18 Pin92 Pin10 Pin10 --- Converter ----- IN18
Pin93 = in19 Pin93 Pin 3 Pin 3 --- Converter ----- IN19
Pin94 = in20 Pin94 Pin11 Pin11 --- Converter ---- IN20
Pin91 = in21 Pin91 Pin 2 Pin 2 --- Converter ----- IN21
Pin92 = in22 Pin92 Pin10 Pin10 --- Converter -----IN22
Pin93 = in23 Pin93 Pin 3 Pin 3 --- Converter ----- IN23
Pin94 = in24 Pin94 Pin11 Pin11 --- Converter ----- IN24
Converter = 24V/PNP signal on 5V/NPN signal