00195982-03_SM_SWS_EN.pdf - 第216页

10 Option Die Attach Unit SWS 10.1 Installing the Option Die Attach Unit SWS 216 Service Manual SIPLACE Wafer System (SWS) 11/2018 10.1.2 Initial situation Fig.280: Item Item no. Designation 1 00386236-xx Cable motor cu…

100%1 / 506
10 Option Die Attach Unit SWS
10.1 Installing the Option Die Attach Unit SWS
Service Manual SIPLACE Wafer System (SWS) 11/2018 215
10 Option Die Attach Unit SWS
10.1 Installing the Option Die Attach Unit SWS
10.1.1 Description of the Die Attach Unit SWS
The Die Attach Unit SWS is delivered as a module assembly.
Item number module assembly [00384741-xx] Die Attach Unit SWS
Retrofit kit [00519728-xx] Die Attach Unit SWS
Fig.279:
The Die Attach Unit SWS is delivered as an assembly with the following mounted single parts:
Item Item no. Designation
1 00385866-xx Crank lifting unit
2 00385955-xx Cyber motor brushless
3 Storing location for the crank filling piece
4 03068603-xx Solenoid valve
5 00385749-xx Board AD-DA Rev.0 → Wired with sensors
6 00379104-xx Board AD-MOT2 Rev.0 → Wired with motors
7 03042562-xx M5x16 fastening screw
8 03042562-xx M5x16 fastening screw
9 03042562-xx M5x16 fastening screw (under the solenoid valve [03068603‑xx] → turn
away!)
10 00385562-xx Reject box right complete
The two boards [00385749-xx] (5) and [00379104-xx] (6) are already wired with the sensors and
motors.
When installing the Die Attach Unit SWS all you have to do is to connect the boards to the SWS.
The cables lie prepared at the installation position.
10 Option Die Attach Unit SWS
10.1 Installing the Option Die Attach Unit SWS
216 Service Manual SIPLACE Wafer System (SWS) 11/2018
10.1.2 Initial situation
Fig.280:
Item Item no. Designation
1 00386236-xx Cable motor current MOT-1 for Rotate Die Attach Connector 2x2
2 00386234-xx Cable signals ENCH1 for Rotate Die Attach Connector RS232
3 00386235-xx Cable signals ENCH2 for Flip Tool X Connector RS232
4 00386237-xx Cable motor current MOT-2 for Flip Tool X Connector 2x2
5 00386918-xx Cable → NOT USED
6 00386020-xx Cable Control IN/OUT at ST1-12 Connector 2x6
7 Connection hose vacuum
8 Grounding cable for Die Attach Unit SWS
10 Option Die Attach Unit SWS
10.1 Installing the Option Die Attach Unit SWS
Service Manual SIPLACE Wafer System (SWS) 11/2018 217
Fig.281:
Item Designation
1 Connecting assembly on board 00379104-xx for Motor M7/Rotate Die Attach
2 Connector ENCH1 for signals Motor Rotate Die Attach to Galil board
3 Connector MOT-1 voltage supply Motor Rotate Die Attach to Galil board
4 Connecting assembly on board 00379104-xx for Motor M8/Flip Tool X to Galil board
5 Connector ENCH2 for signals Motor Flip Tool X to Galil board
6 Connector MOT-2 for voltage supply Motor Flip Tool X to Galil board
7 Connecting assembly on board 00385749-xx for sensors
8 Connector ST1 for sensors to board USB-IO