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SEMI E104-0303 © SEMI 2000, 2003 3 3.8 JIS Standards 7 JIS B 9921 — Light Scattering Automatic Particle Counter 3.9 VDI Stand a rds 8 VDI-Richtlinie 3489-3 — Messen von Partikeln: Methoden zur Charakterisi erung u nd Übe…

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SEMI E104-0303 © SEMI 2000, 2003 2
3.2 ASTM Standards
1
ASTM D1193 — Standard Specification for Reagent
Water
ASTM F328 — Standard Practice for Calibration of an
Airborne Particle Counter Using Monodisperse
Spherical Particles
ASTM F649 — Practice for Secondary Calibration of
Airborne Particle Counter Using Comparison
Procedures
3.3 BSI Standards
2
BS 3406-7 — Determination of Particle Size
Distribution – Recommendations for Single Particle
Light Interaction Methods
3.4 IEC Standards
3
IEC 60625-1 — Programmable Measuring Instruments
- Interface System (Byte Serial, Bit Parallel) - Part 1:
Functional, Electrical and Mechanical Specifications,
System Applications, and Requirements for the
Designer and User
IEC 60625-2 — Programmable Measuring Instruments
- Interface System (Byte Serial, Bit Parallel) - Part 2:
Codes, Formats, Protocols, and Common Commands
IEC 60654-1 — Operating Conditions for Industrial-
Process Measurement and Control Equipment - Part 1:
Climatic Conditions
IEC 60654-2 — Operating Conditions for Industrial-
Process Measurement and Control Equipment - Part 2:
Power
IEC 60654-3 — Operating Conditions for Industrial-
Process Measurement and Control Equipment - Part 3:
Mechanical Influences
IEC 60654-4 — Operating Conditions for Industrial-
Process Measurement and Control Equipment - Part 4:
Corrosive And Erosive Influences
IEC 60801-1 — Electromagnetic Compatibility for
Industrial-Process Measurement and Control
Equipment - Part 1: General Introduction
1 American Society for Testing and Materials, 100 Barr Harbor
Drive, West Conshohocken, Pennsylvania 19428-2959, USA.
Telephone: 610.832.9585, Fax: 610.832.9555 Website:
www.astm.org
2 British Standards Institute, 389 Chiswick High Road, London, W4
4AL, United Kingdom. Telephone: 44.0.20.8996.9000, Fax:
44.0.20.8996.7001 Website: www.bsi-global.com
3 International Electrotechnical Commission, 3, rue de Varembé,
Case Postale 131, CH-1211 Geneva 20, Switzerland. Telephone:
41.22.919.02.11; Fax: 41.22.919.03.00 Website: www.iec.ch
3.5 IEEE Standards
4
IEEE 488.1 — IEEE Standard Digital Interface for
Programmable Instrumentation
IEEE 488.2 — IEEE Standard Codes, Formats,
Protocols, and Common Commands for use with IEEE
488.1, IEEE Standard Digital Interface for
Programmable Instrumentation
3.6 IEST Standards
5
IEST RP-011 — A Glossary of Terms and Definitions
Related to Contamination Control
3.7 ISO Standards
6
ISO 1609 — Vacuum technology -- Dimensions (ISO-
K style and ISO-F style)
ISO 2861-1 — Vacuum technology -- Quick-release
couplings – Dimensions - Part 1: Clamped type (ISO-
KF)
ISO 2861-2 — Vacuum technology -- Quick-release
couplings – Dimensions - Part 2: Screwed type (ISO-
MF)
ISO 3669 — Vacuum technology -- Bakeable flanges --
Dimensions (ISO-K-CF)
ISO 10012-1 — Quality assurance requirements for
measuring equipment – Part 1: Metrological
confirmation system for measuring equipment
ISO 10012-2 — Quality assurance requirements for
measuring equipment – Part 2: Guidelines for control of
measuring processes
ISO 13323-2 — Determination of particle size
distribution – Single Particle Light Interaction Methods
Part 2: Light scattering single particle light interaction
devices design, performance specifications, and
operation requirements
ISO 14644-1 — Cleanrooms and associated controlled
environments - Part 1: Classification of air cleanliness
ISO 14644-5 — Cleanrooms and associated controlled
environments - Part 5: Operation of cleanroom systems
4 Institute of Electrical and Electronics Engineers, IEEE Operations
Center, 445 Hoes Lane, P.O. Box 1331, Piscataway, New Jersey
08855-1331, USA. Telephone: 732.981.0060; Fax: 732.981.1721
5 Institute of Environmental Sciences and Technology, 5005 Newport
Drive, Suite 506, Rolling Meadows, IL 60008-3841, USA.
Telephone: 847.255.1561; Fax: 847.255.1699 Website: www.iest.org
6 International Organization for Standardization, ISO Central
Secretariat, 1, rue de Varembé, Case postale 56, CH-1211 Geneva 20,
Switzerland. Telephone: 41.22.749.01.11; Fax: 41.22.733.34.30
Website: www.iso.ch
SEMI E104-0303 © SEMI 2000, 2003 3
3.8 JIS Standards
7
JIS B 9921 — Light Scattering Automatic Particle
Counter
3.9 VDI Standards
8
VDI-Richtlinie 3489-3 — Messen von Partikeln:
Methoden zur Charakterisierung und Überwachung von
Prüfaerosolen - Optischer Partikelzähler (Particulate
Matter Measurement: Methods of Characterizing and
Monitoring Test Aerosols – Optical Particle Counter)
VDI-Richtlinie 3491 — Messen von Partikeln:
Herstellungsverfahren für Prüfaerosole,
Verdünnungssysteme (Particulate Matter Measurement:
Generation of Test Aerosols, Dilution Systems)
NOTICE: As listed or revised, all documents cited
shall be the latest publications of adopted standards.
4 Terminology
4.1 Abbreviations and Acronyms
4.1.1 COV — Coefficient of Variation
4.1.2 HEPA — High-Efficiency Particulate Air
4.1.3 ISPM — In Situ Particle Monitor
4.1.4 LDL — Lower Detectable Limit
4.1.5 LPPD — Low-Pressure Particle Detector
4.1.6 PHA — Pulse Height Analyzer
4.1.7 RPC — Reference Particle Counter
4.1.8 ULPA — Ultra-Low Penetration Air
4.2 Definitions
4.2.1 accuracy of size — the closeness of agreement
between the ascertained size of the detected particle and
its real size.
4.2.2 coefficient of variation (COV) — the width of a
distribution (in %), obtained by dividing the standard
deviation of the distribution by the mean of the
distribution.
4.2.3 coincidence — the presence of two or more
particles in the detection area of the particle detector at
the same time, causing the particle detector to interpret
the combined signal erroneously as resulting from one
larger particle.
7 Japanese Industrial Standards, Available through the Japanese
Standards Association, 1-24, Akasaka 4-Chome, Minato-ku, Tokyo
107-8440, Japan. Telephone: 81.3.3583.8005; Fax: 81.3.3586.2014
Website: www.jsa.or.jp
8 Beuth Verlag GmbH, Burggrafenstrasse 6, D-10787 Berlin,
Germany. Telephone: 49.30.2601.0, Fax: 49.30.2601.1260 Website:
www2.beuth.de
4.2.4 concentration — the number of particles per unit
volume, at ambient temperature T
A
and pressure p.
4.2.5 concentration limit — the particle concentration
specified by the manufacturer of the particle detector at
which the error due to coincidence is 10% or less.
NOTE 1: Manufacturers may specify concentration limits at
error levels other than 10%.
4.2.6 counting efficiency the ratio (in %) of detected
concentration divided by the actual concentration of
particles of a given size or range of sizes (see appendix
2).
4.2.7 detection area the area, defined through the
light beam and the detection optics, in which the
particles are detected. Often this area is much smaller
than the cross-section of the pump line or the process
chamber.
4.2.8 high-efficiency particulate air (HEPA) filter
filter with a minimum particle-collection efficiency of
99.97% on all particles larger than
0.3 micrometer.
4.2.9 in situ refers to processing steps or tests that
are done without moving the wafer. Latin for “in
original position”.
4.2.10 in situ particle monitor (ISPM) particle
monitor used under atmospheric conditions or in low-
pressure, vacuum or liquid applications to detect
particles while a process is running.
4.2.11 isokinetic sampling sampling of particles in a
moving aerosol or fluid by matching the sample probe
inlet velocity (flow speed and
direction) to the velocity
of the moving aerosol or fluid.
4.2.12 lower detectable limit (LDL) in particle
measurement: the smallest particle size that a particle
detector can measure at a given flow rate with a signal-
to-noise ratio of at least 3 dB and with a counting
efficiency of 50% ± 10%.
NOTE 2: This is a general definition of LDL. Due to the
special design of most of the LPPDs, a counting efficiency of
50% can not be achieved.
4.2.13 low-pressure particle detector (LPPD)
optical particle sensor for use under low-pressure and
vacuum conditions to measure particles or particle
levels in semiconductor process equipment.
4.2.14 monodisperse calibration particles particles
with known optical properties, a sizing accuracy of at
least 95%, and a size distribution in which the
coefficient of variation is 5% or less.
4.2.15 optical equivalent size the diameter of a
monodisperse calibration particle that produces the
SEMI E104-0303 © SEMI 2000, 2003 4
same detected scattering intensity as the localized light
scatterer (LLS) under investigation under identical test
conditions.
4.2.16 particle size for applications, size is the
optical equivalent diameter of a reference sphere with
known properties as detected by a given light-scattering
particle counter [as defined in SEMI C6.5 and SEMI
C6.6]. For calibration, size is the mean diameter of the
monodisperse sphere.
4.2.17 resolution the capability of the particle
detector to differentiate between particles of similar
size.
NOTE 3: The procedure to define resolution is discussed in
Section 9.2.3.5.
4.2.18 sensitivity in particle measurement: the
smallest standard particle size specified by the
manufacturer that an instrument, method, or system is
capable of measuring under specified conditions (with a
counting efficiency of 50%; see Appendix 2). Also
called minimum detectable particle size.
4.2.19 ultrafine particle a particle with an
equivalent diameter less than 0.1 µm [as defined in ISO
14644-1].
4.2.20 ultra-low penetration air (ULPA) filter filter
with a minimum particle-collection efficiency of
99.9995% on the most penetrating particle size.
4.2.21 zero count the maximum particle count
indicated by a particle counter, in a specified period of
time, that is sampling particle-free air. This value is
specified by the manufacturer, and is commonly also
referred to as false call rate, false count, noise, or noise
level.
4.2.22 zero gas in determining contaminant
contribution by gas distribution system components, a
purified gas that has an insignificant particle
concentration above the lower detectable limit (LDL) of
the analytical instrument. This gas is used for both
instrument calibration and component testing.
4.3 Symbols
4.3.1 A
L
the detection area (mm
2
), defined through
detector optics and light beam of the LPPD.
4.3.2 A
RC
the opening area (mm
2
) of the probe inlet
of the reference particle counter.
4.3.3 C
L
the number concentration (cm
-3
) of
particles in the line at the LPPD.
4.3.4 C
G
the number concentration (cm
-3
) of
particles generated from aerosol generator at given V´
G
.
4.3.5 D
L
the diameter of the pump line (mm) at the
LPPD.
4.3.6 d
p
the diameter of the spherical particle (µm).
4.3.7 D
RC
the diameter of the sample drawing line
(mm) for the reference particle counter.
4.3.8 D
VM
the diameter of the pump line (mm) at the
velocity meter.
4.3.9 p the line pressure (torr or mbar).
4.3.10 RH the relative humidity (%).
4.3.11 T
A
the ambient temperature (° C) around the
measurement or calibration system.
4.3.12 T
G
the gas temperature (° C).
4.3.13 v
L
the velocity (m/s) of the aerosol at the
LPPD.
4.3.14 v
L, min
, v
L, max
for applications, the velocity
range (m/s) of the aerosol at the LPPD specified by the
manufacturer.
4.3.15 V´
L
the volume flow rate (l/min) in the line
at the LPPD.
4.3.16 V´
G
the volume flow rate (l/min) of the
aerosol sample (measured directly behind the aerosol
generator).
4.3.17 v
VM
the velocity (m/s) of the aerosol at the
velocity meter.
4.3.18 V´
ZG
the volume flow rate (l/min) of the zero
gas.
4.3.19 σ
V,LPPD
the standard deviation of the voltage
sensor signal.
4.3.20 σ
p,LPPD
the standard deviation of the observed
particle distribution
4.3.21 σ
d,p
the standard deviation of the particles
given by the particle supplier
5 Mechanical Interfaces
5.1 Flanges
5.1.1 One of the following vacuum flanges should be
used for mounting an LPPD into a pump line or on
process equipment:
ISO 2861-1 and ISO 2861-2 (ISO-KF/MF)
ISO 1609 (ISO-K and ISO-F)
ISO 3669 (ISO-K-CF)