00195982-03_SM_SWS_EN.pdf - 第123页

7 Die ejector 7.3 Replacing spare parts Service Manual SIPLACE Wafer System (SWS) 11/2018 123 Procedure Fig.136: ► In the change position, the wafer table still covers two of the fastening screws (1) for the die ejecto…

7 Die ejector

7.3 Replacing spare parts

122 Service Manual SIPLACE Wafer System (SWS) 11/2018

Fig.135:

► Shut down the SWS software.

► Switch off the SWS on main switch.

► Dismantle and remove the SWS (see 4.1 "Removing the SWS" [}59]).

NOTICE

► If, after removal of the SWS from the CA machine, you still find that the die ejector is

in the "top" position, read this section 17.1 "Moving the Z axis for die ejector down-

wards in the switched off and removed SWS" [}471]).

7.3.2 Removing the complete die ejector unit from the SWS

Necessary tools

●

Standard hexagonal screwdriver set

●

T Allen key, size 5

●

Small screwdriver

Preconditions

●

SWS removed from machine-

●

SWS disconnected from the power supply

7 Die ejector

7.3 Replacing spare parts

Service Manual SIPLACE Wafer System (SWS) 11/2018 123

Procedure

Fig.136:

► In the change position, the wafer table still covers two of the fastening screws(1) for the die

ejector base plate.

You need to manually push the wafer table towards the wafer lift(2), until the screws are ac-

cessible.

CAUTION

Die ejector lowered?

► Before pushing the wafer table, make sure that the die ejector has really been

lowered.

WARNING

Risk of injury to hands

When manually pushing the wafer table, there is always a risk of injury by trapping the

hands.

Fig.137:

► Remove the four screws(1) fastening the die ejector base plate (Allen key5).

The omega spring pulls the base plate against the eccentric shaft(3) X direction. Remove the

omega spring (2) as follows:

7 Die ejector

7.3 Replacing spare parts

124 Service Manual SIPLACE Wafer System (SWS) 11/2018

Fig.138:

► Use a small screwdriver to lever the edge(4) of the omega spring (3) upwards(5).

► Remove the omega spring upwards.

Fig.139:

► Pull the compressed air inlet line (6) for the die ejector off the pneumatic distributor.