00195982-03_SM_SWS_EN.pdf - 第133页

7 Die ejector 7.3 Replacing spare parts Service Manual SIPLACE Wafer System (SWS) 11/2018 133 Fig.155: Pulling off Fig.156: Dismantled Z axis die ejector ► Pull off the Z axis die ejector. Make sure that the four loss …

7 Die ejector

7.3 Replacing spare parts

132 Service Manual SIPLACE Wafer System (SWS) 11/2018

Fig.153:

► Option 2: Push the tip of a screwdriver (5) sideways between the two connection pins on the

connector(4).

Turn slightly to lever the connector out of the holder.

Fig.154:

► Loosen the four screws fastening the Z axis die ejector.

NOTICE

The four fastening screws (6) each have a loss prevention lock [03075495‑xx](7). This loss

prevention lock is located between the support plate and the Z axis die ejector, in a shallow

sink. The fastening screws(6) do not need to be completely removed as they can be held

by the last turns of the thread in the loss prevention lock(7).

The lock thread is at the base of the shallow sink, meaning that there is about 2 mm lock

thread before the screw could fall out.

► However, if the screws are removed completely, make sure that these loss prevention

locks are not lost when the Z axis die ejector is removed.

7 Die ejector

7.3 Replacing spare parts

Service Manual SIPLACE Wafer System (SWS) 11/2018 133

Fig.155: Pulling off

Fig.156: Dismantled Z axis die ejector

► Pull off the Z axis die ejector. Make sure that the four loss prevention locks (8) do not fall out

(diagram shows two visible and two covered).

Fig.157:

► Remove the board cover.

Fig.158:

► Disconnect all cables (small screwdriver).

► Disconnect the encoder signal (ENC).

7 Die ejector

7.3 Replacing spare parts

134 Service Manual SIPLACE Wafer System (SWS) 11/2018

Fig.159:

► Remove the board holder from the motor.

CAUTION

Screws

► Make sure that the two screws (M3x14) for fastening the board holder(11) are longer

than the covered third screw(12) on the motor cover (M3x10).

► The new Z axis die ejector [03098367-xx]/[03098368-xx] is supplied without the board

holder. All three motor cover screws are therefore short ones (M3x10). Please always

use long screws to fit the board holder (M3x14)!

Fig.160:

The assembly has now been completely removed.

The Z axis die ejector assembly (13) is supplied inclusive of the dual light barrier board (14). The

diagram shows the dual light barrier board refitted.

03098367-xx Z axis die ejector (2,4), magnetic

03098236-xx Z axis die ejector (1,3), magnetic

00385741-xx Dual light barrier board 27.5 x14mm

The dual light barrier board [00385741-xx] can also be ordered separately.