00195982-03_SM_SWS_EN.pdf - 第112页
6 Supply unit 6.2 Replacing spare parts 112 Service Manual SIPLACE Wafer System (SWS) 11/2018 6.2.1.2 Closing the magazine lift ► Swivel the magazine lift back into its starting position. ► Use the two screws you removed…
6 Supply unit
6.2 Replacing spare parts
Service Manual SIPLACE Wafer System (SWS) 11/2018 111
6.2 Replacing spare parts
6.2.1 Preparatory tasks
6.2.1.1 Swinging up the magazine lift
When performing service work to the parts which can not be accessed from above, you need to
remove the SWS.
CAUTION
Risk of magazine lift tilting
► Make sure that the SWS support foot is folded out to the side before you swing the
magazine lift up. Otherwise, there is a risk that the magazine lift may tilt over.
Fig.119: Support leg when folded open
► Fold the SWS support foot (1) out to the side.
► Use the machine key to open the bottom door on the magazine lift.
Fig.120: Magazine lift fixture
► Remove the screw (1)fastening the magazine lift to the SWS.
At locations 1 and 3, these screws can be found on the righthand side, at locations 2 and 4
they are on the lefthand side.
► Swivel the magazine lift to one side.
ð The inside of the SWS is now accessible from the front.
6 Supply unit
6.2 Replacing spare parts
112 Service Manual SIPLACE Wafer System (SWS) 11/2018
6.2.1.2 Closing the magazine lift
► Swivel the magazine lift back into its starting position.
► Use the two screws you removed earlier to fasten the magazine lift to the SWS.
► Use the machine key to close the bottom door on the magazine lift.
► Fold the SWS support foot back in again so that it is parallel to the SWS.
6.2.1.3 Pulling out the supply unit
In order to perform service work on components which require access from the front and side, you
must also remove the supply unit.
CAUTION
Observe the electrical and pneumatic cables.
► When pulling out and inserting the supply unit, make sure that the electrical and pneu-
matic cables do not get caught anywhere or even torn off.
► Open the magazine lift (see 6.2.1.1 "Swinging up the magazine lift" [}111]).
► Remove the two screws on the supply unit.
► Pull the supply unit out towards the front.
► Pay attention to the cables on the back of the supply unit.
► Perform the required service work and push the supply unit back in again.
6.2.1.4 Inserting the supply unit
CAUTION
Observe the electrical and pneumatic cables.
► When pulling out and inserting the supply unit, make sure that the electrical and pneu-
matic cables do not get caught anywhere or even torn off.
► Push the supply unit into the SWS.
► Use the two screws you removed earlier to fasten the supply unit into place.
► Close the magazine lift (see 6.2.1.2 "Closing the magazine lift" [}112]).
6 Supply unit
6.2 Replacing spare parts
Service Manual SIPLACE Wafer System (SWS) 11/2018 113
6.2.2 Replacing the BoxPC
Fig.121: Replacing the BoxPC
► Remove all cables from the back of the BoxPC.
► Loosen the four fastening screws(1).
► Pull the BoxPC approx. 15 mm forwards in its slotted holes.
► Lift the BoxPC slightly and then lift it out of the supply unit.
6.2.3 Replacing the vacuum pump
Fig.122: Vacuum pump - connections below
► When fitting and removing, pay attention to the connections(1) on the bottom of the vacuum
pump. The connections could break easily and must not be damaged.