00195982-03_SM_SWS_EN.pdf - 第493页
18 Appendix 18.4 Control system IN/OUT Service Manual SIPLACE Wafer System (SWS) 11/2018 493 Amplifier 2 AMP19540(19520) "AXIS 5-8" Cable 100 pin "J1 axis 5-8" "J32 AUX-IO" Cable 44 pin &quo…
18 Appendix
18.4 Control system IN/OUT
492 Service Manual SIPLACE Wafer System (SWS) 11/2018
18.4.2.1 Signal tracking DMC-18x6
Input/output DMC-1886(1866)
PCI - DMC1886(66) Amplifier 1 AMP19540 Adapter board DMC-INT2
"AXIS 1-4" Cable 100 pin "J1 axis1-4" "J31 AUX-
IO"
Cable 44 pin " X1"
Connector 100
pin.
Connector
100 pin.
Connector
44 pin.
Connector 44 pin. Terminals
Pin69 = LSCOM Pin69 Pin44 Pin44 -- J1 INC-X1 INC-X1
Pin70 = IN1 Pin70 Pin24 Pin24 IN1
Pin71 = IN2 Pin71 Pin38 Pin38 IN2
Pin72 = IN3 Pin72 Pin 8 Pin 8 IN3
Pin73 = IN4 Pin73 Pin25 Pin25 IN4
Pin74 = IN5 Pin74 Pin39 Pin39 IN5
Pin75 = IN6 Pin75 Pin9 Pin9 IN6
Pin76 = IN7 Pin76 Pin26 Pin26 IN7
Pin77 = IN8 Pin77 Pin40 Pin40 IN8
Pin79 = OUT1 Pin79 Pin20 Pin20 OUT1
Pin80 = OUT2 Pin80 Pin 5 Pin 5 OUT2
Pin81 = OUT3 Pin81 Pin21 Pin21 OUT3
Pin82 = OUT4 Pin82 Pin19 Pin19 OUT4
Pin83 = OUT5 Pin83 Pin4 Pin4 OUT1
Pin84 = OUT6 Pin84 Pin2 Pin2 OUT2
Pin85 = OUT7 Pin85 Pin18 Pin18 OUT3
Pin86 = OUT8 Pin86 Pin3 Pin3 OUT4
"ANALOG-1" X 15 pin cable 15 pin "X2"
Pin 1 = AGND Pin 1 Pin1/9 Pin1/9 AGND
Pin91 = ANA1 Pin91 Pin 2 Pin 2 ANA1
Pin92 = ANA2 Pin92 Pin10 Pin10 ANA2
Pin93 = ANA1 Pin93 Pin 3 Pin 3 ANA3
Pin94 = ANA2 Pin94 Pin11 Pin11 ANA4
Pin91 = ANA1 Pin91 Pin 2 Pin 2 ANA1
Pin92 = ANA2 Pin92 Pin10 Pin10 ANA2
Pin93 = ANA1 Pin93 Pin 3 Pin 3 ANA3
Pin94 = ANA2 Pin94 Pin11 Pin11 ANA4
18 Appendix
18.4 Control system IN/OUT
Service Manual SIPLACE Wafer System (SWS) 11/2018 493
Amplifier 2 AMP19540(19520)
"AXIS 5-8" Cable 100 pin "J1 axis 5-8" "J32 AUX-IO" Cable 44 pin "X3"
Connector 100
pin.
Connector
100 pin.
Connector 44
pin.
Connector 44 pin. Terminals
Pin69 = LSCOM Pin69 Pin44 Pin44 -- J3 INC-X3 INC-X3
Pin70 = IN9 Pin70 Pin24 Pin24 IN9
Pin71 = IN10 Pin71 Pin38 Pin38 IN10
Pin72 = IN11 Pin72 Pin 8 Pin 8 IN11
Pin73 = IN12 Pin73 Pin25 Pin25 IN12
Pin74 = IN13 Pin74 Pin39 Pin39 IN13
Pin75 = IN14 Pin75 Pin9 Pin9 IN14
Pin76 = IN15 Pin76 Pin26 Pin26 IN15
Pin77 = IN16 Pin77 Pin40 Pin40 IN16
Pin79 = OUT9 Pin79 Pin20 Pin20 OUT9
Pin80 = OUT10 Pin80 Pin 5 Pin 5 OUT10
Pin81 = OUT11 Pin81 Pin21 Pin21 OUT11
Pin82 = OUT12 Pin82 Pin19 Pin19 OUT12
Pin83 = OUT13 Pin83 Pin #4 Pin #4 OUT13
Pin84 = OUT14 Pin84 Pin 2 Pin 2 OUT14
Pin85 = OUT15 Pin85 Pin18 Pin18 OUT15
Pin86 = OUT16 Pin86 Pin 3 Pin 3 OUT16
"ANALOG 2" X 15 pin cable 15 pin "X4"
Pin91 = in17 Pin91 Pin 2 Pin 2 --- Converter ----- IN17
Pin92 = in18 Pin92 Pin10 Pin10 --- Converter ----- IN18
Pin93 = in19 Pin93 Pin 3 Pin 3 --- Converter ----- IN19
Pin94 = in20 Pin94 Pin11 Pin11 --- Converter ---- IN20
Pin91 = in21 Pin91 Pin 2 Pin 2 --- Converter ----- IN21
Pin92 = in22 Pin92 Pin10 Pin10 --- Converter -----IN22
Pin93 = in23 Pin93 Pin 3 Pin 3 --- Converter ----- IN23
Pin94 = in24 Pin94 Pin11 Pin11 --- Converter ----- IN24
Converter = 24V/PNP signal on 5V/NPN signal
18 Appendix
18.4 Control system IN/OUT
494 Service Manual SIPLACE Wafer System (SWS) 11/2018
Input/output DMC-1826 = input/output for wafer handler
PCI - DMC1826 Amplifier 3 AMP19520 Adapter board DMC-INT1
"AXIS 9/10" Cable 100 pin "J1 Axis9/10" "J33 AUX-IO" Cable 44 pin "X1"
Connector 100
pin.
Connector 100
pin.
Connector 44
pin.
Connector 44
pin.
Terminal
Pin69 = LSCOM Pin69 Pin44 Pin44 -- J1 INC-X1--- INC-
X1
Pin70 = IN1 Pin70 Pin24 Pin24 IN1.1
Pin71 = IN2 Pin71 Pin38 Pin38 IN1.2
Pin72 = IN3 Pin72 Pin 8 Pin 8 N1.3
Pin73 = IN4 Pin73 Pin25 Pin25 IN1.4
Pin74 = IN5 Pin74 Pin39 Pin39 IN1.5
Pin75 = IN6 Pin75 Pin9 Pin9 N1.6
Pin76 = IN7 Pin76 Pin26 Pin26 IN1.7
Pin77 = IN8 Pin77 Pin40 Pin40 IN1.8
Pin79 = OUT1 Pin79 Pin20 Pin20 OUT1.1
Pin80 = OUT2 Pin80 Pin 5 Pin 5 OUT1.2
Pin81 = OUT3 Pin81 Pin21 Pin21 OUT1.3
Pin82 = OUT4 Pin82 Pin19 Pin19 OUT1.4
Pin83 = OUT5 Pin83 Pin #4 Pin #4 OUT1.1
Pin84 = OUT6 Pin84 Pin 2 Pin 2 OUT1.2
Pin85 = OUT7 Pin85 Pin18 Pin18 OUT1.3
Pin86 = OUT8 Pin86 Pin 3 Pin 3 OUT1.4
18.4.3 Control board USB-IO Rev.1(2) (150 x 65mm), installation location: flip unit
This serves the inputs/outputs for the flip and die attach unit.
Connections for:
●
Interface for USB, CAN (connector pin strip 10 pin), RS232 (connector pin strip 10 pin)
●
8x digital input PNP/24V, connector STI1, STI2 (2x connector pin strip 12 pin)
●
8x digital output PNP/24V, /max2A / p-switching / connector STO1(connector pins trip 16 pin)
●
8x analog output, AO1-4 = STA1 (4x LED light), AO5-8 = STA2 (4x LED light)
●
8x analog input, AI1-3 = vacuum sensor, AI4/AI5 = terminal for tool height control AI6/AI7/AI8
AO4/AO8 = STA3 (connector pin strip 12 pin)
●
1x connector ST-DS (connector pin strip 6 pin) = digital input 5V/NPN, digital output 5V/NPN
●
13x terminals (gray) X2…X15 for external signal lines, coming via ST13
●
6x terminals (gray) GND, 6x terminals (orange) 24V, secured via F1/3.0AT.