semi合集-English.pdf - 第394页

SEMI E52-0703 © SEMI 1995, 2003 30 MIXED GAS NAME SYMBOL CODE 10% SILANE/HELIUM 10% SiH4/He 0573 8% CARBON TETRAFLUORIDE(FREON-14)/OXYGEN 8% CF4/O2 0574 10% SILANE/HYDROGEN 10% SiH4/H2 0575 10% NITROGEN/ARGON 10% N2/Ar 0…

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SEMI E52-0703 © SEMI 1995, 2003 29
MIXED GAS NAME SYMBOL CODE
4.5%PHOSPHINE/NITROGEN 4.5%PH3/N2 0528
20%SILANE/HELIUM 20%SiH4/He 0529
20%PHOSPHINE/SILANE 20%PH3/SiH4 0530
1%PHOSPHINE/SILANE 1%PH3/SiH4 0531
10%HYDROGEN/NITROGEN 10%H2/N2 0532
1.5%PHOSPHINE/SILANE 1.5%PH3/SiH4 0533
3%PHOSPHINE/ARGON 3%PH3/Ar 0534
4%PHOSPHINE/NITROGEN 4%PH3/N2 0535
20%OXYGEN/HELIUM 20%O2/He 0536
1%PHOSPHINE/ARGON 1%PH3/Ar 0537
10%PHOSPHINE/ARGON 10%PH3/Ar 0538
2%PHOSPHINE/ARGON 2%PH3/Ar 0539
20%ARGON/SILANE 20%Ar/SiH4 0540
20%SILANE/ARGON 20%SiH4/Ar 0541
5%HYDROGEN/NITROGEN 5%H2/N2 0542
16%CARBON DIOXIDE/NITROGEN 16%CO2/N2 0543
2%SILANE/HYDROGEN 2%SiH4/H2 0544
15%HYDROGEN/NITROGEN 15%H2/N2 0545
1%PHOSPHINE/HELIUM 1%PH3/He 0546
.01%DIBORANE/HYDROGEN .01%B2H6/H2 0547
.01%SILANE/HYDROGEN .01%SiH4/H2 0548
.5%DIBORANE/ARGON .5%B2H6/Ar 0549
.5%PHOSPHINE/NITROGEN .5%PH3/N2 0550
.5%SILANE/HYDROGEN .5%SiH4/H2 0551
.8%PHOSPHINE/NITROGEN .8%PH3/N2 0552
.8%PHOSPHINE/SILANE .8%PH3/SiH4 0553
.9%ARSINE/HYDROGEN .9%AsH3/H2 0554
1%ARSINE/NITROGEN 1%AsH3/N2 0555
1%ARSINE/SILANE 1%AsH3/SiH4 0556
1%DIBORANE/HYDROGEN 1%B2H6/H2 0557
1%DIBORANE/NITROGEN 1%B2H6/N2 0558
1%BORON TRICHLORIDE/HYDROGEN 1%BCI3/H2 0559
1%BORON TRICHLORIDE/NITROGEN 1%BCI3/N2 0560
1%HYDROGEN/NITROGEN 1%H2/N2 0561
1%OXYGEN/NITROGEN 1%O2/N2 0562
1%PHOSPHINE/HYDROGEN 1%PH3/H2 0563
1.5%ARSINE/HYDROGEN 1.5%AsH3/H2 0564
10%SILANE/ARGON 10%SiH4/Ar 0565
10%FLUORINE/HELIUM 10%F2/He 0566
5%WATER VAPOR/AIR 5%H2O/Air 0567
10%WATER VAPOR/NITROGEN 10%H2O/N2 0568
2%OZONE/OXYGEN 2%O3/O2 0569
10%NITROGEN TRIFLUORIDE/OXYGEN 10%NF3/O2 0570
10%OZONE/OXYGEN 10%O3/O2 0571
10%PHOSPHINE/SILANE 10%PH3/SiH4 0572
SEMI E52-0703 © SEMI 1995, 2003 30
MIXED GAS NAME SYMBOL CODE
10%SILANE/HELIUM 10%SiH4/He 0573
8%CARBON TETRAFLUORIDE(FREON-14)/OXYGEN 8%CF4/O2 0574
10%SILANE/HYDROGEN 10%SiH4/H2 0575
10%NITROGEN/ARGON 10%N2/Ar 0576
20%SILANE/HYDROGEN 20%SiH4/H2 0577
15%ARGON/PHOSPHINE 15%Ar/PH3 0578
15%ARSINE/HYDROGEN 15%AsH3/H2 0579
15%DIBORANE/NITROGEN 15%B2H6/N2 0580
15%PHOSPHINE/15%SILANE/NITROGEN 15%PH3/15%SiH4/N2 0581
15%PHOSPHINE/ARGON 15%PH3/Ar 0582
15%PHOSPHINE/HYDROGEN 15%PH3/H2 0583
15%PHOSPHINE/SILANE 15%PH3/SiH4 0584
17%OXYGEN/CARBON TETRAFLUORIDE(FREON-14) 17%O2/CF4 0585
2%ARSINE/NITROGEN 2%AsH3/N2 0586
2%DIBORANE/ARGON 2%B2H6/Ar 0587
2%HYDROGEN/NITROGEN 2%H2/N2 0588
2%SILANE/HELIUM 2%SiH4/He 0589
20%ARSINE/HYDROGEN 20%AsH3/H2 0590
20%DIBORANE/SILANE 20%B2H6/SiH4 0591
20%HYDROGEN/CARBON MONOXIDE 20%H2/CO 0592
20%PHOSPHINE/HYDROGEN 20%PH3/H2 0593
21%OXYGEN/NITROGEN 21%O2/N2 0594
3%DIBORANE/NITROGEN 3%B2H6/N2 0595
3%HYDROGEN/HELIUM 3%H2/He 0596
3%HYDROGEN/NITROGEN 3%H2/N2 0597
3%OXYGEN/HELIUM 3%O2/He 0598
3%OZONE/AIR 3%O3/Air 0599
3%PHOSPHINE/NITROGEN 3%PH3/N2 0600
3%PHOSPHINE/SILANE 3%PH3/SiH4 0601
3%SILANE/HELIUM 3%SiH4/He 0602
30%HELIUM/OXYGEN 30%He/O2 0603
30%OXYGEN/HELIUM 30%O2/He 0604
4%DIBORANE/NITROGEN 4%B2H6/N2 0605
4%HYDROGEN/HELIUM 4%H2/He 0606
4%HYDROGEN/NITROGEN 4%H2/N2 0607
4%NITROGEN/HYDROGEN 4%N2/H2 0608
4%OXYGEN/CARBON TETRAFLUORIDE(FREON-14) 4%O2/CF4 0609
4%PHOSPHINE/HELIUM 4%PH3/He 0610
4%PHOSPHINE/SILANE 4%PH3/SiH4 0611
40%HELIUM/SILANE 40%He/SiH4 0612
8%OXYGEN/CARBON TETRAFLUORIDE(FREON-14) 8%O2/CF4 0613
5%ARSINE/HYDROGEN 5%AsH3/H2 0614
5%DIBORANE/ARGON 5%B2H6/Ar 0615
5%BORON TRICHLORIDE/HYDROGEN 5%BCI3/H2 0616
5%PROPANE/HYDROGEN 5%C3H8/H2 0617
SEMI E52-0703 © SEMI 1995, 2003 31
MIXED GAS NAME SYMBOL CODE
5%CARBON DIOXIDE/NITROGEN 5%CO2/N2 0618
5%HYDROGEN/ARGON 5%H2/Ar 0619
8%PHOSPHINE/NITROGEN 8%PH3/N2 0620
5%NITROGEN/HYDROGEN 5%N2/H2 0621
5%NITROGEN/PHOSPHINE 5%N2/PH3 0622
5%OXYGEN/ARGON 5%O2/Ar 0623
5%OZONE/OXYGEN 5%O3/O2 0624
5%PHOSPHINE/5%SILANE/NITROGEN 5%PH3/5%SiH4/N2 0625
5%PHOSPHINE/ARGON 5%PH3/Ar 0626
5%PHOSPHINE/SILANE 5%PH3/SiH4 0627
5%DICHLOROSILANE/ARGON 5%SiH2CI2/Ar 0628
5%SILANE/ARGON 5%SiH4/Ar 0629
50%HELIUM/OXYGEN 50%He/O2 0630
50%NITROGEN/OXYGEN 50%N2/O2 0631
50%PHOSPHINE/SILANE 50%PH3/SiH4 0632
50%SILANE/HYDROGEN 50%SiH4/H2 0633
6.5%DIBORANE/15%SILANE/NITROGEN 6.5%B2H6/15%SiH4/N2 0634
6.5%DIBORANE/HYDROGEN 6.5%B2H6/H2 0635
8%PHOSPHINE/SILANE 8%PH3/SiH4 0636
30%OXYGEN/HYDROGEN 30%O2/H2 0637
25%AMMONIA/HYDROGEN 25%NH3/H2 0638
8%OZONE/OXYGEN 8%O3/O2 0639
2%PHOSPHINE/NITROGEN 2%PH3/N2 0640
15%OZONE/OXYGEN 15%O3/O2 0641
40%OXYGEN/SULFUR HEXAFLUORIDE 40%O2/SF6 0642
13%HYDROGEN/NITROGEN 13%H2/N2 0643
1%HYDROGEN SULFIDE/HYDROGEN 1%H2S/H2 0644
1%HYDROGEN SELENIDE/HYDROGEN 1%H2Se/H2 0645
10%SILANE/NITROGEN 10%SiH4/N2 0646
10%DISILANE/HELIUM 10%Si2H6/He 0647
20%DISILANE/HELIUM 20%Si2H6/He 0648
10%OXYGEN/HELIUM 10%O2/He 0649
50%HYDROGEN BROMIDE/HYDROGEN CHLORIDE 50%HBr/HCI 0650
12%OZONE/OXYGEN 12%O3/O2 0651
15%NITRIC OXIDE/NITROGEN 15%NO/N2 0652
2%SILANE/NITROGEN 2%SiH4/N2 0653
5%DIBORANE/NITROGEN 5%B2H6/N2 0654
.5%BORON TRICHLORIDE/HYDROGEN .5%BCI3/H2 0655
.5%PHOSPHINE/HYDROGEN .5%PH3/H2 0656
3%DIBORANE/HYDROGEN 3%B2H6/H2 0657
1%GERMANE/NITROGEN 1%GeH4/N2 0658
3%DIBORANE/5%SILANE/NITROGEN 3%B2H6/5%SiH4/N2 0659
.3%PHOSPHINE/SILANE .3%PH3/SiH4 0660
30%NITROGEN TRIFLUORIDE/NITROGEN 30%NF3/N2 0661
.8%DIBORANE/NITROGEN .8%B2H6/N2 0662