RS-1_instruction manual.pdf - 第779页

Part 2 D etaile d Descript ion of E ach Functi on Chapter 9 M anual Control 9-7 2) H MS a) X Y m o v e This button f unction s in the sa me manner as the < XY move> button disp l ayed on the “ Head contro l ” scree…

Part 2 Detailed Description of Each Function Chapter 9 Manual Control

9-6

(3) Control item

Select the control item with the corresponding push button.

The displayed buttons vary depending on selection of the unit to be controlled.

1) OCC

a) XY move

This button functions in the same manner as the <XY move> button displayed on the

“Head control” screen does.

b) Vert Light cont

This button turns ON/OFF the vertical light of the OCC.

- Move the Control Item to set the brightness.

- When “Vert Light Ctrl” is selected, press the <ON> button, <OFF> button, or

<ON/OFF> button for control.

- The displayed status of the light is updated when the system finishes controlling the

light.

c) Incln Light cont

This button turns ON/OFF the inclined light of the OCC.

Make the settings of this light in the same manner as (b) the vertical light above.

d) Outer Ring Light cont (optional)

This buttons turns ON/OFF the outer ring light of the OCC.

Make the settings of this light in the same manner as (b) the vertical light above.

This item cannot be selected unless an option setting is performed by MS parameter.

e) Polarity cont

This button sets the polarity of the OCC to negative or positive.

When the control item “Polarity Ctrl” is checked off, press the <Positive> button,

<Negative> button, or <Positive/Negative> button for control.

Part 2 Detailed Description of Each Function Chapter 9 Manual Control

9-7

2) HMS

a) XY move

This button functions in the same manner as the <XY move> button displayed on the

“Head control” screen does.

b) Measurement

This button measures the height.

- When the control item “Measurement” is checked off, press the <Exec> button for

control.

- The measurement result in the “Status” table is updated when the system finishes

controlling the HMS.

Part 2 Detailed Description of Each Function Chapter 9 Manual Control

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9.3.3 Laser and sensor control

When you select [Head] – [Laser/sensor control] in the menu, the laser/sensor control dialog is

displayed.

(1) Status/Measurement result

The vacuum ON/OFF status of the control head, Z-axis coordinates, and measurement

result by laser are displayed at the completion of control.

A table of statuses which may be returned, when measurement results (SWEEP and ONCE)

are obtained, is shown on the next page.