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SEMI E54.13-0303 © SEMI 2003 1 SEMI E54.13-0303 SPECIFICATION FOR SENSOR/ACTUATOR NETW ORK COMMUNICATIONS FOR ETHERNET/IP™ This specification was technically approved by the Global Information and Control Committee and i…

SEMI E54.12-0701

9.3.1.2 Additional objects may be defined by the

manufacturer in the Device Profile for a given device.

9.3.2 Attributes



The mapping of Attribute Tags and

Identifiers is defined in Section 7.4.1 for the CDM.

The same method applies here for the SDM.

9.3.3 Services



The mapping of Service Tags and

Identifiers is defined in Section 7.6.1 for the CDM.

The same method applies here for the SDM.

NOTICE: SEMI makes no warranties or

representations as to the suitability of the standards set

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respecting any materials mentioned herein. These

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possibility that some elements of this standard may be

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respecting the validity of any patent rights or copyrights

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standard. Users of this standard are expressly advised

that determination of any such patent rights or

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are entirely their own responsibility.

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SEMI E54.13-0303 © SEMI 2003 1

SEMI E54.13-0303

SPECIFICATION FOR SENSOR/ACTUATOR NETWORK

COMMUNICATIONS FOR ETHERNET/IP™

This specification was technically approved by the Global Information and Control Committee and is the

direct responsibility of the North American Information and Control Committee. Current edition approved

by the North American Regional Standards Committee on November 22, 2002. Initially available at

www.semi.org January 2003; to be published March 2003.

1 Purpose

1.1 Introduction

1.1.1 This standard defines a communication

specification based on the EtherNet/IP

(Ethernet/Industrial Protocol) network to enable

communications between intelligent devices on a

sensor/actuator network (SAN) that operate according

to SEMI specified device models (common and device

specific) in a semiconductor manufacturing tool.

1.2 Motivation

1.2.1 EtherNet/IP is a communication system suitable

for use in industrial environments. EtherNet/IP allows

intelligent devices to exchange time-critical application

information. These devices include simple I/O devices

such as sensors/actuators, as well as complex control

devices such as robots, programmable logic controllers,

and process controllers.

1.2.2 EtherNet/IP uses CIP (Control and Information

Protocol), the common network, transport and

application layers also shared by DeviceNet (SEMI

E54.4). EtherNet/IP provides:

• A cost effective solution to bridge factory Ethernet

(IEEE 802.3) networks to SEMI E54.4 DeviceNet

low-level device networks,

• Access to intelligence present in low-level devices,

and

• Producer/Consumer model for Master/Slave and

Peer-to-Peer application relationships.

1.3 Background

1.3.1 EtherNet/IP makes use of standard Ethernet and

TCP/IP technology to transport CIP communications

packets. The result is a common, open application

layer on top of open and highly popular Ethernet and

TCP/IP protocols.

1.3.2 EtherNet/IP provides a producer/consumer model

for the exchange of time-critical control data. The

producer/consumer model allows the exchange of

1 EtherNet/IP is a trademark of Open DeviceNet Vendor Association

(ODVA)

application information between a sending device (e.g.,

the producer) and many receiving devices (e.g., the

consumers) without the need to send the data multiple

times to multiple destinations. For EtherNet/IP, this is

accomplished by making use of the CIP network and

transport layers along with IP Multicast technology.

Many EtherNet/IP devices can receive the same

produced piece of application information from a single

producing device.

1.3.3 EtherNet/IP makes use of standard IEEE 802.3

technology; there are no non-standard additions that

attempt to improve determinism. Rather, EtherNet/IP

recommends the use of commercial switch technology,

with 100 Mbps bandwidth and full-duplex operation, to

provide for more deterministic performance.

2 Scope

2.1 Specification  This document specifies a

Sensor/Actuator Network Communications Standard

(NCS) based on the EtherNet/IP specification that

enables communication with SAN devices configured

according to SEMI SAN Common Device Model

(CDM) and appropriate Specific Device Model (SDM)

specifications.

2.2 Use  This document is used in conjunction with a

SEMI standard SAN CDM specification and one or

more SEMI standard SDM specifications (e.g. for a

mass flow controller). Together, they describe the

externally visible data structure and behavior of devices

utilizing the EtherNet/IP networking capability in a

SEMI compliant SAN system. The general

sensor/actuator network document architecture is

described in the SEMI E54.0 Sensor/Actuator Network

Standard (the root SAN document).

2.3 Document Structure



The EtherNet/IP network

communication standard complies with the SEMI SAN

NCS template document structure, as described in

SEMI E54.0. The standard document is composed of

two main parts. The first part (Sections 1 through 8)

specifies the SAN enabling protocol as well as the

presentation (i.e., mapping) of CDM object structure

and behavior onto the network (referred to as the

“CDM mapping”). The second part (Section 9)

specifies the presentation (i.e., mapping) of SDM object

SEMI E54.13-0303 © SEMI 2003 2

structure and behavior onto the network for each SEMI

specified SDM (referred to as the “SDM mapping”).

2.4 Adding SDM Mappings  SDM mappings added

to part two of this document are considered document

additions and are balloted as such. An SDM mapping

may only be balloted for addition to this document if

the corresponding SEMI SDM has been standardized.

NOTICE: This standard does not purport to address

safety issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish

appropriate safety and health practices and determine

the applicability of regulatory or other limitations prior

to use.

3 Limitations

3.1 This document specifies a semiconductor

equipment SAN based solely on EtherNet/IP and is a

companion document to the EtherNet/IP specification;

thus a complete specification of this standard

necessarily includes the EtherNet/IP specifications.

There are other semiconductor equipment SAN

communications options. The specifications for these

options are not included here.

3.2 This standard specifies enhancements that provide

additional capabilities over and above those currently

required by EtherNet/IP. In order to avoid document

consistency problems, information in the EtherNet/IP

specification that relates to this standard is not repeated

in this document. This document is limited to

describing enhancements or limitations to the

EtherNet/IP specification that are imposed by this

standard.

3.3 A complete specification of the conformance

testing procedure shall include the EtherNet/IP

conformance testing specification. Conformance

testing shall also include enhancements and limitations

to the EtherNet/IP specification required by this

standard.

4 Referenced Standards

4.1 SEMI Standards

SEMI E30 — Generic Model for Communications and

Control of Manufacturing Equipment (GEM)

SEMI E39 — Object Services Standard: Concepts,

Behavior, and Services (OSS)

SEMI E54 — Sensor/Actuator Network Standard

SEMI E54.1 — Standard for Sensor/Actuator Network

Common Device Model

SEMI E54.2 — Guide for Writing Sensor/Actuator

Network (SAN) Standard Ballots

4.2 ISO Standards

ISO 7498  Basic Reference Model for Open Systems

Interconnection.

ISO/IEC 8802-3  Carrier Sense Multiple Access with

Collision Detection (CSMA/CD) Access Method and

Physical Layer Specifications (Ethernet IEEE 802.3).

4.3 Other Documents

ODVA

EtherNet/IP Specification  Volume I and

Volume II, Release 1.0.

NOTICE: Unless otherwise indicated, all documents

cited shall be the latest published versions.

5 Terminology

5.1 Terminology that is common to all of the

documents in this SAN standard may also be defined in

SEMI E54. Terminology may be reproduced here

which is defined in other SEMI documents.

5.2 Abbreviations and Acronyms

5.2.1 CDM — Common Device Model

5.2.2 CIP — Control and Information Protocol

5.2.3 CM — Connection Manager object

5.2.4 DM — Device Management object

5.2.5 EIP — EtherNet/IP

5.2.6 EL — Ethernet Link object

5.2.7 IP — Internet Protocol

5.2.8 MR — Message Router object

5.2.9 NCS — Network Communication Standard

5.2.10 OSI — Open Systems Interconnect

5.2.11 OSS — Object Services Standard

5.2.12 PDU — Protocol Data Unit

5.2.13 SAC — Sensor, Actuator, Controller object

5.2.14 SAN — Sensor/Actuator Network

5.2.15 SDM — Specific Device Model

5.2.16 S-DS — S-Device Supervisor object

5.2.17 TCP — Transport Control Protocol

5.3 Device Component Definitions

2 International Organization for Standardization. ISO Central

Secretariat, 1, rue de Varembé, Case postale 56, CH-1211 Geneva 20,

Switzerland. Telephone: 41.22.749.01.11; Fax: 41.22.733.34.30.

Website: /www.iso.ch

3 Open DeviceNet Vendor Association, 20423 State Road 7 #F6,

Boca Raton, FL 33498-6797; Phone: (1) 561-477-7966; Website: