semi合集-English.pdf - 第5648页

SEMI P10-0705 © SEMI 1990, 2005 143 8.1.622 SHIP_BARCODE_PLOT — (T or F) I f T, the plot of the b arcode must be sent to the customer. 8.1.623 SH IP_CD_DATA — (T or F) If T, requires d elivery of all critical dimension m…

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SEMI P10-0705 © SEMI 1990, 2005 142
8.1.600 SCRATCH_INSP_AREA — (x1,y1,x2,y2) Unscaled coordinates of window for scratch inspection, lower
left and upper right corners, relative to nominal center of mask (chrome side up).
8.1.601 SCRATCH_INSP_EXCLUDE — (x1, y1, x2, y2) Unscaled coordinates of window to be excluded from
defect inspection, relative to nominal center of mask (chrome side up). (See SCRATCH_INSP_AREA.)
8.1.602 SCRATCH_SIZE_BACK — Maximum dimension of smallest unacceptable scratch on glass side of mask.
8.1.603 SCRATCH_SIZE_FRONT — Maximum dimension of smallest unacceptable scratch on patterned side of
mask.
8.1.604 SCRIBE_INSIDE_CORNERS — (x1,y1,x2,y2) The inner limits of the SCRIBE_-TONE frame to be built
for the dropout by the vendor. It consists of two pairs of coordinates: the lower-left and upper-right and these are
relative to the DROPOUT window center.
8.1.605 SCRIBE_OUTSIDE_CORNERS — (x1,y1,x2,y2) The outer limits of the SCRIBE_-TONE frame to be
built for the dropout by the vendor. It consists of two pairs of coordinates: the lower-left and upper-right and these
are relative to the DROPOUT window center.
8.1.606 SCRIBE_TONE — (CLEAR or DARK) Border surrounding DROPOUT on mask is to be either clear or
dark.
8.1.607 SECURITY_CLASS — (QML, SECRET, TOP_SECRET, CCI, or COMSEC) Security classification of
mask set or individual mask.
8.1.608 SEM_PHOTO_LOCATION — (x,y) Location of SEM photographing location relative to the nominal
center of the mask (chrome side up).
8.1.609 SEM_PHOTO_MATRIX_FILE_NAME — Alphanumeric name of file to be used for SEM photograph
locations. It is not to be used in conjunction with SEM_PHOTO_LOCATION within the same
START_SEM_PHOTO to END_SEM_PHOTO set.
8.1.610 SEM_PHOTO_ROTATION — Angle in degrees at which a SEM Photo Image output is rotated about the
Z axis of the mask. Angles are to be counter-clockwise with zero degrees as the regular orientation of the mask as
written.
8.1.611 SEM_PHOTO_SCALE — Numeric scale of the SEM photograph image.
8.1.612 SEM_PHOTO_SITE_ID — Unique alphanumeric identifier of each SEM photographing location within
MASK_SET_ID to identify individual SEM photo locations when using <mask_data>. If the same coordinates
apply to locations on different masks within the mask set, they may have the same SEM_PHOTO_SITE_ID, but it is
not mandatory.
8.1.613 SEM_PHOTO_TILT — Angle in degrees at which a SEM Photo Image output is tipped away from normal
to the x/y plane of the mask.
8.1.614 SEMI_REVISION — Revision identification of the SEMI standard according to which the <mask_order>
data structure was constructed. This revision is P10-0705.
8.1.615 SEND_FINAL_AUDIT_DATE_TIME — (T or F) If T, requires delivery of
FINAL_AUDIT_DATE_TIME to the customer.
8.1.616 SEND_MASK_SHIPPED_DATE_TIME — (T or F) If T, requires delivery of
MASK_SHIPPED_DATE_TIME to the customer.
8.1.617 SERIAL_NUMBER — (T or F) If T, a mask serial number must be included on the mask.
8.1.618 SEVERITY_CRITERION_REQD — (PASS, WARN, FAIL) Setup parameter required for inspection.
8.1.619 SEVERITY_CRITERION_USED — (PASS, WARN, FAIL) Setup parameter used for inspection.
8.1.620 SHIP_AIM_DATA — (T or F) If T, requires delivery of <wafer_exposure_information>,
<aerial_image_info> and any output of the final inspection using the aerial imaging measurement tool.
8.1.621 SHIP_ARRAY_REGISTR_MAP — (T or F) If T, requires delivery of the registration map of the entire
array to the customer.
SEMI P10-0705 © SEMI 1990, 2005 143
8.1.622 SHIP_BARCODE_PLOT — (T or F) If T, the plot of the barcode must be sent to the customer.
8.1.623 SHIP_CD_DATA — (T or F) If T, requires delivery of all critical dimension measurements, criteria and
evaluation data to the customer for all CD criteria specified.
8.1.624 SHIP_CD_PRINTOUT — (T or F) If T, requires delivery to the customer of the printout from the CD
measurement tool.
8.1.625 SHIP_CD_UNIFORMITY_MAP — (T or F) If T, requires delivery to the customer of the uniformity map
from the CD uniformity measurement tool.
8.1.626 SHIP_CENTRALITY_DATA — (T or F) If T, requires delivery of the centrality measurement to the
customer.
8.1.627 SHIP_CENTRALITY_MAP — (T or F) If T, requires delivery of the centrality map to the customer.
8.1.628 SHIP_CERTIFICATE_OF_CONFORMANCE — (T or F) If T, requires delivery of a certificate of
conformance to the customer.
8.1.629 SHIP_CLOSURE_DATA — (T or F) If T, requires delivery of closure measurement data to the customer.
8.1.630 SHIP_CUSTOMER_QUALITY_FORM — (text) If present, the data field specifies the form required by
the customer to document the quality of the mask.
8.1.631 SHIP_DEFECT_DATA — (T or F) If T, requires delivery of defect inspection criteria and evaluation data
to the customer for all defect criteria specified. This should be final inspection data unless
SHIP_THRU_PELLICLE_DATA is specified, in which case it should be for final inspection prior to pelliclizing.
8.1.632 SHIP_DIE_FIT_MAP — (T or F) If T, requires delivery of a die fit map to the customer.
8.1.633 SHIP_FILM — If present, film(s) of mask(s) must be sent to customer. Indicates beginning of <films>
collection. Alphanumeric data field identifies the collection to establish which collections are hierarchically affected
by another. The appearance of a <films> at a lower level in the hierarchy supercedes the <films> at a higher level in
the hierarchy if it has the same SHIP_FILM data field.
8.1.634 SHIP_FIELD_FIT_MAP — (T or F) If T, requires delivery of a field fit map to the customer.
8.1.635 SHIP_FINAL_POSTPELL_DIE_DB_MSK_MAP — (T or F) If T, requires delivery of the final run, post-
pellicle die to database defect inspection map for the entire patterned area to be sent to customer.
8.1.636 SHIP_FINAL_POSTPELL_DIE_DB_PTN_MAP — (T or F) If T, requires delivery of the final run, post-
pellicle die to database defect inspection map for the single pattern to be sent to customer.
8.1.637 SHIP_FINAL_POSTPELL_DIE_DIE_MAP — (T or F) If T, requires delivery of the final run, post-
pellicle die to die defect inspection map for the entire mask to be sent to customer.
8.1.638 SHIP_FINAL_PREPELL_DIE_DB_MSK_MAP — (T or F) If T, requires delivery of the final run, pre-
pellicle die to database defect inspection map for the entire patterned area to be sent to customer.
8.1.639 SHIP_FINAL_PREPELL_DIE_DB_PTN_MAP — (T or F) If T, requires delivery of the final run, pre-
pellicle die to database defect inspection map for the single pattern to be sent to customer.
8.1.640 SHIP_FINAL_PREPELL_DIE_DIE_MAP — (T or F) If T, requires delivery of the final run, pre-pellicle
die to die defect inspection map for the entire mask to be sent to customer.
8.1.641 SHIP_FINAL_ROT_POSTPELL_DIE_DIE_MAP — (T or F) If T, requires delivery of the final run, post-
pellicle rotated die to die defect inspection map for the entire mask to be sent to customer.
8.1.642 SHIP_FINAL_ROT_PREPELL_DIE_DIE_MAP — (T or F) If T, requires delivery of the final run, pre-
pellicle rotated die to die defect inspection map for the entire mask to be sent to customer.
8.1.643 SHIP_FIRST_POSTPELL_DIE_DB_MSK_MAP — (T or F) If T, requires delivery of the first run, post-
pellicle die to database defect inspection map for the entire patterned area to be sent to customer.
8.1.644 SHIP_FIRST_POSTPELL_DIE_DB_PTN_MAP — (T or F) If T, requires delivery of the first run, post-
pellicle die to database defect inspection map for the single pattern to be sent to customer.
SEMI P10-0705 © SEMI 1990, 2005 144
8.1.645 SHIP_FIRST_POSTPELL_DIE_DIE_MAP — (T or F) If T, requires delivery of the first run, post-pellicle
die to die defect inspection map for the entire mask to be sent to customer.
8.1.646 SHIP_FIRST_PREPELL_DIE_DB_MSK_MAP — (T or F) If T, requires delivery of the first run, pre-
pellicle die to database defect inspection map for the entire patterned area to be sent to customer.
8.1.647 SHIP_FIRST_PREPELL_DIE_DB_PTN_MAP — (T or F) If T, requires delivery of the first run, pre-
pellicle die to database defect inspection map for the single pattern to be sent to customer.
8.1.648 SHIP_FIRST_PREPELL_DIE_DIE_MAP — (T or F) If T, requires delivery of the first run, pre-pellicle
die to die defect inspection map for the entire mask to be sent to customer.
8.1.649 SHIP_FIRST_ROT_POSTPELL_DIE_DIE_MAP — (T or F) If T, requires delivery of the first run, post-
pellicle rotated die to die defect inspection map for the entire mask to be sent to customer.
8.1.650 SHIP_FIRST_ROT_PREPELL_DIE_DIE_MAP — (T or F) If T, requires delivery of the first run, pre-
pellicle rotated die to die defect inspection map for the entire mask to be sent to customer.
8.1.651 SHIP_INSP_DATABASE_DATA — (T or F) If T, requires delivery of die-to-database inspection data to
the customer.
8.1.652 SHIP_MANUAL_INSPECTION_FORM — (T or F) If T, requires delivering to the customer a copy of the
manual inspection form.
8.1.653 SHIP_MEASURE_FILE_REGISTR_MAP — (T or F) If T, requires delivering to the customer the
measure file registration map.
8.1.654 SHIP_PHASE_SHIFT_MEASUREMENTS — (T or F) If T, <phase_shift_measurements> must be sent to
the customer.
8.1.655 SHIP_PHASE_SHIFT_REPORT — (T or F) If T, requires delivering to the customer a report of the phase
shift characteristics of the mask.
8.1.656 SHIP_REGISTR_DATA — (T or F) If T, requires delivery of all registration measurements, criteria and
evaluation data to the customer for all registration criteria specified.
8.1.657 SHIP_REPAIR_DATA — (T or F) If T, requires delivery of repair data to the customer.
8.1.658 SHIP_SEM_PHOTOS — (T or F) If T, requires delivery of SEM photos to the customer.
8.1.659 SHIP_SPECIAL_REQUEST — (text) If present, the data field specifies the special request of the
customer.
8.1.660 SHIP_STARLIGHT_MAP — (T or F) If T, requires delivery of a defect map from the Starlight to the
customer.
8.1.661 SHIP_SURF_INSP_GLASS_SIDE_MAP — (T or F) If T, the final, post-pellicle, surface inspection map
of the glass side of the mask must be sent to the customer.
8.1.662 SHIP_SURF_INSP_MEASUREMENTS — (T or F) If T, <surface_insp_measurements> must be sent to
the customer.
8.1.663 SHIP_SURF_INSP_PATTERN_SIDE_MAP — (T or F) If T, the final, post-pellicle, surface inspection
map of the patterned side of the mask must be sent to the customer.
8.1.664 SHIP_SURF_INSP_PELL_TOP_MAP — (T or F) If T, the final, post-pellicle, surface inspection map of
the pellicle on the patterned side of the mask must be sent to the customer.
8.1.665
SHIP_SURF_INSP_PELL_BOTTOM_MAP — (T or F) If T, the final, post-pellicle, surface inspection
map of the pellicle on the glass side of the mask must be sent to the customer.
8.1.666 SHIP_SURF_INSPECTION_MAP — (T or F) If T, the final, post-pellicle, surface inspection map(s) must
be sent to the customer.
8.1.667 SHIP_THRU_PELLICLE_DATA — (T or F) If T, requires delivery of through-pellicle defect inspection
criteria and evaluation data to the customer for all defect criteria specified. This should be final inspection data.