00195982-03_SM_SWS_EN.pdf - 第85页
5 Basic frame – X/Y unit 5.3 Replacing parts Service Manual SIPLACE Wafer System (SWS) 11/2018 85 5.3.2 Replacing the X motor Preconditions ● The die ejector is in the lower secure position. ● The SWS is switched off. Pr…
5 Basic frame – X/Y unit
5.3 Replacing parts
84 Service Manual SIPLACE Wafer System (SWS) 11/2018
Fig.72:
► Connect the Y motor cable. Pay attention to the orange wires SHL and HB.
The orange wire which might be slightly thicker is the SHL and is used for shielding!
► Fit the cover plate.
5.3.1.4 Required calibration after Y motor replacement
► Calibrate the complete wafer table with the One-magic-button calibration.
Fig.73:
5 Basic frame – X/Y unit
5.3 Replacing parts
Service Manual SIPLACE Wafer System (SWS) 11/2018 85
5.3.2 Replacing the X motor
Preconditions
●
The die ejector is in the lower secure position.
●
The SWS is switched off.
Preparation
► Support the tower with the folded-out support foot.
► Swivel the wafer lift to one side.
5.3.2.1 Removing the X motor and coupling
► Pull the complete wafer table unit in the direction of the X motor.
Fig.74:
► Open the cable ties!
Fig.75:
► Remove the two downholders. Take care of the washers.
5 Basic frame – X/Y unit
5.3 Replacing parts
86 Service Manual SIPLACE Wafer System (SWS) 11/2018
Fig.76:
► Unplug the flat ribbon cable from the encoder unit of the X motor.
► Unplug the motor cable from the board (AD-MOT Rev.0 Sub-D board = angled
[00384600‑xx]).
1 Motor cable U White (WH)
2 Motor cable V Red (RD)
3 Motor cable W Black (BK) (thin and shiny)
The motor cables (1, 2 and 3) come out of the heat-shrinkable sleeve in a group.
4 PE cable motor Black (BK) (thicker and matt)
The PE motor cable comes separately out of the heat-shrinkable sleeve.
5 5V supply cable Hall sensor Blue (BU)
6 HA track signal Hall sensor Brown (BN)
7 HB track signal Hall sensor Orange (OR) (thin)
8 HC track signal Hall sensor Yellow (YE)
9 GND Hall sensor Green (GN)
10 Shield cover on Hall sensor Orange (OR) (thick)