semi合集-English.pdf - 第5802页
SEMI P23-0200 © SEMI 1993 , 2000 25 50 u m 50 u m De t a i l 1 u m 1 u m 14.0 5.25 8. 75 7. 0 2.5 2.0 2. 5 3. 0 2.. 0 2. 0 7. 0 1. 5 (45deg . ) <1 . 5 90 > 3.25 M N ; Film Pattern ; Defect Position Figure 20 Sub Ce…
SEMI P23-0200 © SEMI 1993, 2000 24
50 um
50 um
Detai l
1 um
1 um
14.0
5.0 9.0
7.0
3.5
2.0
1.5
1.5
3.5
3.5
3.5
2.0
2.0
2.0
2.0
5.0 1.5
E
F
; Film Pattern
; Defect Position
Figure 19
Sub Cell
Wiring (Type E)
SEMI P23-0200 © SEMI 1993, 200025
50 um
50 um
Detail
1 um
1 um
14.0
5.258.75
7.0
2.5
2.0
2.5
3.0
2..0
2.0
7.0
1.5
(45deg.)
<1.590>
3.25
M
N
; Film Pattern
; Defect Position
Figure 20
Sub Cell
Wiring (Type F)
SEMI P23-0200 © SEMI 1993, 2000 26
50 um
50 um
Detail
1 um
1 um
9.7
14.0
0.675
4.857.0
<1.501>
1.35
<1.62>
7.0
( arctan 1/2 )
< 26.565 deg. >
1
0
.
8
4
5
4
.
8
1
O
P
; Film Pattern
; Defect Position
Figure 21
Sub Cell
Wiring (Type F)