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SEMI E135-0704 © SEMI 2004 6 NOTE: These data are for conditions where the requested power went from 33% to 3% of the full power of the RF Generator being tested. Figure 3 Example of Digital Oscillosco pe Data that Shows…

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SEMI E135-0704 © SEMI 2004 5
Transient
NOTE: These data are for conditions where the requested power went from 3% to 33% of the full power of the RF Generator
being tested.
Figure 2
Example of Digital Oscilloscope Data that Shows the Transient Response of the RF Output Power (Lower
Trace) Due to a Change in Set Point Signal (Upper Trace)
SEMI E135-0704 © SEMI 2004 6
NOTE: These data are for conditions where the requested power went from 33% to 3% of the full power of the RF Generator
being tested.
Figure 3
Example of Digital Oscilloscope Data that Shows the Transient Response of the RF Output Power (Lower
Trace) Due to a Change in Set Point Signal (Upper Trace)
RF Signal Sample
r
D
irectional or
N
ondirectional
RF Powe
r
Mete
r
High-Power
RF Dummy
Load
R
F
Generator
(
DUT
)
RF Rectifier
/
Diode Detecto
r
Digital Scope
RF Enable
Signal Generato
r
RF Set-Point
/
Signal Generato
r
NOTE: If cable assemblies are used between the output of the RF Generator (DUT) and the High-Power Dummy Load, they shall
have the same nominal impedance as the DUT and shall have a power handling capability that is consistent with the maximum
output power of the RF Generator (DUT).
Figure 4
Schematic of the Test Setup for the Measuring the Transient Response of the RF Generator (DUT) as a
Function of a Change in the RF Enable Signal
SEMI E135-0704 © SEMI 2004 7
Time Delay
NOTE: These data are for conditions where the requested power went from 0% to 100% of the full power of the RF Generator
being tested.
Figure 5
Example of Digital Oscilloscope Data that Shows the Transient Response and Time Delay of the RF Output
Power (Upper Trace) Due to a Change in the RF Enable Signal (Lower Trace)
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