00195982-03_SM_SWS_EN.pdf - 第287页

12 Wafer stretcher 12.4 Removing the wafer stretcher Service Manual SIPLACE Wafer System (SWS) 11/2018 287 Fig.400: ► Mark the position of the spindle nut e.g. with a pen (1) . ► Hold the spindle nut tight (1) and turn …

12 Wafer stretcher

12.4 Removing the wafer stretcher

286 Service Manual SIPLACE Wafer System (SWS) 11/2018

Fig.398:

► Swivel the lifting cylinder (1) to one side. If needed, also unthread the connection at the piston

end.

► Remove the four screws (2) fastening the wafer stretcher from the guide trolley below.

The connection to the spindle in the X direction is still on this side of the wafer stretcher. To discon-

nect the connection, proceed as follows:

Fig.399:

► Remove the four screws on the spindle nut (2) underneath the clamping cylinder (1).

12 Wafer stretcher

12.4 Removing the wafer stretcher

Service Manual SIPLACE Wafer System (SWS) 11/2018 287

Fig.400:

► Mark the position of the spindle nut e.g. with a pen (1).

► Hold the spindle nut tight (1) and turn the spindle (2), so that the spindle nut is released from

the drive block of the wafer table.

► Manually push the wafer stretcher away from the spindle nut (3).

ð There should now be a space between the spindle nut and the drive block.

Fig.401:

► Remove the two hexagonal screws (1) with a fork wrench or a ratchet.

ð The drive block is now separate from the wafer table.

12 Wafer stretcher

12.4 Removing the wafer stretcher

288 Service Manual SIPLACE Wafer System (SWS) 11/2018

12.4.4 Removal at the wafer changer side

Fig.402:

► Push the wafer stretcher to the other side.

Pay attention to the die ejector and the wafer changer (gripper).

Fig.403:

► Push the wafer stretcher to the end.

► Remove the six screws fastening the cover plate (1).

► Take off the cover plate.

The following connections need to be unplugged as follows: