00195982-03_SM_SWS_EN.pdf - 第115页
6 Supply unit 6.2 Replacing spare parts Service Manual SIPLACE Wafer System (SWS) 11/2018 115 Configuring the Galil motor card ● Amplifier module 4 axes => type AMP-19540 ● Amplifier module 2 axes => type AMP-19520…
6 Supply unit
6.2 Replacing spare parts
114 Service Manual SIPLACE Wafer System (SWS) 11/2018
Fig.123: Replacing the vacuum pump
► Disconnect the vacuum hose at the hose coupling (1) .
► Disconnect the power supply at the connector (2).
► Remove the four fastening screws(3).
► Replace the vacuum pump.
6.2.4 Replacing the Galil motor card AMP-19540 or AMP-19520
CAUTION
ESD guidelines are to be followed
► Observe the ESD guidelines in section 1.3.4.3 "Handling ESD modules" [}17]) and in
the instruction manual for your machine.
Fig.124: Replacing the Galil motor card AMP-19540 or AMP-19520
► Unplug the connection cable (1) and (2).
► Remove the four fastening screws in each case.
► Replace the relevant Galil motor card.
6 Supply unit
6.2 Replacing spare parts
Service Manual SIPLACE Wafer System (SWS) 11/2018 115
Configuring the Galil motor card
●
Amplifier module 4 axes => type AMP-19540
●
Amplifier module 2 axes => type AMP-19520
Connector designations
●
(1) Connector for axis 1-4 => type AMP-19540 (left card)
●
(2) Connector for axis 5-8 => type AMP-19540 (right card)
●
Connector for axis 6-6 => type AMP-19520 (right card only).
If the Die attach option is present, the right card will be an AMP 19520. If not, there will always be
two cards of type AMP 19540.
6.2.5 Replacing the mains transformer
Fig.125: Replacing the mains transformer
► Remove the four fastening screws(1).
Fig.126: Mains transformer - disconnecting input voltage (primary side)
► Disconnect the cable (1) and (2) for the input voltage on the primary side. See also the circuit
diagrams supplied.
6 Supply unit
6.3 Settings
116 Service Manual SIPLACE Wafer System (SWS) 11/2018
6.3 Settings
6.3.1 Setting the compressed air monitor
Fig.127: Setting the compressed air monitor
After replacement, you need to check the setting on the compressed air monitor.
► Depressurize the valve by pressing the monitor once.
► Supply pressure of 5 bar to the valve by pressing one more time.
► Turn the manometer down to 2.5 bar (average value) and check whether the LED turns off.
► Check whether the value was correctly saved.
6.3.2 Creating connection voltages at the mains transformer
Fig.128: Supply voltage at mains transformer
The various mains voltages are input here at the mains transformer terminals. See also the circuit
diagrams ([00195960-04]-DC-SWS-EN.pdf Page (SWS Line-Power Power-Input SWS-No.1-4) for
the machine.
► Dismantle and remove the SWS from the machine (see 4.1 "Removing the SWS" [}59]).