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SEMI E130-1104 © SEMI 2003, 2004 6 #. Current State Trigger New State Action Comment 10 AWAITING COMMAND The prober receiv es a motion relate d remote command. MOVING XYZ The prober moves the main chuck to th e specified…

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SEMI E130-1104 © SEMI 2003, 2004 5
8.1.5.11 SERVICE TASK (SUBSTRATE LOADED Sub-state) — A service task such as inking, cleaning, or
inspection is being performed by the prober.
8.1.6 PSEM Processing State Transition Table
Table 1 PSEM Processing State Transition Table
#. Current State Trigger New State Action Comment
1 No state The processing resource has
become available for
processing.
IDLE There are no active process
jobs at this time.
2 IDLE A process job has been
dispatched into the
SETTING UP state.
SETTING UP Actions taken correspond
to preconditioning
activities within the SEMI
E40 Process Job.
3 SETTING UP A single Process Job is
active and has transitioned
from the SETTING UP state
to the PROCESSING state.
AWAITING
LOAD
The prober is awaiting
instructions from the host to
load a substrate on to the
main chuck. The Process
Job PRMtlNameList
contains the list of substrates
to be processed.
4 AWAITING
LOAD
Prober has received a
command from the host to
load a substrate on to the
main chuck.
HANDLING
MATERIAL
The equipment is loading
a substrate on the main
chuck.
None.
5 HANDLING
MATERIAL
The material handling task
completes leaving the main
chuck unoccupied. A
Process Job is in the
PROCESSING state.
AWAITING
LOAD
See Section 17 for a
description of the prober
behavior related to material
handling.
6 HANDLING
MATERIAL
The material handling task
completes leaving the main
chuck unoccupied. There
are no active Process Jobs.
IDLE
7 HANDLING
MATERIAL
The material handling task
completes leaving the main
chuck unoccupied. There
are no Process Jobs in the
PROCESSING state. A
Process Job is in the
SETTING UP state.
SETTING UP
8 HANDLING
MATERIAL
The material handling task
completes. A substrate
located on the main chuck
has been fully setup and is
ready to receive processing
as directed by the host.
AWAITING
COMMAND
All pre-processing steps
including profiling, aligning,
temperature soak, etc. have
completed.
See Section 22.4 for the list
of remote commands the
host can issue while the
prober is in the AWAITING
COMMAND state.
9 AWAITING
COMMAND
The host issued a material
handling related remote
command.
HANDLING
MATERIAL
The prober performs the
task as commanded by the
host.
See Section 17 for a
description of the commands
the host may issue relating to
material handling.
SEMI E130-1104 © SEMI 2003, 2004 6
#. Current State Trigger New State Action Comment
10 AWAITING
COMMAND
The prober receives a
motion related remote
command.
MOVING XYZ The prober moves the
main chuck to the
specified location on the
substrate.
See Section 17 for a
description of the motion
related commands the host
can issue to trigger this
transition.
See the Collection Event
Table Section 19.2 for the
list of required data items
associated with this
transition.
11 MOVING XYZ The prober has completed
the motion related task and
waits for further instructions
from the host.
AWAITING
COMMAND
Prober waits for further
instructions from the host.
12 AWAITING
COMMAND
The prober received a
remote command specifying
a service task.
SERVICE TASK See Section 16 for a
description of the prober
actions related to
performing a service task.
13 SERVICE
TASK
The prober has completed a
service task.
AWAITING
COMMAND
Prober waits for further
instructions from the host.
14 SERVICE
TASK
The prober is configured to
perform a subsequent
service task upon
completing a current service
task.
SERVICE TASK See Section 16 for a
description of the prober
actions related to
performing a service task.
Example: The recipe may
call for a probe card
inspection to automatically
follow a probe clean service
task.
15 PROCESS The processing resource has
become unavailable.
PROCESSING
BLOCKED
No further processing is
possible.
The cause of this trigger can
be an internal interrupt or an
external command from the
operator or host.
16 PROCESSING
BLOCKED
The processing resource has
become available or the
prober is handling material
in the process of terminating
a job.
PROCESS Sub-
state
See Section 8.1.7 for the
conditional return state.
If the job(s) have been
terminated, the HANDLING
MATERIAL state will be
occupied while the material
is being removed from the
prober.
17 IDLE An alarm state is entered
that causes the processing
resource to be unavailable
for processing.
IDLE WITH
ALARMS
18 IDLE WITH
ALARMS
The alarm condition has
been cleared.
IDLE
8.1.7 Process Model Conditional Table
Table 2 Process Model Conditional Table
Conditions Next State
The current Process Job is terminating HANDLING MATERIAL
The processing resource has become available and the current
Process Job remains active
Previous EXECUTING state
SEMI E130-1104 © SEMI 2003, 2004 7
9 Related Standards Hierarchy
300mm Standards
(E40,E87,E90,E94)
SEMI E30 (GEM)
SEMI E5 (SECS-II)
PSEM300 (this specification) Provisional Specification f or
SECS-II Protocol for PSEM300
(
future document
)
Figure 2
Related Standards Hierarchy
9.1 SEMI E30 Relationship — This document does not
attempt to redefine the concepts and behaviors of SEMI
E30 (GEM). Instead, this document takes an
hierarchical approach to identifying the methods for
achieving a given task as shown in
Related Standards Hierarchy.
9.1.1 SEMI E30 Inclusions — All of the SEMI E30
state models are required with exception of the
processing state diagram. This diagram is replaced
with the one defined in this standard.
9.1.2 SEMI E30 Exclusions — Data Type restrictions
may conflict with the newer 300 mm standards and
therefore, the constraints found within the newer
standards shall take precedence over the restrictions
found in SEMI E30 section 5 “Data Types”.
10 Process Jobs
NOTE 1: SEMI E40 is required for PSEM300 compliance.
10.1 A PSEM300 prober is not able to operate as an
independent processing agent. It requires a host to
coordinate interaction with the tester. This document
defines a suitable GEM interface consisting of the
Process State Model and associated remote commands
to allow the host to act as the processing agent on
behalf of the prober to complete the execution of the
process job.
10.2 This standard assumes that if the equipment has a
pipeline (e.g. pre-align stage and main chuck), the
equipment will support concurrent process jobs such
that when the last substrate of an active process job
leaves the first pipeline stage, the equipment will
launch another process job thus maintaining continuous
material flow.
10.3 Process Job Preconditioning — This standard
does not attempt to define the set of recipe attributes
that, when different from the current equipment
configuration, will require a transition to the Process
Job SETTING UP state (preconditioning required).
The recipe attributes that do impact the Process Job
transition to SETTING UP will be user defined and
documented as such.
10.4 A PM compliance checklist must be filled out to
indicate the level of compliance to both the
Fundamental and Additional PM capabilities.
11 Control Job
NOTE 2: SEMI E94 is required for PSEM300 compliance.
11.1 See SEMI E94 for details of Control Job
management.
11.2 A substrate’s destination substrate location is
specified in the Control Job’s MtrlOutSpec attribute. If
the MtrlOutSpec attribute is not set, the destination
substrate location defaults to the source substrate
location.
11.3 A CJM compliance checklist must be filled out to
indicate the level of compliance to Fundamental CJM
capabilities (no Additional capabilities are defined at
this time).
12 Carrier Management
NOTE 3: SEMI E87 is required for PSEM300 compliance.
12.1 CarrierReCreate — After processing material for
a given carrier, the host must be able to define a new
CJ/PJ for the same carrier without having to remove the
carrier from the tool. For this, the equipment must
support the CarrierReCreate service.
12.2 A CMS compliance checklist must be filled out to
indicate the level of support for CMS for a given
equipment configuration.
13 Substrate Tracking
NOTE 4: SEMI E90 is required for PSEM300 compliance.