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SEMI S2-0703a E © SEMI 1991, 2004 68 RELATED INFORMATION 8 DOCUMENTATION OF NON-IONIZING RADIATION (SECTION 25 AND APPENDIX 5) INCLUDING RATIONALE FOR CHANGES NOTICE : This rel ated information i s not an of ficial part …

SEMI S2-0703a

NOTE 1: During design of shielding, the properties of the

radiation should be considered as well as the properties of the

shielding materials. Bremsstrahlung production should be

minimized. Some shielding materials are considered

hazardous materials. These hazardous properties should be

considered and identified.

R7-3.3 radiation machine — means any device

capable of producing ionizing radiation except those

devices with radioactive material as the only source of

radiation.

R7-3.4 radiation producing machine — is a radiation

machine that produces ionizing radiation as a by-

product of the process it uses, e.g., ion implanter or

scanning electron microscope.

R7-3.5 radiation worker — “worker” means an

individual engaged in radiation related work under a

license or certificate of registration issued by the

Agency and controlled by a licensee or registrant, but

does not include the licensee or registrant.

R7-3.6 radioactive material – means any material

(solid, liquid, or gas) that emits ionizing radiation

spontaneously.

R7-3.7 X-ray machine — is a radiation machine that

generates X-rays as a primary function of the

equipment. This category of radiation machine has a

specific limit due to the existence of performance

standards against which the equipment is evaluated.

The equipment must be below this limit to be sold in

some parts of the world.

R7-3.8 X-rays — are produced with electricity and

therefore can be turned off. X-rays seem to be the most

prevalent radiation type in semiconductor

manufacturing equipment. They are produced when

charged particles are slowed or stopped. This slowing

results in “bremsstrahlung.” The majority of the

equipment does not intentionally produce X-rays. This

energy is a by-product of the process.

R7-4 Radioactive Materials

R7-4.1 Gamma radiation is a by-product of atomic

transformations (decay) and is a release of energy from

the nucleus. This radiation energy must be shielded

since there is no off switch.

R7-4.2 Radioactive Materials are controlled by

licensing. There are quantities of certain radioactive

materials that are exempt from regulation. These

sources should be identified.

R7-4.3 External radiation hazards from radioactive

materials include gamma rays. These are controlled and

evaluated much like the X-rays.

R7-4.4 Internal radiation hazards from radioactive

materials include Alpha and Beta particles. Radioactive

materials ingested or inhaled can be metabolized or

damage surrounding tissue. Allowable levels of

airborne radioactivity and radionuclide intakes are

specified in regulations. The objective is still to

maintain all exposure to ionizing radiation (internal and

external) as low as reasonably achievable, but always

less than the allowable regulatory limits.

SEMI S2-0703a

RELATED INFORMATION 8

DOCUMENTATION OF NON-IONIZING RADIATION (SECTION 25 AND

APPENDIX 5) INCLUDING RATIONALE FOR CHANGES

NOTICE: This related information is not an official part of SEMI S2 and was derived from practical application by

task force members. This related information was approved for publication by vote of the responsible committee on

October 21, 1999.

R8-1 The user of this table is responsible for obtaining

the current revision of the standards cited for

Occupational Exposure Limits (OEL).

R8-2 The emission values in Appendix 5 that are not to

be exceeded were chosen based on a review of all

known international standards as well as a

consideration for best available control technology (i.e.,

lowest values currently achievable for each radiation

type). Where a general public limit existed, 20% of this

value was selected. Where there was no public limit,

the value selected is generally 20% of the OEL value

(instantaneous field strength measurement peak). The

latter case would have the occupational and general

public levels the same. Where there was an

occupational exposure limit specified in a standard, the

maintenance emission limit was set at 20% of this level.

R8-3 Most health standards differentiate between

“occupational” and “general public” exposure criteria.

IEEE C95.1 differentiates between “controlled access”

and “uncontrolled access” exposures. According to

C95.1 “controlled access” environments are those

where “locations where there is exposure that may be

incurred by persons who are aware of the potential for

exposure as a concomitant of employment, by other

cognizant persons, or as the incidental result of

transient passage through areas where analysis shows

the exposure levels may be above those shown in Table

2 but do not exceed those of Table 1, and where the

induced currents may exceed the values in Table 2, Part

B, but do not exceed the values of Table 1, Part B.”

According to C95.1, “uncontrolled access”

environments are “locations where there is the exposure

of individuals who have no knowledge or control of

their exposure. The exposure may occur in living

quarters or workplaces where there are no expectations

that the exposure levels may exceed those shown in

Table 2 and where induced currents do not exceed those

in Table 2, Part B.” Task force members advise that

C95.1 “controlled access” and other “occupational

exposure” standards should be applied to personnel

performing maintenance and service of equipment and

that “uncontrolled access” or other “general public”

standards should be applied to equipment operators

during routine work and to other locations. These IEEE

definitions are particularly relevant to broadcast

facilities as well as normal industrial environments such

as fabs. Task force members recommend that

uncontrolled access limits be applied to fetal exposure.

R8-4 As with the rationale in the Ionizing section, the

operator is considered a member of the general public

or to be in an uncontrolled area. Maintenance or service

technicians should be trained to know how to control

the hazardous energy and protect themselves from the

hazard and its adverse effects.

R8-5 References

1. 1996 TLVs and BEIs Threshold Limit Values for

Chemical Substances and Physical Agents Biological

Exposure Indices, ACGIH, Cincinnati, OH

2. Guidelines on Limits of Exposure to Broad-Band

Incoherent Optical Radiation (0.38 to 3 M), Health

Physics Vol. 73, No. 3 (September), pp.539-554, 1997

3. ICNIRP 1994 “Guidelines on Limits of Exposure

to Static Magnetic Fields”, Health Physics Vol 66 (1)

(January), pp. 100-106, 1994

4. IEEE Standard for Safety Levels with Respect to

Human Exposure to Radio Frequency Electromagnetic

Fields, 3 kHz to 300 GHz, C95.1-1991, Piscataway,

New Jersey

5. Interim Guidelines on the Limits of Exposure to

50/60 Hz Electric and Magnetic Fields, IRPA/ICNIRP

Guidelines, Health Physics Vol. 58, No. 1(January), pp.

113-122, 1990

SEMI S2-0703a

RELATED INFORMATION 9

LASER CHECKLIST

NOTICE: The RI below will be withdrawn upon July 1, 2006 publication and replaced by the new sections,

figures, and Tables in Delayed Revisions Section 1. The EH&S Committee has voted that implementation of

the information is OPTIONAL before the effective date.

NOTICE: This related information is not an official part of SEMI S2 and was derived from practical application by

task force members. This related information was approved for publication by vote of the responsible committee on

October 21, 1999.

Laser Manufacturer: __________________________________

Model #: __________________________________

Serial #: __________________________________

Laser Hazard Classification: (During Operation)

1. Classification Number (e.g. 1, 2, 3a, 3b, 4): ________

2. Classification Standard(s) (e.g. FDA/CDRH, IEC, JIS, etc.): ________

NOTE R9-1: If any laser contained in the equipment is Class 2, 3a, 3b or 4 laser system or product, the vendor should make

available upon request a hazard evaluation to include the following information for each laser in the equipment (where

applicable):

Laser Parameters

1. Laser medium type (HeNe, Nd:YAG, CO

, Argon, Excimer, GaAs, etc.): __________

Note: For Excimer lasers, specify gases: _______________

2. Wavelength(s) in nanometers (nm): _______________

3. Continuous Wave

A. Peak Power in Watts (W): ________

B. Available Power in Watts (W): ________

C. Irradiance in Watts/square centimeter (W/cm

): _ ________

4. Pulse Characteristics

A. Duration of Pulse in Seconds (s): ________

B. Energy per Pulse in Joules (J): ________

C. Frequency of Pulses (Pulse Repetition Frequency) in Hertz (Hz): ________

D. Average Power in Watts (W): ________

E. Radiant Exposure in Joules/square centimeter (J/cm

): ________

F. Q-Switch controlled pulses ( ) Yes ( ) No

5. Beam Parameters

A. Emerging beam diameter in millimeters (mm): ________

B. Expanded beam diameter in millimeters (mm): ________

C. Beam divergence in milliradians (mr): ________

D. Collecting optics type: ________

E. Focal length in millimeters (mm): ________