00195982-03_SM_SWS_EN.pdf - 第289页

12 Wafer stretcher 12.4 Removing the wafer stretcher Service Manual SIPLACE Wafer System (SWS) 11/2018 289 Fig.404: Fig.405: ► Unplug the X11 connector (1) . ► Unplug the compressed air cable (2) . Fig.406: ► Unscrew …

12 Wafer stretcher

12.4 Removing the wafer stretcher

288 Service Manual SIPLACE Wafer System (SWS) 11/2018

12.4.4 Removal at the wafer changer side

Fig.402:

► Push the wafer stretcher to the other side.

Pay attention to the die ejector and the wafer changer (gripper).

Fig.403:

► Push the wafer stretcher to the end.

► Remove the six screws fastening the cover plate (1).

► Take off the cover plate.

The following connections need to be unplugged as follows:

12 Wafer stretcher

12.4 Removing the wafer stretcher

Service Manual SIPLACE Wafer System (SWS) 11/2018 289

Fig.404:

Fig.405:

► Unplug the X11 connector (1).

► Unplug the compressed air cable (2).

Fig.406:

► Unscrew the ground connection (3).

► Dismantle the power chain (4) → concealed.

► There may be a number of cable ties to open in order to unplug the connections properly.

12 Wafer stretcher

12.4 Removing the wafer stretcher

290 Service Manual SIPLACE Wafer System (SWS) 11/2018

Fig.407:

Dismantle the presence sensor 8"/12" (5) as follows:

► Make a note of the direction in which the sensor is fitted!

► Remove the screw (accessible from below).

Fig.408:

► Carefully pull the wafer stretcher back to the wafer tower side.

Make sure that the previously removed cable does not get caught anywhere.