semi合集-English.pdf - 第1078页
SEMI E5-1104 © SEMI 1982, 2004 20 Name Format Description Values Where Used EXMESSAGE 20 Text which describes the nature of the exception. S5F9, F11 EXRECVRA 20 Text which specifies a reco very acti on for an exception. …
SEMI E5-1104 © SEMI 1982, 2004 19
Name Format Description Values Where Used
32769 = Action can not be
performed now
32770 = Action failed due to
errors
32771 = Invalid command
32772 = Client Already Connected
32773 = Duplicate ClientID
32774 = Invalid ClientType
32775 = IncompatibleVersions
32776 = Unrecognized ClientID
(Client not currently connected)
32777 = Failed (Completed
Unsuccessfully)
32778 = Failed (Unsafe) —
External intervention required
32779 = Sensor-Detected Obstacle
32780 = Material Not Sent
32781 = Material Not Received
32782 = Material Lost
32783 = Hardware Failure
32784 = Transfer Cancelled
32785–32792 reserved for future
use by SEMI E127 service
requests.
32793-65335 Reserved (data
formats 52, 54, or 50 must be
used)
65536 or above = User defined
(data formats 54 or 50 must be
used)
ERRTEXT 20 Text string describing the
error noted in the
corresponding ERRCODE.
Limited to 80 characters
maximum.
S1F20;
S3F16, F18,
F20, F22, F24,
F26, F30, F32;
S4F20, F22,
F23, F33, F35;
S5F14, F15,
F18;
S13F14, F16;
S14F2, F4, F6,
F8, F10, F12,
F14, F16, F18,
F26, F28;
S15F28, F30,
F32, F34, F36,
F38, F40, F42,
F44, F48, F53;
S16F12, F14,
F16, F18, F24,
F26, F28;
S17F4, F8, F14
ERRW7 20 Text string describing error
found in process program.
S7F27
EVNTSRC 20 Object type for Event Source
Objects
S17F5, F9, F10,
F11, F12
EXID 20 Unique identifier for the
exception. Maximum length
of 20 characters.
S5F9, F11, F13,
F14, F15, F17,
F18
SEMI E5-1104 © SEMI 1982, 2004 20
Name Format Description Values Where Used
EXMESSAGE 20 Text which describes the
nature of the exception.
S5F9, F11
EXRECVRA 20 Text which specifies a
recovery action for an
exception. Maximum length
of 40 bytes.
S5F9, F13
EXTYPE 20 Text which identifies the type
of an exception. It is usually
a single word of text.
"ALARM"
"ERROR"
S5F9, F11;
S14F1, F2, F8
FCNID 51 Function Identification
S2F43, F44
FFROT 52 Film Frame Rotation
In degrees from the bottom CW.
(Bottom equals zero degrees.)
Zero length indicates not used.
S12F1, F3
FILDAT 10, 20 Data from the Data Set
The maximum length is the RECLEN
from Open Data Set Data.
S13F6
FNLOC 52 Flat/Notch Location
In degrees from the bottom CW.
(Bottom equals zero degrees.)
Zero length indicates not used.
S12F1, F3, F4
FRMLEN 3(), 5() Formatted Process Program
Length
If greater than zero, indicates
PPID is available as a formatted
process program and its length
in bytes. If zero, the PPID is
not available as a formatted
program. Negative values are
invalid.
S7F34
GRANT 10 Grant code, 1 byte
0 = Permission Granted
1 = Busy, Try Again
2 = No Space Available
3 = Duplicate DATAID
>3 = Equipment Specific Error
Code
4-63 Reserved
S2F2, F40;
S3F16;
S4F26;
S13F12;
S14F24;
S16F2, F12
GRANT6 10 Permission to send, 1 byte
0 = Permission granted
1 = Busy, try again
2 = Not interested
>2 = Other errors
3-63 Reserved
S6F6
GRNT1 10 Grant code, 1 byte
0 = Positive response, transfer
ok
1 = Busy, try again
2 = No space
3 = Map too large
4 = Duplicate ID
5 = Material ID not found
6 = Unknown map format
>6 = Error
7-63 Reserved
S12F6
HANDLE 3(), 5() Logical unit or channel
S13F3, F4, F5,
F6, F7, F8
SEMI E5-1104 © SEMI 1982, 2004 21
Name Format Description Values Where Used
HCACK 10 Host Command Parameter
Acknowledge Code, 1 byte
0 = Acknowledge, command has
been performed
1 = Command does not exist
2 = Cannot perform now
3 = At least one parameter is
invalid
4 = Acknowledge, command will
be performed with completion
signaled later by an event
5 = Rejected, Already in
Desired Condition
6 = No such object exists
7-63 Reserved
S2F42, F50
HOACK 11 Conveys whether the
corresponding handoff
activity succeeded (= True) or
failed (= False)
S4F31, F33
HOCANCELACK 51 Tells whether the cancel
ready message was accepted
or rejected
0 = Cancel Ready Accepted
1 = Atomic Transfer Unknown
2 = Cancel Ready Rejected -
Handoff Begun
S4F13
HOCMDNAME 20 Identifier for the handoff
command to be executed
S4F31
HOHALTACK 51 Tells whether the halt
command was accepted or
rejected
0 = Halt Accepted
1 = Atomic Transfer Unknown
2-63 Reserved
S4F41
IACDS 32, 52 Immediately After Command
Codes
Vector of all command codes
which defined command must
immediately succeed within the
same block.
S7F22
IBCDS 32, 52 Immediately Before
Command Codes
Vector of all command codes
which defined command must
immediately precede within the
same block.
S7F22
IDTYP 10 Id type
0 = Wafer ID
1 = Wafer Cassette ID
2 = Film Frame ID
>2 = Error
3-63 Reserved
S12F1, F3, F4,
F5, F7, F9, F11,
F13, F14, F15,
F16, F17, F18
INPTN 10, 51 A specialized version of PTN
indicating the InputPort.
S3F35
JOBACTION 20 Specifies the action for a
ReticleTransferJob
S3F35
LENGTH 3(), 5() Length of the service
program or process program
in bytes
S2F1;
S7F1, F29
LIMITACK 10 Acknowledgment code for
variable limit attribute set, 1
byte
1 = LIMITID does not exist
2 = UPPERDB > LIMITMAX
3 = LOWERDB < LIMITMIN
4 = UPPERDB < LOWERDB
5 = Illegal format specified
for UPPERDB or LOWERDB
6 = ASCII value cannot be
translated to numeric
7 = Duplicate limit definition
for this variable
>7 = Other equipment-specific
error
8-63 Reserved
S2F46