00195982-03_SM_SWS_EN.pdf - 第205页
9 Wafer change system 9.2 Gripper Service Manual SIPLACE Wafer System (SWS) 11/2018 205 Fig.266: Proximity switch on the toothed belt axis 1. Proximity switch 2. Toothed belt axis 3. Fastening screw Removal/installation…
9 Wafer change system
9.2 Gripper
204 Service Manual SIPLACE Wafer System (SWS) 11/2018
9.2.3 Replacing spare parts
9.2.3.1 Requirements/preparations
The SWS can stay in the placement machine for all work to the gripper.
► Switch off the machine and the SWS at the main switch and disconnect these from the mains
power supply.
Observe the section 1.2 "Preparatory work..." [}15].
► Remove the large, black gripper cover (see 9 "Wafer change system" [}191]).
9.2.3.2 Tools
●
Standard tooling
●
Cable tie
●
Detailed circuit diagrams folder
9.2.4 Replacing the proximity switch on the toothed belt axis
Fig.265: Position of proximity switch on the toothed belt axis
The two proximity switches monitor the front and back end position stops for the toothed belt axis
of the gripper.
The two proximity switches (1) and (2) are located on the inside, on the toothed belt axis (3). The
cable for the relevant proximity switch is connected to the wafer table adapter board (see 5.2.1 "Ba-
sic frame – design and spare parts [00386774-xx] (example SWS 1/3)" [}68]).
1. Proximity switch for Forward Limit
2. Proximity switch for Reverse Limit
3. Toothed belt axis
9 Wafer change system
9.2 Gripper
Service Manual SIPLACE Wafer System (SWS) 11/2018 205
Fig.266: Proximity switch on the toothed belt axis
1. Proximity switch
2. Toothed belt axis
3. Fastening screw
Removal/installation
► Mark the original installation position of the proximity switch with a pen. Check the rough
assembly dimensions (see above)
► Remove the screw fastening the relevant proximity switch:
► Unthread the connection cable as far as the wafer table adapter board (see5.2.1 "Basic frame
– design and spare parts [00386774-xx] (example SWS 1/3)" [}68]).
► If there is no marking present on the cables: use the circuit diagram folder for help and mark
the cables connected.
► Unplug all connections from the terminal strip.
► Fit the new proximity switch to the marked position and measure the assembly dimensions
(see above).
► Run the connection cable as far as the wafer table adapter board.
► Connect the connection cable to the relevant terminal strip.
► Fix and gather the cables together with cable ties, where necessary. Make sure that the
cables do not rub against any part or get trapped.
9 Wafer change system
9.2 Gripper
206 Service Manual SIPLACE Wafer System (SWS) 11/2018
9.2.4.1 Setting the position of the proximity switch
► Switch on the SWS and check the input signals for the proximity switch.
► Go to the toolbar and select the button Service Settings → Motor settings (see 14.1 "SWS
GUI - service settings" [}357]).
Active for the Forward Limit proximity switch:
► Select the button GallilMotion_axis8
and then the tab Axis status.
► Move the axis in the mechanical end stop.
► Before the axis reaches the mechanical end stop (approx. 5 mm before), the proximity switch
should trigger (LED shines).
ð The display shines:
– Reverse Limit active
This ensures that the maximum travel range can be used although the axis is not able to
move into the end stop.
Active for the Reverse Limit proximity switch:
► Select the button GallilMotion_axis8
and then the tab Axis status.
► Move the axis into the pickup position in order to remove a wafer from the cassette. The grip-
per must be able to reached the wafer reliably and to clamp. The proximity switch must then
be moved approx. 5 mm further in this position and should then trigger (LED shines).
ð The display shines:
– Forward Limit active
This ensures that the wafer can be reliably picked up although the axis is not able to move
into the end stop.