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APPENDIX 3 GENERAL EQUATION RE LATING PROCESS GA S FLOW RATE TO TRACER INJECTION RATE NOTICE : The material in this appendix is an official part of SEMI F15-93 and was approved by full le tter ballot procedures. A3-1 A3-…

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APPENDIX 2
EQUATION FOR FLOW IN A STRAIGHT TUBE
NOTICE: The material in this appendix is an official part of SEMI F15 and was approved by full letter ballot procedures.
A2-1
A2-1.1 Flow in a straight tube may be calculated if the
tube characteristics, as well as the upstream and
downstream pressures, are known. In the following, the
upstream (drive side) conditions have a subscript of 1,
while the downstream (ambient) conditions have a
subscript of 0.
M
1
2
1
P
0
P
1

2
4 f
L
D

ln
P
1
P
0

2
(A2 -1)
W=A(
1
P
1
M
1
2
)
0.5
(A2 - 2)
1
0
P
1
P
0

(A2 - 3)
where
0
0.00129 g
/
cm
3
1.4
P
Pressure dynes/cm
2
4
f
0.02
for
smooth
pipe
L
Length cm
D
Diameter cm
W
Mass Flowrate g/sec
A
Area of Flow Line cm
2
NOTE 1: Atmospheric pressure, 10
6
dynes/cm
2
, is
approximately 14.7 psia.
SEMI F15-93 © SEMI 1993, 2004 6
APPENDIX 3
GENERAL EQUATION RELATING PROCESS GAS FLOW RATE TO
TRACER INJECTION RATE
NOTICE: The material in this appendix is an official part of SEMI F15-93 and was approved by full letter ballot procedures.
A3-1
A3-1.1 In this appendix, a general equation relating
process gas flow rate, tracer injection flow rate, and
measured SF
6
concentration outside an enclosure to the
ERC is provided. In the following, Q and L are given
in volume units per unit time. Concentrations C are
given in units of either vol./vol. or %. Whatever units
are chosen should be used consistently in Equation A3-
7.
A3-1.2
Let the tracer injection rate into a volume be Q
and the ventilation rate in this volume is L. At
equilibrium, the concentration of tracer within this
volume is Q/L = C
source
. If, in the laboratory, one
measures a concentration of tracer gas C
lab
, then the
Dilution Ratio, D, can be calculated as equal to
C
lab
/C
source
]
tracer
= D
tracer
(A3-1)
For any conserved chemical species, D is constant.
Thus, for a process gas released within the volume, one
can form an analogous ratio
C
lab
/C
source
]
process
= D
process
(A3-2)
For all conserved chemical species, D is constant, hence
D
tracer
= D
process
(A3-3)
From this, one can form
C
lab
/C
source
]
tracer
= C
lab
/C
source
]
process
(A3-4)
so that
C
lab
/C
source
]
tracer
C
source
]
process
= C
lab
]
process
(A3-5)
Here C
lab
]
process
is the previously identified ERC.
For releases in the same test volume, this equation can
be written
{C
lab
]
tracer
(Q/L)]
process
}/ (Q/L)]
tracer
= ERC (A3-6)
Since the ventilation rate is the same
C
lab
]
tracer
Q
process
/ Q
tracer
= ERC (A3-7)
A3-1.2.1 This equation allows the calculation of ERC
when simulating a leak within an enclosure using a
different diameter tubing or different flowrate. In the
case where the flowrates (or tubing size and injection
pressure) are the same for the tracer and the process
gas, Equation A3-7 simplifies to that in Section 5.1.
NOTICE: SEMI makes no warranties or
representations as to the suitability of the standards set
forth herein for any particular application. The
determination of the suitability of the standard is solely
the responsibility of the user. Users are cautioned to
refer to manufacturer's instructions, product labels,
product data sheets, and other relevant literature,
respecting any materials or equipment mentioned
herein. These standards are subject to change without
notice.
By publication of this standard, Semiconductor
Equipment and Materials International (SEMI) takes no
position respecting the validity of any patent rights or
copyrights asserted in connection with any items
mentioned in this standard. Users of this standard are
expressly advised that determination of any such patent
rights or copyrights, and the risk of infringement of
such rights are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction of
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI F15-93 © SEMI 1993, 2004 7
SEMI F16-94 © SEMI 1994, 2004 1
SEMI F16-94 (Withdrawn 0304)
SPECIFICATION FOR 316L STAINLESS STEEL TUBING WHICH IS TO
BE FINISHED AND ELECTROPOLISHED FOR HIGH PURITY
SEMICONDUCTOR MANUFACTURING APPLICATIONS
NOTICE: This document was balloted and approved for withdrawal in 2004.
1 Purpose
The purpose of this specification is to identify the
applicable ASTM tubing specification requirements and
to define the special material composition, wall
thickness, ordering, and quality assurance requirements
for 316L stainless steel tubing which is to be finished
into electropolished tubing, component tube stubs, and
fittings made from tubing for use in high purity
semiconductor manufacturing facility applications.
2 Scope
This specification defines the special criteria for
procuring nominal sizes of unfinished 316L stainless
steel tubing which is to be finished into tubing,
component tube stubs, and fittings made from tubing
for use in high purity chemical (gas or liquid)
distribution systems in semiconductor manufacturing
facilities.
3 Referenced Documents
The referenced documents are to be their current
editions as published by their sponsors.
3.1 ASTM Standards
1
A 262 — Practices for Determining Susceptibility to
Intergranular Attack in Austenitic Stainless Steels
A 269 — Specification for Seamless and Welded
Austenitic Stainless Steel Tubing for General Service
A 270 — Seamless and Welded Austenitic Stainless
Steel Sanitary Tubing
A 450/A 450M — Specification for General
Requirements for Carbon, Ferritic Alloy, and Austenitic
Alloy Steel Tubes
A 632 — Specification for Seamless and Welded
Austenitic Stainless Steel Tubing (Small Diameter) for
General Service
E 112 — Methods for Determining Average Grain Size
1 American Society for Testing and Materials, 100 Barr Harbor
Drive, West Conshohoken, PA 19428-2959
3.2 Military Standards
2
3.3 MIL-STD-105 — Sampling Procedures and Tables
for Inspection by Attributes
3.4 ANSI/ASME Standards
3
B31.1 — Power Piping
B31.3 — Chemical Plant and Petroleum Refinery
Piping
Boiler and Pressure Vessel Code — Section III NCA,
The Rules for Construction of Nuclear Power Plant
Components
4 General Requirements
Tubing furnished under this specification shall conform
to the requirements of ASTM A 450 and A 269 for
nominal sizes 1/2 inch diameter and larger and to the
requirements of ASTM A 450 and A 632 for nominal
sizes smaller than 1/2 inch diameter, and to the
additional requirements herein.
5 Ordering Information
5.1 Orders for material under this specification shall
include the following, as required to describe the
material adequately:
• Quantity (meters, feet, or number of lengths)
• Grade per Table 1 of ASTM A 269
• Size (nominal outside diameter and nominal wall
thickness)
• This specification number
• Surface condition (if applicable)
• Special requirements and any supplementary
requirements selected
6 Process
The steel shall be processed in accordance with the
section on Process of ASTM A 269.
2 Naval Publications and Forms Center, 5801 Tabor Avenue,
Philadelphia, PA 19120
3 American National Standards Institute, 1430 Broadway, New York,
NY 10018