semi合集-English.pdf - 第3251页
SEMI E127-0705 © SEMI 2003, 2005 52 R1-1.3.2 Requesting A Table — Table R1-4 illustrates a client’s request for a certain table. Table R1-4 Requesting a Table Comments Client Dir IMM Comments 1 TableRequest.req ObjSpec…
SEMI E127-0705 © SEMI 2003, 2005 51
Comments Client Dir IMM Comments
ObjSpec = object specifier for IMM
ObjType = “DataRow Template”
list of ObjID =
(“MasterConvertedDataRow
Template”)
list of AttrName =
(“DataInfoIDList”)
GetAttr.rsp
list of ObjSetting = (“DataInfoIDList”,
list of ObjIDs) for the set o
f
DataInformation Objects”_
GetAttr.req
All attributes of the
Data Information
object are requested
for all of these
objects.
ObjSpec = object specifier for IMM
ObjType = “DataRow_Template”
list of ObjID = same as contents o
f
DataInfoIDList
list of AttrName = (empty list)
GetAttr.rsp
list of ObjSetting = (((“ObjID”,
“LineWidth”)
(“Assurance”,assurance value),
“DataType”, “F16”), :
(“ObjID”, “Data Type”), (“Units”,
“micron”)),
....
(...)))
list of lists of
name/value pairs
for each supported
attribute for each
DataInformation
ObjID.
R1-1.3 Table Services
R1-1.3.1 A client wants to download a Raw Data Table from a previous run for analysis. Table R1-3 illustrates this
scenario.
Table R1-3 Sending a Table
Comments Client Dir IMM Comments
1 TableSend.req
ObjSpec = object specifier for the IMM,
TableType = “TableIMM_RawData”,
TableID = “P19343445-Lot103102#5”,
TableCmd = Entire table;
list of TableAttr = name/value attribute
p
airs;
list of ColHdr = list of names of column
headers; list of values for 50 rows
TableSend.rsp
TableAck = Success:
SEMI E127-0705 © SEMI 2003, 2005 52
R1-1.3.2 Requesting A Table — Table R1-4 illustrates a client’s request for a certain table.
Table R1-4 Requesting a Table
Comments Client Dir IMM Comments
1 TableRequest.req
ObjSpec = object
specifier for the IMM,
TableType =
“TableIMM_RawData”,
TableID = “P19343445-
Lot103102#5”,
TableCmd = Entire table;
TableRequest.req
ObjSpec = object specifier for the
IMM,
TableType =
“TableIMM_RawData”, TableID
= “P19343445-Lot103102#5”,
list of TableAttr = name/value
attribute pairs; list of ColHdr =
list of names of column headers;
list of values for 50 rows,
TableAck = Success
R1-1.3.3 Automatic Table Send — Table R1-5 illustrates the messaging for AutoTableSend.
Table R1-5 Automatic Table Send
Comments Client Dir IMM Comments
1 SetAutoTableSend.req
AutoSendRawData = False;
AutoSendConvertedData =
True,,
AutoSendCalibrationData =
False
SetAutoTableSend.rsp
Converted Data Table
“abc” completes.
Event.nfy IMMDTSM: T4
TableSend.req
ObjSpec = null string,
TableType =
“TableIMM_ConvertedData”,
TableID = “abc”, TableCmd =
Entire table; list of TableAttr =
name/value attribute pairs; list o
f
ColHdr = list of names of column
headers; list of values for 50 rows
TableSend.rsp
TableAck = success
R1-1.4 Typical IMM Data Table Object Sequence of Events
R1-1.4.1 Table R1-6 shows a typical sequence of event messages that occur during normal substrate processing. In
this example, an IMM Raw Data Table Object is created as soon as processing (measuring) begins. As soon as the
first row of this table is completed, an IMM Converted Data Table Object is created.
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R1-1.4.2 The controlling process job may be complete prior to the completion of the IMM Raw Data Table Object,
as soon as the measured substrate has been unloaded by the STPO. This is not shown.
R1-1.4.3 DataTime values in the example below indicate sequence only. Actual date/time values are needed for
implementations.
Table R1-6 Typical Flow of Events for IMM Data Table Objects
Comments Client Dir IMM Comments
1
Event.nfy Process job “ABC” starts.
PrJobID = “ABC”
SubstrID = “XYZ”
DateTime = 0000
Check on right prjob id
name.
Event.nfy Data table created –
IMMDTSM-T1.
DateTime = 0001
TableType =
“TableIMM_RawData”
TableID = “FR100”
RecipeID = “Reflection33-
LEVEL5”
SubsrID = “XYZ”
2a
Event.nfy Row complete –
IMMDTSM-T2.
DateTime = 0002
TableType =
“TableIMM_RawData”
TableID = “FR100”
RecipeID = “Reflection33-
LEVEL5”
SubsrID = “XYZ”
RowNum = 1
Event.nfy IMM Converted Data
Table created –
IMMDTSM-T1.
DateTime = 0003
TableType =
“TableIMM_ConvertedData”
TableID = “FT100”
RecipeID = “FilmThickness-
LEVEL5”
SubsrID = “XYZ”
2b
Event.nfy The above message is sent
as rows i = 2-8 complete.
DateTime = 0004…0010
TableType =
“TableIMM_RawData”
TableID = “FR100”
RecipeID = “Reflection33-
LEVEL5”
SubsrID = “XYZ”
RowNum = i
Event.nfy Raw data table completed
– IMMDTS
M-T4.