00195982-03_SM_SWS_EN.pdf - 第350页

13 BoxPC, GALIL cards and axis control 13.3 Replacing the servo amplifier for the axes 350 Service Manual SIPLACE Wafer System (SWS) 11/2018 Fig.502: ► Remove the GALIL card up and out of the SWS.

13 BoxPC, GALIL cards and axis control

13.3 Replacing the servo amplifier for the axes

Service Manual SIPLACE Wafer System (SWS) 11/2018 349

Fig.500:

► Unscrew the ground connection for the GALIL card.

Fig.501:

► Remove the four screws fastening the GALIL card to the base frame.

13 BoxPC, GALIL cards and axis control

13.3 Replacing the servo amplifier for the axes

350 Service Manual SIPLACE Wafer System (SWS) 11/2018

Fig.502:

► Remove the GALIL card up and out of the SWS.

13 BoxPC, GALIL cards and axis control

13.3 Replacing the servo amplifier for the axes

Service Manual SIPLACE Wafer System (SWS) 11/2018 351

13.3.2 GALIL AMP-19540 in detail

Fig.503:

All connected cables have the same designation as the connectors on the GALIL card.

In our example, these are for the AXIS 1-4:

Designation Description

X03 Input 48V from the power supply to drive the axis motors

MP1 Output voltage supply motor wafer table X axis

MP2 Output voltage supply motor wafer table Y axis

MP3 Output voltage supply motor die ejector tool change

MP4 Output voltage supply motor die ejector

ENC1 Encoder signals motor wafer table X axis

ENC2 Encoder signals motor wafer table Y axis

ENC3 Encoder signals motor die ejector tool change

ENC4 Encoder signals motor die ejector

J31 AUX-IO → limit switches axes 1-4 / input signals 1-8 / output signals 1-8

Analog-1 ANALOG input 1-8 (optional)

J1 Connecting the PCI BUS GALIL motion controller DMC-1886 in the BoxPC (con-

trol)