00195982-03_SM_SWS_EN.pdf - 第317页
12 Wafer stretcher 12.7 Wafer stretcher - configuration changes Service Manual SIPLACE Wafer System (SWS) 11/2018 317 Fitting the block to the clamp Fig.447: Wafer support - fitting the clamping block ► Fit the block (2…
12 Wafer stretcher
12.7 Wafer stretcher - configuration changes
316 Service Manual SIPLACE Wafer System (SWS) 11/2018
Fitting the sensors in the 12" wafer support
Fit the two sensors and the mounting brackets into the wafer support.
Fig.446: Wafer support - fitting the sensors
► Reestablish the electrical connections to the sensors.
► Fit the two sensors and the mounting brackets into the wafer support.
12 Wafer stretcher
12.7 Wafer stretcher - configuration changes
Service Manual SIPLACE Wafer System (SWS) 11/2018 317
Fitting the block to the clamp
Fig.447: Wafer support - fitting the clamping block
► Fit the block (2) from the 12" retrofit kit onto the clamp (1).
Fitting the cover plate (for 12" wafer support only)
Fig.448: Wafer support - fitting the cover plate
► Use the four screws to fit the cover plate (1) to the wafer support.
12 Wafer stretcher
12.7 Wafer stretcher - configuration changes
318 Service Manual SIPLACE Wafer System (SWS) 11/2018
Fitting the lifting ring
Fig.449: Wafer support - fitting the lifting ring
► Insert the lifting ring (1).
► Insert the four springs (3) into the four holes.
► Position the four fixing disks (2) on these.
► Fasten the fixing disks with the fastening screws (4).