00195982-03_SM_SWS_EN.pdf - 第397页

15 Calibration 15.4 Calibration of the complete wafer handling Service Manual SIPLACE Wafer System (SWS) 11/2018 397 15.4.1.4 Calibrating the wafer lift position – magazine change position Fig.578: ► (1) Choose the Go t…

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15 Calibration
15.4 Calibration of the complete wafer handling
396 Service Manual SIPLACE Wafer System (SWS) 11/2018
Fig.576:
(1) Wafer table rail
(2) Magazine plate
(3) Metal ruler
► Place a metal ruler (3) on the guide rail.
Fig.577:
► Use the manipulator and move the wafer lift slowly until they are on the same level.
WARNING
Mind the moving lifting axis!
► Never put your fingers into the lift area.
► Always use a metal ruler!
► Use small steps (e.g. 100µm or 500µm) to adjust the wafer transfer position.
► Choose Save next to Wafer transfer position to save the position.
15 Calibration
15.4 Calibration of the complete wafer handling
Service Manual SIPLACE Wafer System (SWS) 11/2018 397
15.4.1.4 Calibrating the wafer lift position – magazine change position
Fig.578:
► (1) Choose the Go to position button next to Magazine change position to move the lifting
axis into this position.
► (2) The plastic rail on the magazine plate and the one on the lift frame should now be on the
same level (see figure below).
Fig.579:
► (3) If not, correct the position with the up and down arrow keys after choosing the appropriate
step size.
15 Calibration
15.4 Calibration of the complete wafer handling
398 Service Manual SIPLACE Wafer System (SWS) 11/2018
15.4.2 Wafer table calibration menu
Fig.580:
► To start the calibration, first choose the Service menu button in the bottom menu bar and
then choose the Calibration of wafer table button.
15.4.2.1 Wafer table calibration
NO RISK OF SERIOUS INJURIES
► Setup mode not activated!
Machine covers are closed!
Fig.581:
The standard procedure is to perform all single steps of the wafer table calibration in one process.
This procedure contains the same sequence of calibration steps as the Single step calibration.
In case of problems, the wafer table calibration can be done with the single-step calibration.