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SEMI E133-0705 © SEMI 2004, 2005 23 # Description Req’d Comments FP.A.2 Ability to perform advanced statistical/prediction algorithms on data to enable fault prediction after a specific number of runs, tool time or produ…

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SEMI E133-0705 © SEMI 2004, 2005 22
# Description Req’d Comments
FP.I.2
Provide the required PCS Analysis Engine methods
The FP Analysis Engine shall provide the required interface
methods as defined in this standard.
Y Execute and Update.
FP.I.3
Provide the required PCS Analysis Engine method
capabilities
The FP Analysis Engine shall provide the required interface
method capabilities as defined in this standard.
Y Log Data, Exception Handling, Get
Topic List, Subscribe to Topic, Get
Topic Data.
FP.I.4
Maintain models of selected process control system
environment(s)
FP Analysis Engine shall maintain explicit or implicit models of
the selected process control environment. These models shall be
used to predict faults based on the supplied input data.
Y The specific form and behavior of these
models is beyond the scope of this
standard.
FP.I.5
Provide a mechanism to uniquely instruct the Analysis Engine
to perform an action
The FP Analysis Engine shall support an input mechanism
whereby the Analysis Engine can be instructed to take a specific
unique action.
Y The mechanism could be a a single key
variable, e.g., model name or a complex
set of context data utilized internally to
perform context matching, etc. The
action could include application of a
specific model and generation of a FP
result.
FP.I.6
Interface with multiple external systems
FP Analysis Engine shall be capable of accepting inputs from, or
generating outputs to multiple external systems.
Y The definition of these systems will be a
function of the application environment;
these could include process tool or
metrology systems, or user interfaces.
FP.I.7
Basic Model Management
The FP Analysis Engine shall provide the capability to create/add
models, edit configuration of models, and delete models.
Y This capability will be supported through
the FD Analysis Engine interface.
FP.I.8.1
Interface with FC Analysis Engine
The FP Analysis Engine shall be capable of providing output that
can be used by any PCS-compliant FC Analysis Engine.
Y
FP.I.8.2
Interface with other Analysis Engines
The FP Analysis Engine shall be capable of either accepting
outputs from other Analysis Engines as inputs, or producing
outputs that are utilized by other Analysis Engines.
N
FP.I.9
Advanced Model Management
The FP Analysis Engine shall provide advanced model
management capabilities including but not limited to: secure
access to models, and automatic updating of models based on
process control environment changes.
N
FP.I.10
Provide the optional PCS Analysis Engine method capabilities
The FP Analysis Engine shall provide all or a subset of the
optional interface method capabilities as defined in this standard.
N
Table 19 Additional FP Functional Group Capabilities
# Description Req’d Comments
FP.A.1
Provide an interface for automatic notification of predicted
faults
The system must provide an interface to automatically notify an
external system when a fault is predicted. The interface must
provide enough information about the predicted fault for the
external system to make decisions about notification.
Y The external system may for example:
page or e-mail an engineer, or take the
tool in question off-line. Information
provided in the interface should include:
context, severity, and any fault details
(TBD in a future version of the
standard).
SEMI E133-0705 © SEMI 2004, 2005 23
# Description Req’d Comments
FP.A.2
Ability to perform advanced statistical/prediction algorithms
on data to enable fault prediction after a specific number of
runs, tool time or products
What is the probability that a specific fault will happen, when,
what are action plans that can be taken, which tools, what is the
predictive classification of a specific fault.
N
FP.A.3
Ability to build a prediction model from historical data
Based on the historical data, a learning-based model may be
developed. A specific pattern of historical data may give
information about a future fault possibility.
N
FP.A.4
Ability to predict preventive maintenance scheduling based
on tool/substrate information
This will reduce tool downtime.
N
9.7 Statistical Process Control Functional Group
9.7.1 This section defines the common capabilities of the SPC functional group.
9.7.2 Table 17 below describes the specialization for SPC of each inherited general capability described in Table 5
above.
9.7.3 Table 18 describes the additional capabilities unique to the SPC functional group.
Table 20 SPC Functional Group Inherited Capabilities
# Description Req’d Comments
SPC.I.1
Provide a Statistical Process Control capability as described
in §5
The Statistical Process Control system shall analyze provided
input data with the purpose of determining if statistically
significant deviations from normal have occurred.
Y Detailed inputs and outputs to be defined
in a future version of the standard.
However, it is expected that the SPC
output will provide enough information
to determine why the engine determined
a deviation occurred.
SPC.I.2
Provide the required PCS Analysis Engine methods
The SPC Analysis Engine shall provide the required interface
methods as defined in this standard.
Y Execute and Update.
SPC.I.3
Provide the required PCS Analysis Engine method
capabilities
The SPC Analysis Engine shall provide the required interface
method capabilities as defined in this standard. .
Y Log Data, Exception Handling, Get
Topic List, Subscribe to Topic, Get
Topic Data
SPC.I.4
Maintain models of selected process control system
environment(s)
SPC Analysis Engine shall maintain explicit or implicit models of
the selected process control environment. These models shall be
used to determine if statistically significant deviations have
occurred.
Y The specific form and behavior of these
models is beyond the scope of this
standard.
SPC.I.5
Provide a mechanism to uniquely instruct the Analysis Engine
to perform an action.
The SPC Analysis Engine shall support an input mechanism
whereby the analysis engine can be instructed to take a specific
unique action.
Y The mechanism could be a single key
variable, e.g., model name or a complex
set of context data utilized internally to
perform context matching, etc. The
action could include application of a
specific model (SPC rule) and generation
of a SPC result.
SPC.I.6
Interface with multiple external systems
SPC Analysis Engine shall be capable of accepting inputs from,
or generating outputs to multiple external systems.
Y The definition of these systems will be a
function of the application environment;
these could include process tool or
metrology systems, or user interfaces.
SEMI E133-0705 © SEMI 2004, 2005 24
# Description Req’d Comments
SPC.I.7
Basic Model Management
The SPC Analysis Engine shall provide the capability to
create/add models, edit configuration of models, and delete
models.
Y This capability will be supported through
the FD Analysis Engine interface.
SPC.I.8
Interface with other Analysis Engines
The SPC Analysis Engine shall be capable of either accepting
outputs from other Analysis Engines as inputs, or producing
outputs that are utilized by other Analysis Engines.
N
SPC.I.9
Advanced Model Management
The SPC Analysis Engine may provide advanced model
management capabilities including but not limited to: secure
access to models, and automatic updating of models based on
process control environment changes.
N
SPC.I.10
Provide the optional PCS Analysis Engine method capabilities
The PCS Analysis Engine shall provide all or a subset of the
optional interface method capabilities as defined in this standard.
N
Table 21 Additional SPC Functional Group Capabilities
# Description Req’d Comments
SPC.A.1
Ability to perform trend analysis
Automated analysis of data for the identification of undesired trends
using industry standard run rules such as (for example) Western
Electric. One result of these calculations and comparisons should be
a decision of whether or not the new data caused the “chart” to go out
of control. The mathematics available must include those items
listed in #SPC.A.4 below.
Y
SPC.A.2
Ability to support standard control charts
Provide ability to plot data as well as display traditional variables
charts, and attributes charts. The system should also provide access
to the data to enable a third party system to display control charts.
Y
SPC.A.3
Ability to perform statistical analysis
These tools may include the ability to calculate statistical metrics,
normal analysis, and non-normal analysis.
Y
SPC.A.4
Ability to calculate control limits
The calculation of control limits for control charts from historical
data using industry standard techniques for calculating upper and
lower control limits for variables and attributes charts based on sub-
group size, sample size, etc.
Y
SPC.A.5
Provide an interface for automatic notification of processing
anomalies
The system must provide an interface to automatically notify an
external system when an assignable cause statistical anomaly is
detected. The interface must provide enough information about the
detected problem for the external system to make decisions about
notification.
Y The external system may for example:
page or e-mail an engineer, or take the
tool in question off-line. Information
provided in the interface should
include: context, severity, and any
fault details.
SPC.A.6
Ability to provide a reference to an Out-of-Control Action Plan
The system should store the action plan that is to be put into effect in
the case of the trend analysis determining that an out of control
condition exists. Ideally this would have at least a full page of
storage and an optional URL linking capability (reference being web
link).
Y