00195982-03_SM_SWS_EN.pdf - 第301页

12 Wafer stretcher 12.6 Fitting the wafer stretcher Service Manual SIPLACE Wafer System (SWS) 11/2018 301 Fig.429: ► Fit the cable duct with the two pan-head screws. Fig.430: ► Connect the ground cable. ► Connect conne…

12 Wafer stretcher

12.6 Fitting the wafer stretcher

300 Service Manual SIPLACE Wafer System (SWS) 11/2018

Fig.427:

► Run the pneumatic hose and connect it to the coupling (1).

► Position the coupling between the mounting plate and the blue sensor control.

► Fix the inlet hose with a cable tie (2) to the spacer bolt.

► Run the connection hose to the SWS, free of folds, around the two spacer bolts.

► Fix the hose with a cable tie (3).

Fig.428:

► Use the Allen countersunk screw to fit the presence sensor in the place provided (1).

Pay attention to the sensor orientation upwards (2) (see diagram).

Assembly must be conducted parallel to the edges.

12 Wafer stretcher

12.6 Fitting the wafer stretcher

Service Manual SIPLACE Wafer System (SWS) 11/2018 301

Fig.429:

► Fit the cable duct with the two pan-head screws.

Fig.430:

► Connect the ground cable.

► Connect connector X11.

Fig.431:

► Fit the cover plate with the six screws.

Run the pneumatic connection as shown in the diagram.

12 Wafer stretcher

12.6 Fitting the wafer stretcher

302 Service Manual SIPLACE Wafer System (SWS) 11/2018

12.6.4 Fitting the cover plate and the downholder plates

Fig.432:

► Position the wafer stretcher towards the wafer lift side.

Fig.433:

► Fit the cover plate with the four Phillips screws (1) to (4) and the Allen screws to the clamping

cylinder (5).