00195982-03_SM_SWS_EN.pdf - 第403页

15 Calibration 15.4 Calibration of the complete wafer handling Service Manual SIPLACE Wafer System (SWS) 11/2018 403 Fig.589: ► Choose Save in the Wafer change position line after you have finished the adjustment. Fig.…

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15 Calibration
15.4 Calibration of the complete wafer handling
402 Service Manual SIPLACE Wafer System (SWS) 11/2018
Fig.587:
► Then try to move the wafer out of the magazine onto the wafer table, by pulling the wafer
changer backwards.
CAUTION
In the Setup mode, the magazine lift axis still can be moved.
Fig.588:
► Now the wafer table can be adjusted manually until it is aligned with the wafer magazine. Both
sides of the wafer frame should have the same gap to the rail of the wafer table. For fine ad-
justment, the wafer table can be moved by turning the spindle or motor of the related axis.
15 Calibration
15.4 Calibration of the complete wafer handling
Service Manual SIPLACE Wafer System (SWS) 11/2018 403
Fig.589:
► Choose Save in the Wafer change position line after you have finished the adjustment.
Fig.590:
NOTICE
Especially for large wafers (12”), make sure that the wafer frame (2) is rectangularly aligned
in wafer magazine.
Otherwise, the edges of the wafer frame (2) are touching the edges of the wafer rails (1)
diagonally and the wafer can´t be moved out.
Wafer frame (2) and wafer rail (1) should be in parallel!
15 Calibration
15.4 Calibration of the complete wafer handling
404 Service Manual SIPLACE Wafer System (SWS) 11/2018
Alignment of the wafer heater position (optional only with installed stretcher)
NO RISK OF SERIOUS INJURIES
► Setup mode not activated!
Machine covers are closed!
Fig.591:
► Choose Go to Position to move the wafer table to the estimated wafer heater position.
► Activate the emergency stop by opening the machine covers of the CA machine!
ð All axes of the SWS are powerless.
Fig.592:
► Move the wafer table manually until the wafer table (2) is centered above the wafer heater (1).
Our example is only for demonstration purposes. Normally, a stretcher unit is mounted to the wafer
table instead of the cover shield (1) if a wafer heater installed.