00195982-03_SM_SWS_EN.pdf - 第196页
9 Wafer change system 9.1 Magazine lift 196 Service Manual SIPLACE Wafer System (SWS) 11/2018 9.1.1.5 Switch for checking whether a cassette is present Two toggle switches on the magazine plate of the wafer lift check wh…
9 Wafer change system
9.1 Magazine lift
Service Manual SIPLACE Wafer System (SWS) 11/2018 195
9.1.1.4 Crash sensor and slot query
Fig.254: Crash sensor and slot query on the magazine lift
●
The crash sensor (1) monitors whether the lift is free. This makes sure that there are no
wafers in the lifting axis travel range.
●
The slot query (2) checks each magazine unit to see whether their is a wafer in it.
► Check the input signals for the proximity switch.
► In the toolbar, select the button Manual Settings
.
► Go to the Manual Settings view and select the button Manual Subsystems
and then
select IOs (see 14.2 "Manual settings" [}358]).
► Select the Wafer Changertab .
ð The displays shine:
– DI25 Wafer slot sensor
– DI26 Lift crash sensor
9 Wafer change system
9.1 Magazine lift
196 Service Manual SIPLACE Wafer System (SWS) 11/2018
9.1.1.5 Switch for checking whether a cassette is present
Two toggle switches on the magazine plate of the wafer lift check whether a wafer cassette in
inserted.
Fig.255: Toggle switch on magazine lift
1. Toggle switch for wafer cassette 8"
2. Toggle switch for wafer cassette 12"
► Check the input signals for the proximity switch.
► In the toolbar, select the button Manual Settings
.
► Go to the Manual Settingsview and select the button Manual Subsystems
and then
select IOs (see 14.2 "Manual settings" [}358]).
► Select the Wafer Changertab .
► The display shines:
– DI28 Magazine present
The connection cables are run to the DNC board and connected there (see 9.1.2 "Electrical sys-
tem" [}200]).
9 Wafer change system
9.1 Magazine lift
Service Manual SIPLACE Wafer System (SWS) 11/2018 197
9.1.1.6 Cover switch
The cover switch checks whether the wafer lift cover is closed. The cover switch is located on the
right side of the wafer lift.
Fig.256: Cover switch on the magazine lift
► Check the input signals for the proximity switch.
► In the toolbar, select the button Manual Settings
.
► Go to the Manual Settings view and select the button Manual Subsystems
and then
select IOs (see 14.2 "Manual settings" [}358]).
► Select the Wafer Changertab .
ð The display shines:
– DI27 Wafer lift hood: closed
The connection cables are run to the protective contactor combination and connected there (see
9.1.2 "Electrical system" [}200]).