00195982-03_SM_SWS_EN.pdf - 第408页
15 Calibration 15.5 SWS data backup and restore 408 Service Manual SIPLACE Wafer System (SWS) 11/2018 15.5 SWS data backup and restore 15.5.1 Machine data Fig.598: The machine data comprise the calibration data of all m…
15 Calibration
15.4 Calibration of the complete wafer handling
Service Manual SIPLACE Wafer System (SWS) 11/2018 407
Fig.597:
► Choose Calibrate lift and wafer table position.
ð The following positions are calibrated:
– The gripper position in front of the lift
The magazine plate is touched by the gripper.
– The frame holder pin position
The frame holder on the wafer table is touched by the gripper.
15 Calibration
15.5 SWS data backup and restore
408 Service Manual SIPLACE Wafer System (SWS) 11/2018
15.5 SWS data backup and restore
15.5.1 Machine data
Fig.598:
The machine data comprise the calibration data of all machine sub systems.
► With Archive machine data… you can save these data to a flash drive.
Fig.599:
► To restore the backup choose Restore machine data….
► Plug in the flash drive and select the desired backup file.
► Choose Start.
15 Calibration
15.5 SWS data backup and restore
Service Manual SIPLACE Wafer System (SWS) 11/2018 409
15.5.2 Product data
Fig.600:
The product data comprise the data of all the customer products and production processes.
► With Archive product data… you can save these data to a flash drive.
Fig.601:
► To restore the backup choose Restore product data….
► Plug in the flash drive and select the desired backup file.
► Choose Start.