00195982-03_SM_SWS_EN.pdf - 第92页
5 Basic frame – X/Y unit 5.3 Replacing parts 92 Service Manual SIPLACE Wafer System (SWS) 11/2018 Fig.87: ► Push the wafer table towards the back until there is no interfering edge in front of the spindle bearing! Fig.…
5 Basic frame – X/Y unit
5.3 Replacing parts
Service Manual SIPLACE Wafer System (SWS) 11/2018 91
Fig.85:
Coupling plate, coupling and X motor are now separate and can be replaced.
5.3.2.2 Fitting the new X motor and coupling
Fig.86:
► Fit the new X motor onto the coupling plate.
Make sure that the motor cable, as shown in the photo, points at 90° downwards to the coup-
ling plate!
Leave the coupling to one side at the moment. This will be inserted into the coupling plate
later on.
You might need to fasten the motor cable to the motor housing with two cable ties.
5 Basic frame – X/Y unit
5.3 Replacing parts
92 Service Manual SIPLACE Wafer System (SWS) 11/2018
Fig.87:
► Push the wafer table towards the back until there is no interfering edge in front of the spindle
bearing!
Fig.88:
► Carefully press the whole spindle out of the bearing, until the stop is reached.
Make sure that no cables or similar parts are damaged when you push the spindle.
5 Basic frame – X/Y unit
5.3 Replacing parts
Service Manual SIPLACE Wafer System (SWS) 11/2018 93
Fig.89:
► Push the coupling as far as the stop, onto the spindle shaft!
The label on the coupling should point in the direction of the spindle.
The writing on the spindle plate should point to the wafer lift, as shown in the diagram!
Fig.90:
► Place the lower front fastening screw into the coupling plate and hold it in position with an
Allen key!