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SEMI E49.5-0298 © SEMI 1995, 1998 1 SEMI E49.5-0298 GUIDE FOR ULTRAHIGH PURITY SOLVENT DISTRI BUTION SYSTEMS IN SEMI CONDUCTOR MANUFACTURING EQUI PMENT 1 Purpose 1.1 This document specifies guide l i n es for ultra high …

SEMI E49.4-0298 © SEMI 1995, 1998 4

8 Component Guidelines

8.1 For component leak rate and c ycle life

requirements, see Section 7, Materials Guidelines.

8.2 Valves should be ball (dry asse mbly, lubricant-

free) or bellows type. Metal diaphragm valves are

optional.

8.3 Regulators should be packless in design with all

metal bonnet seals.

8.4 Regulators and valve flow coefficient (C

) should

be selected based on liquid flow requirements and

liquid characteristics.

8.5 Mechanical fittings should be compression type or

metal face seal type with solid nickel gaskets.

8.6 Pressure gauges should be liquid-filled type with

compression or metal face seal fittings. Gauge isolators

are recommended.

8.7 Filters should be PTFE media rated at 0.1 µm pore

size.

8.8 Check valves should be disk poppet type.

9 Subsystem Assembly Gui delines

See SEMI E49.6 for recommended SS system assembly

procedures.

10 Related Documents

10.1 SEMATECH Documents

SEMASPEC 90120400B — Test Method for

Determination of Surface Roughness by Contact

Profilometry for Gas Distribution System Components

SEMASPEC 90120403B — Test Method for XPS

Analysis of Surface Composition and Chemistry of

Electropolished Stainless Steel Tubing for Gas

Distribution System Components

SEMASPEC 90120573B — Test Method for AES

Analysis of Surface and Oxide Composition of

Electropolished Stainless Steel Tubing for Gas

Distribution System Components

4 SEMATECH, Technology Transfer Department, 2706 Montopolis

Drive, Austin, TX 78741

NOTICE: These standards do not purport to address

safety issues, if any, associated with their use. It is the

responsibility of the user of these standards to establish

appropriate safety and health practices and determine

the applicability of regulatory limitations prior to use.

SEMI makes no warranties or representations as to the

suitability of the standards set forth herein for any

particular application. The determination of the

suitability of the standard is solely the responsibility of

the user. Users are cautioned to refer to manufacturer’s

instructions, product labels, product data sheets, and

other relevant literature respecting any materials

mentioned herein. These standards are subject to

change without notice.

The user’s attention is called to the possibility that

compliance with this standard may require use of

copyrighted material or of an invention covered by

patent rights. By publication of this standard, SEMI

takes no position respecting the validity of any patent

rights or copyrights asserted in connection with any

item mentioned in this standard. Users of this standard

are expressly advised that determination of any such

patent rights or copyrights, and the risk of infringement

of such rights, are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o

the contents in whole or in part is forbidden without express written

consent of SEMI.

SEMI E49.5-0298 © SEMI 1995, 19981

SEMI E49.5-0298

GUIDE FOR ULTRAHIGH PURITY SOLVENT DISTRIBUTION SYSTEMS

IN SEMICONDUCTOR MANUFACTURING EQUIPMENT

1 Purpose

1.1 This document specifies guidelines for ultrahigh

purity (UHP) solvent distribution systems in

semiconductor production equipment.

2 Scope

2.1 The distribution systems consi st of stainless steel

(SS) piping designed to supply flammable solvents

only.

2.2 Typical tools include photolith ography track

equipment, solvent wet stations, and isopropyl alcohol

vapor dryers.

3 Referenced Documents

3.1 SEMI Standards

SEMI E49 — Guide for Standard Performance,

Practices, and Sub-Assembly for High Purity Piping

Systems and Final Assembly for Semiconductor

Manufacturing Equipment

SEMI E49.6 — Guide for Subsystem Assembly and

Testing Procedures - Stainless Steel Systems

SEMI F1 — Specification for Leak Integrity of High-

Purity Gas Piping Systems and Components

3.2 ASM Document

ASM UNS S31603 — Composition of Standard

Stainless Steels

3.3 ASTM Standards

See Section 3.3 of SEMI E49.

4 Terminology

See Section 4 of SEMI E49.

5 Performance Guidelines

5.1 Leak Test and Purity Indices

5.1.1 Pressure Decay Test

• Test Media — Nitrogen (N

)

Pressure — 2 times system operating pressure

1 American Society of Metals, Metals Park, OH 44073

2 American Society for Testing and Materials, 100 Barr Harbor

Drive, West Conshohoken, PA 19428-2959

• Time — 24 hours

• Temperature — Constant

• Fail-Pressure Loss — > 1% of test pressure

5.1.2 N

Particle Count (ptc), at ≥ 0.1 µm Size

• < 0.18 ptc/L (< 5 ptc/ft

) average single count

• < 1.8 ptc/L (< 50 ptc/ft

) maximum single count

5.1.3 Moisture Level — ≤ 200 ppb

5.2 All performance measures are absolute values,

relative to respective test instrument background level.

5.3 See SEMI E49.6 for recommended solvent system

testing procedures.

5.4 Reliability and Maintainability Indices —

Equipment supplier should provide actual gas system

performance data and/or component reliability data,

accompanied by the associated failure analysis method.

Indices Hours

Mean time between failure (MTBF)

Mean time between assists (MTBA)

Mean time to repair (MTTR)

Start-up time (Initial)

6 Design Guidelines

6.1 All weld joints should be automatically orbital butt

welded.

6.2 Mechanical fittings should be used where required

for component removal/replacement.

6.3 Dead volumes should be less t han three pipe

diameters in length/height. Blind runs such as pressure

gauges should not be used.

6.4 A means of process liquid sampling should be

installed as close as possible to point of dispense.

6.5 Incoming process liquids require filters and should

be located downstream of any regulator and as close as

possible to point of dispense.

6.6 The system internal volume should be minimized

by use of Dead Space Free (DSF) branch valves and/or

multi-component integrated assemblies.

6.7 Design should include a means of flow through

flushing and draining for removable components or

assemblies.

6.8 Pumping systems should include surge/pulse

suppression devices and provisions for vibration

isolation.

6.9 Supply and drain lines on a recirculation system

should be separated by an isolation valve. The system

should not use one line to perform both functions.

6.10 All filters should be able to be isolated from

process stream for maintenance.

6.11 Ball and needle type valves should not be used.

6.12 Backflow/back pressure protection should be

included in the system.

6.13 For processes requiring pressu re control,

regulators should be included in the system. Pressure

transducers and a means of pressure display should be

included on the equipment.

6.14 The systems should have a means of manifolding

supply and drain lines onboard, so that there is a single

point connection for each individual liquid.

7 Materials Guidelines

7.1 Material Mechanical Characte ristics - Stainless

Steel

7.1.1 All tubing greater than or equal to 1.27 cm (1/2

in.) diameter should conform to ASTM A 269.

7.1.2 Tubing less than 1.27 cm (1/2 in.) diameter

should conform to ASTM A 632.

7.1.3 All bar stock should conform to ASTM A 479.

7.1.4 All steel should conform to ASM UNS S31603

for chemical composition with the following

exceptions:

• Sulfur as reported by the SMTR ≤ 0.030%

• Carbon as reported by the SMTR ≤ 0.030%

7.2 Stainless steel should be 316L electropolished for

solvent system wetted flow streams.

7.3 Materials for valve seats, diaphragms, gaskets, and

O-rings should be chemically compatible to the process

gas.

7.4 Material Performance Guidelines

7.4.1 The performance guidelines below are SS

qualification values to be demonstrated by the original

component manufacturer. Semiconductor equipment

suppliers should provide proof that their components

conform to these requirements.

7.4.2 The performance tests should be considered

production qualification tests. It is the responsibility of

the component manufacturer to provide statistically

valid data which correlates their production tests to

these qualification tests (e.g., Statistical Process

Control, MIL-STD-105D).

7.4.3 The equipment supplier should be responsible

for maintaining and supplying, upon request,

documentation that proves their components meet the

user’s materials performance requirements.