semi合集-English.pdf - 第5120页
SEMI M26-0304 © SEMI 1995, 2004 3 NOTICE: SEMI makes no warranties or representations as to the suitability o f the standards set forth herein for any particular application. The determination of the suitability o f the …
SEMI M26-0304 © SEMI 1995, 2004 2
5.2.4.4 removable seam tape with low residue, low
tack adhesives,
5.2.4.5 removable methods of identification, and
5.2.4.6 stackable wafer box bases and covers.
5.2.5 The following characteristics are not
recommended:
5.2.5.1 “custom” embossed markings,
5.2.5.2 end-user specific logos, symbols, and markings,
5.2.5.3 high residue tape and labels,
5.2.5.4 labels which are difficult to remove or are non-
removable, and
5.2.5.5 non-removable marks such as inks and other
coloring.
6 Procedural Guidelines
6.1 Collection Method at the Wafer User Facility
6.1.1 Unpack secondary containers and save for re-use
or recycle.
6.1.2 Exercise care when removing the bag; avoid
scuffing or cutting the wafer shipping box surface.
6.1.3 Remove wafers from box in cleanroom area.
6.1.4 Remove all labels from the box.
6.1.5 Place wafer shipping boxes for re-use in a
designated collection container or collection area.
6.1.6 Maintain the wafer shipping boxes for re-use in
an environment free from contact with metal
contaminants and process chemicals.
6.1.7 Periodically return wafer shipping boxes for
reclean to the reclean service location or the wafer
supplier.
6.1.8 Whenever possible, cycle wafer shipping boxes
between the same wafer user and wafer supplier.
6.2 Wafer Shipping Boxes Cleaning at the Reclean
Service Location
6.2.1 The supplier of the reclean service must engineer
the reclean process.
6.2.2 At the service supplier’s option, visually inspect
the wafer shipping boxes prior to cleaning. The service
supplier and customer should agree to acceptable and
unacceptable levels of defects, recognizing that there
will be some normal wear. These levels should be
provided to the service supplier. Inspect for the
following defects:
6.2.2.1 deformation or warp,
6.2.2.2 razor cuts, scuffs, breaks, cracks, voids, and
fractures,
6.2.2.3 contamination and imbedded silicon,
6.2.2.4 damage to tension springs or other wafer
retention mechanisms, and
6.2.2.5 markings and labels.
6.2.3 Collect defective parts for recycle, and clean
acceptable parts as follows:
6.2.3.1 Clean using an aqueous-based or non-aqueous-
based chemistry.
6.2.3.2 Chlorofluorocarbon chemistries are not
permitted.
6.2.3.3 Confirm the compatibility of the wafer shipping
box materials with the cleaning method and drying
conditions.
6.2.4 Visually inspect the wafer shipping boxes after
cleaning using a high intensity or an ultraviolet light.
The wafer user and the wafer supplier should agree to
acceptable and unacceptable levels of defects,
recognizing that there will be some normal wear.
Inspect for all the defects noted in Section 6.2.2 and, in
addition, for:
6.2.4.1 residues from labels, markings, or tape, and
6.2.4.2 failure of the wafer shipping box halves to seat
and seal together.
6.2.5 Collect defective parts for recycle.
6.2.6 Return acceptable boxes and cassettes to the
wafer supplier using box wrap, nesting material, and
shipping containers as required to maintain cleanliness
and mechanical integrity.
6.3 Maximum Number of Re-Use Cycles
6.3.1 Base the total number of re-use cycles on the
ability to maintain both mechanical integrity and
cleanliness.
SEMI M26-0304 © SEMI 1995, 2004 3
NOTICE: SEMI makes no warranties or
representations as to the suitability of the standards set
forth herein for any particular application. The
determination of the suitability of the standard is solely
the responsibility of the user. Users are cautioned to
refer to manufacturer’s instructions, product labels,
product data sheets, and other relevant literature
respecting any materials mentioned herein. These
standards are subject to change without notice.
The user’s attention is called to the possibility that
compliance with this standard may require use of
copyrighted material or of an invention covered by
patent rights. By publication of this standard, SEMI
takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any
item mentioned in this standard. Users of this standard
are expressly advised that determination of any such
patent rights or copyrights, and the risk of infringement
of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI M29-1296 © SEMI 1996, 2003 1
SEMI M29-1296 (Reapproved 1103)
SPECIFICATION FOR 300 mm SHIPPING BOX
This specification was technically reapproved by the Global Silicon Wafer Committee and is the direct
responsibility of the Japanese Silicon Wafer Committee. Current edition approved by the Japanese Regional
Standards Committee on August 8, 2003. Initially available at www.semi.org September 2003; to be
published November 2003. Originally published December 1996.
1 Purpose
1.1 This specification defines a container for safe
transportation of 300 mm wafers from a wafer maker to
a receiving dock of an IC maker site.
2 Scope
2.1 This specification additionally defines the parts
necessary for a shipping box among cassettes specified
in SEMI E57 and SEMI E1.9, within the range of the
specifications in SEMI E57 and SEMI E1.9.
2.2 This specification also defines the size of a box
containing a shipping cassette containing 300 mm
wafers.
2.3 Although, as for material, use of plastic is a
premise, actual material names are not defined for free
selection based on progress of maker’s technologies.
2.4 Although this specification directs a high-
performance shipping box, this does not concretely
define the performance on particle generation and
sealing capability.
2.5 As for the count of contained wafers, this defines
two sorts, that is, 13 and 25 wafers.
NOTICE: This standard does not purport to address
safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine
the applicability of regulatory or other limitations prior
to use.
3 Referenced Standards
3.1 SEMI Standards
SEMI E57 — Mechanical Specification for Kinematic
Couplings Used to Align and Support 300 mm Wafer
Carriers
SEMI E1.9 —Mechanical Specification for Cassettes
Used to Transport and Store 300 mm Wafers
NOTICE: Unless otherwise indicated, all documents
cited shall be the latest published versions.
4 Terminology
4.1 Definitions
4.1.1 box bottom — a lower half of an outer box.
4.1.2 box top — an upper half of an outer box.
4.1.3 cassette — a cassette defined in SEMI E57 and
SEMI E1.9.
4.1.4 clamp — a part to fix a box top and a box bottom
mutually.
4.1.5 clamping indent — a groove formed with a box
top and a box bottom. The groove which a clamp hooks
for setting.
4.1.6 front retainer — a retainer which is attached in a
front side of a cassette, the front side which is defined
in SEMI E1.9.
4.1.7 gasket area — an area where gaskets are attached
so as to reduce air flow in a shipping box which is
generated by the difference between internal pressure
and external pressure.
4.1.8 orientation mark — a mark expressed on a part
for confirmation of cassette direction.
4.1.9 outer box — a container part of a shipping box,
surrounding the whole objects so as to protect a
shipping cassette, except gasket and clamps.
4.1.10 poka-yoke — a device applied to a rib so as not
to be set in an incorrect direction in order to avoid an
orientation failure when the part is set.
4.1.11 rear retainer — a retainer which is attached in a
rear side of a cassette, the rear side which is defined in
SEMI E1.9.
4.1.12 retainer — a part to be attached to a shipping
cassette for retaining wafers in transportation so that the
wafers do not move. There are two types, that is, a front
retainer and a rear retainer.
4.1.13 retainer hook — a projection formed on a
shipping cassette for attaching a retainer.
4.1.14 setting hole — a hole formed in a retainer for
attaching the retainer. This makes a pair with a retainer
hook.