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SEMI E111-0305 © SEMI 2001, 2005 1 SEMI E111-0305 PROVISIONAL MECHANICAL SPECIFICATI ON FOR A 150 mm RETICLE SMIF POD (RSP150) USED TO TRANSPORT AND STORE A 6 INCH RETICLE This specificatio n was technically approved b y…

SEMI E110-1102 © SEMI 2001, 2002 5

Table 3 Dimensions of Switch Placement Volume

Symbol Used Figure Value Specified Reference Measured From Remarks

r400 3 240 mm (9.45 in)

y67 in front of nominal wafer

center line

Equal to the maximum value of r67

defined in SEMI E47.1

x403 3 75 mm (2.95 in.) bilateral datum plane

x404 3 245 mm (9.65 in.) bilateral datum plane

y400 3,4 100 mm (3.94 in)

facial datum plane (as shown in

Figure 1 of SEMI E15.1)

y401 3,4 250 mm(9.843 in)

facial datum plane (as shown in

Figure 1 of SEMI E15.1)

Equal to the maximum value of D

defined in SEMI E15.1

y402 3 190 mm (7.48 in)

facial datum plane (as shown in

Figure 1 of SEMI E15.1)

Equal to the maximum value of y53

defined in SEMI E47.1

z404 4

15 mm (0.59 in.)

horizontal datum plane

z405 4 165 mm (6.50 in.) horizontal datum plane -

6 Related Documents

6.1 SEMI Standards

SEMI E62 — Provisional Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS)

SEMI E63 — Mechanical Specification for 300 mm Box Opener/Loader to Tool Standard (BOLTS-M) Interface

SEMI E92 — Provisional Specification for 300 mm Light Weight and Compact Box Opener/Loader to Tool-

Interoperability Standard (BOLTS/Light)

SEMI S8 — Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment

NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any

particular application. The determination of the suitability of the standard is solely the responsibility of the user.

Users are cautioned to refer to manufacture' s instructions, product labels, product data sheets, and other relevant

literature, respecting any materials or equipment mentioned herein. These standards are subject to change without

notice.

By publications of this standard, Semiconductor Equipment and Materials International (SEMI) takes no position

respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this

standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and

the risk of infringement of such rights are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o

the contents in whole or in part is forbidden without express written

consent of SEMI.

SEMI E111-0305 © SEMI 2001, 2005 1

SEMI E111-0305

PROVISIONAL MECHANICAL SPECIFICATION FOR A 150 mm

RETICLE SMIF POD (RSP150) USED TO TRANSPORT AND STORE A 6

INCH RETICLE

This specification was technically approved by the Global Physical Interfaces and Carriers Committee and is

the direct responsibility of the North American Physical Interfaces and Carriers Committee. Current edition

approved by the North American Regional Standards Committee on December 10, 2004. Initially available

at www.semi.org February 2005; to be published March 2005. Originally published November 2001; last

published November 2004.

1 Purpose

1.1 This standard specifies the 150 mm Reticle SMIF Pod (RSP150) used to transport and store a 6 inch reticle in

an integrated circuit (IC) manufacturing facility.

2 Scope

2.1 This standard is intended to set an appropriate level of specification that places minimal limits on innovation

while ensuring modularity and inter- changeability at all mechanical interfaces. Most of the requirements given in

this specification are in the form of maximum or minimum dimensions with very few required surfaces. Only the

physical interfaces for the RSP150 are specified; no materials requirements or micro-contamination limits are given

in this specification.

2.2 The pellicle exclusion volume of this specification accommodates pellicles which extend the full length of the

reticle and up to a maximum pellicle width of 124 mm.

2.3 The RSP150 has the following components, sub-components, and other features. A “” symbol indicates

components or features which are required and a “” symbol indicates components or features which are optional.

 Top

 robotic handling flange

 Interior

 supports for one 6 inch reticle

 reticle capture

 reticle contact surfaces

 end-effector exclusion volumes

 2 safety rail exclusion volumes

 pellicle exclusion volumes

 lateral constraints

 2 reticle backstops

 Sides

 2 side handling flanges on the sides parallel to the bi-lateral reference plane

 2 side handling exclusion volumes

 RFID placement zone

 Bottom

 door compatible with SMIF as defined in SEMI E19.3

SEMI E111-0305 © SEMI 2001, 2005 2

 pod latch-pin holes

 2 conveyor rails on the sides parallel to the bi-lateral reference plane

2.4 This standard is provisional because of the issues detailed in the related information section. Once investigation

of issues in the Related Information section has been completed, this standard should be upgraded from provisional

status.

NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish appropriate safety health practices and determine the

applicability of regulatory or other limitations prior to use.

3 Referenced Standards

3.1 SEMI Standards

SEMI E19.3 — Port Standard for Mechanical Interface of Wafer Cassette Transfer, 150 mm (6 inch) Port

SEMI E30.1 — Inspection and Review Specific Equipment Model (ISEM)

SEMI E47.1 — Provisional Mechanical Specification for Boxes and Pods Used to Transport and Store 300 mm

Wafers

SEMI P5 — Specification for Pellicles

NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.

4 Terminology

4.1 Definitions

4.1.1 150 mm Reticle SMIF Pod (RSP150) — a minienvironment compatible carrier capable of holding a 6 inch

reticle in a horizontal orientation during transport and storage and is compatible with a Standard Mechanical

Interface (SMIF) per SEMI E19.3.

4.1.2 bilateral reference plane — a vertical plane which bisects the RSP150 and is perpendicular to both the

horizontal and facial reference planes and passes through the center of the 150 mm SMIF as defined in SEMI E19.3.

4.1.3 facial reference plane — a vertical plane which bisects the RSP150 and is parallel to the front side of the pod

(where reticles are removed or inserted) and passes through the center of the 150 mm SMIF as defined in SEMI

E19.3.

4.1.4 horizontal reference plane — a horizontal plane coplanar with the top surface of the port door as defined in

SEMI E19.3.

4.1.5 minienvironment — a localized environment created by an enclosure to isolate the product from contamination

and people.

4.1.6 nominal reticle center line — the line that is defined by the intersection of two perpendicular vertical planes

each of which bisect the reticle at the mid-point of a side.

4.1.7 pellicle — as defined in SEMI P5.

4.1.8 reticle — as defined in SEMI E30.1.

4.1.9 robotic handling flanges — horizontal projections on the top of the box for lifting and rotating the box (as

defined in SEMI E47.1).

4.1.10 side handling flanges — horizontal projections on the sides of the pod (sides parallel to the bilateral

reference plane) for lifting, transportation or positioning of the pod.

5 Ordering Information

5.1 Intended Use

— This standard is intended to specify reticle carriers over a reasonable lifetime of use, not just

those in new condition. For this reason, the purchaser should specify a time period and the number and type of uses