semi合集-English.pdf - 第5610页

SEMI P10-0705 © SEMI 1990, 2005 105 < x s : e l e m e n t n a m e = " Cd X y D e v i a t i o n " t y p e = " x s : d o u b l e " m i n Oc cu r s = " 0 " / > < x s : e l e m e n t n …

100%1 / 7923
SEMI P10-0705 © SEMI 1990, 2005 104
< xs: elem ent nam e= "CdGroupN a m e" type= "x s:st ring"
m inOccurs
= " 0 " m axOccurs= " unbounded" / >
< xs: elem ent nam e= "CdRefe rence On ly" t ype= "x s:boolea n"
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "CdQua lityI d" t ype= "x s:st r ing"
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "CdToler a nce" type= "x s:double"
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "CdRa n ge" t ype= "x s:double "
m inOccurs
= " 0 " / >
< xs: elem ent nam e= " CdThre eSigm a " type= " xs:double "
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "CdDevia t ionFrom Tar get "
type
= " x s:dou ble" m inOccurs= " 0 " / >
< xs: elem ent nam e= "CdDevia t ionFrom Mea n"
type
= " x s:dou ble" m inOccurs= " 0 " / >
< xs: elem ent nam e= "Mea su re dCdM e an" t ype= "xs:double"
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "Mea su re dCdM in" type= " xs:double"
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "Mea su re dCdM a x
" type= "xs:double "
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "Mea su re dCdTole r ance "
type
= " x s:dou ble" m inOccurs= " 0 " / >
< xs: elem ent nam e= "Mea sur edCdRan ge" t ype= "xs:double "
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "Mea sur e dCdThr e e Sigm a "
type
= " x s:dou ble" m inOccurs= " 0 " / >
< xs: elem ent nam e= "Mea sur edCdD evia t ionFrom Ta rge t "
type
= " x s:dou ble" m inOccurs= " 0 " / >
< xs: elem ent nam e= "Mea sur edCdD evia t ionFrom Mea n"
type
= " x s:dou ble"
m inOccurs= "0 " / >
< / xs: sequence>
< xs: at t ribut e nam e= "groupN am e " t ype= " x s:st ring"
use
= " requir e d" / >
< xs: at t ribut e nam e= "p1 0 St art " type= "x s:string" use= "requ ire d"
fixed
= "St a rt CdSe t Result s" / >
< xs: at t ribut e nam e= "p1 0 End" t ype= "x s:st ring" use= " r equir e d"
fixed
= "EndCdSe t Resu lt s" / >
< / xs: com plexType>
- < xs: com plexType nam e= "CdXyResult sType" >
- < xs: sequence>
< xs: elem ent
nam e= " CdXGr oup" t ype= "xs:st r in g"
m inOccurs
= " 0 " m axOccurs= " unbounded" / >
< xs: elem ent nam e= "CdYGrou p" type= "x s:st ring"
m inOccurs
= " 0 " m axOccurs= " unbounded" / >
< xs: elem ent nam e= "CdXySit e" type= " CdXy Sit e Type "
m inOccurs
= " 0 " m axOccurs= " unbounded" / >
< xs: elem ent nam e= "CdXyTolera nce " t ype= "x s:double"
m inOccurs
= " 0 " / >
SEMI P10-0705 © SEMI 1990, 2005 105
< xs: elem ent nam e= "CdXyDe via t ion" t ype= "xs:double"
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "CdXyRefe re nce On ly" t ype= " x s:boolean"
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "Mea sur edCdXyTolera nce"
type
= " x s:dou ble" m inOccurs= " 0 " / >
< xs: elem ent nam e= "Mea sur edCdXyDe via t ion"
type
= " xs:dou ble" m inOccurs= " 0 " / >
< xs: elem ent nam e= "Mea sur e dCdXyMor phogr a phy"
type
= " x s:st r ing" m inOccurs= " 0 " / >
< xs: elem ent nam e
= "Mea sur edCdX yToneClea r"
type
= " x s:boolean" m inOccurs= "0 " / >
< / xs: sequence>
< xs: at t ribut e nam e= "groupN am e " t ype= " x s:st ring"
use
= " requir e d" / >
< xs: at t ribut e nam e= "p1 0 St art " type= "x s:string" use= "requ ire d"
fixed
= "St a rt CdXyRe sult s" / >
< xs: at t ribut e nam e= "p1 0 End" t ype= "x s:st ring" use= " r equir e d"
fixed
= "EndCdXyResu lt s" / >
< / xs: com plexType>
- < xs: com plexType nam e= "CdXySiteType">
- <
xs: sequence>
- < xs: sequence m inOccurs= " 0 ">
< xs: elem ent nam e= "CdHor izont a lI d" type= "x s:st ring" / >
- < xs: elem ent nam e= "CdHor izont a lLocat ion" >
- < xs: com plexType>
- < xs: com plexCont ent>
- < xs: ext ension base= "XYCoordType">
< xs: at t ribut e nam e= "p1 0 Mult iValue "
type
= " x s:in t e ger " use= " required"
fixed
= "2 " / >
< / xs: ext ension>
< / xs: com plexCont ent>
< / xs: com plexType>
< / xs: elem ent>
< / xs: sequence>
< xs: elem ent nam e= "CdHoriz ont a lM orphogr a phy"
type
= " xs:st r ing" m inOccurs= " 0 " / >
< xs: elem ent nam e= "CdHor izont a lToneClea r"
type
= " xs:boolean" m inOccurs= "0 " / >
< xs: elem ent nam e= "Mea sur edHoriz on t a lCd"
type
= " xs:dou ble" / >
- < xs: sequence m inOccurs= " 0 ">
< xs: elem ent nam e= "CdVert icalI d" t ype= "x s:st ring" / >
- < xs: elem ent nam e= "CdVert icalLocat ion ">
- < xs: com plexType>
- < xs: com plexCont ent>
- < xs: ext ension base= "XYCoordType">
SEMI P10-0705 © SEMI 1990, 2005 106
< xs: at t ribut e nam e= "p1 0 Mult iValue "
type
= " x s:in t e ger " use= " required"
fixed
= "2 " / >
< / xs: ext ension>
< / xs: com plexCont ent>
< / xs: com plexType>
< / xs: elem ent>
< / xs: sequence>
< xs: elem ent nam e= "CdVert icalM orphogra phy"
type
= " x s:st r ing" m inOccurs= " 0 " / >
< xs: elem ent nam e= "CdVer t ica lTone Clear" t ype= "x s:boole an"
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "Mea sur edVer t ica lCd"
t ype= " x s:double"
/ >
< / xs: sequence>
< xs: at t ribut e nam e= "groupN am e " t ype= " x s:st ring"
use
= " requir e d" / >
< xs: at t ribut e nam e= "p1 0 St art " type= "x s:string" use= "requ ire d"
fixed
= "St a rt CdXySit e " / >
< xs: at t ribut e nam e= "p1 0 End" t ype= "x s:st ring" use= " r equir e d"
fixed
= "EndCdXySit e" / >
< / xs: com plexType>
- < xs: com plexType nam e= "CdI soDe nseRe sult sType">
- < xs: sequence>
< xs: elem ent
nam e= "CdI soGroup" t ype= "x s:st r ing"
m inOccurs
= " 0 " m axOccurs= " unbounded" / >
< xs: elem ent nam e= "CdDe nse Group" t ype= "x s:st ring"
m inOccurs
= " 0 " m axOccurs= " unbounded" / >
< xs: elem ent nam e= "CdI soDenseTole r ance"
type
= " x s:dou ble" m inOccurs= " 0 " / >
< xs: elem ent nam e= "CdI soDe nseRe fer enceOnly "
type
= " x s:boolean" m inOccurs= "0 " / >
< xs: elem ent nam e= "Mea sur e dCdI soM ea n " t ype= " x s:double"
m inOccurs
= " 0 " / >
< xs: elem ent nam e= " M easu redCdI soRange"
type
= " x s:dou ble" m inOccurs= " 0 " / >
< xs: elem ent nam e= "Mea sur edCdDe nse Mea n"
type
= " x s:dou ble" m inOccurs= " 0 " / >
< xs: elem ent nam e= "Mea sur edCdDe nse Ra nge"
type
= " x s:dou ble" m inOccurs= " 0 " / >
< xs: elem ent nam e= "Mea sur edCdI soDe nseTole ran ce"
type
= " xs:dou ble" m inOccurs= " 0 " / >
< / xs: sequence>
< xs: at t ribut e nam e= "groupN am e " t ype= " x s:st ring"
use
= " requir e d" / >
< xs: at t ribut e nam e= " p1 0 St a r t " t ype= "x s:st r ing" use= " re quire d"
fixed
= "St a rt CdI soD enseResult s" / >
< xs: at t ribut e nam e= "p1 0 End" t ype= "x s:st ring" use= " r equir e d"
fixed
= "EndCdI soDe nse Result s" / >
< / xs: com plexType>
- < xs: com plexType nam e= "D e fect M easur em en t sType ">