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SEMI S2-0703a E © SEMI 1991, 2004 69 RELATED INFORMATION 9 LASER CHECKLIST NOTICE: The RI below will be withdrawn upon July 1, 2006 publication and replaced by the new sections, figures, and Tables in Delayed Re visions …

SEMI S2-0703a

RELATED INFORMATION 8

DOCUMENTATION OF NON-IONIZING RADIATION (SECTION 25 AND

APPENDIX 5) INCLUDING RATIONALE FOR CHANGES

NOTICE: This related information is not an official part of SEMI S2 and was derived from practical application by

task force members. This related information was approved for publication by vote of the responsible committee on

October 21, 1999.

R8-1 The user of this table is responsible for obtaining

the current revision of the standards cited for

Occupational Exposure Limits (OEL).

R8-2 The emission values in Appendix 5 that are not to

be exceeded were chosen based on a review of all

known international standards as well as a

consideration for best available control technology (i.e.,

lowest values currently achievable for each radiation

type). Where a general public limit existed, 20% of this

value was selected. Where there was no public limit,

the value selected is generally 20% of the OEL value

(instantaneous field strength measurement peak). The

latter case would have the occupational and general

public levels the same. Where there was an

occupational exposure limit specified in a standard, the

maintenance emission limit was set at 20% of this level.

R8-3 Most health standards differentiate between

“occupational” and “general public” exposure criteria.

IEEE C95.1 differentiates between “controlled access”

and “uncontrolled access” exposures. According to

C95.1 “controlled access” environments are those

where “locations where there is exposure that may be

incurred by persons who are aware of the potential for

exposure as a concomitant of employment, by other

cognizant persons, or as the incidental result of

transient passage through areas where analysis shows

the exposure levels may be above those shown in Table

2 but do not exceed those of Table 1, and where the

induced currents may exceed the values in Table 2, Part

B, but do not exceed the values of Table 1, Part B.”

According to C95.1, “uncontrolled access”

environments are “locations where there is the exposure

of individuals who have no knowledge or control of

their exposure. The exposure may occur in living

quarters or workplaces where there are no expectations

that the exposure levels may exceed those shown in

Table 2 and where induced currents do not exceed those

in Table 2, Part B.” Task force members advise that

C95.1 “controlled access” and other “occupational

exposure” standards should be applied to personnel

performing maintenance and service of equipment and

that “uncontrolled access” or other “general public”

standards should be applied to equipment operators

during routine work and to other locations. These IEEE

definitions are particularly relevant to broadcast

facilities as well as normal industrial environments such

as fabs. Task force members recommend that

uncontrolled access limits be applied to fetal exposure.

R8-4 As with the rationale in the Ionizing section, the

operator is considered a member of the general public

or to be in an uncontrolled area. Maintenance or service

technicians should be trained to know how to control

the hazardous energy and protect themselves from the

hazard and its adverse effects.

R8-5 References

1. 1996 TLVs and BEIs Threshold Limit Values for

Chemical Substances and Physical Agents Biological

Exposure Indices, ACGIH, Cincinnati, OH

2. Guidelines on Limits of Exposure to Broad-Band

Incoherent Optical Radiation (0.38 to 3 M), Health

Physics Vol. 73, No. 3 (September), pp.539-554, 1997

3. ICNIRP 1994 “Guidelines on Limits of Exposure

to Static Magnetic Fields”, Health Physics Vol 66 (1)

(January), pp. 100-106, 1994

4. IEEE Standard for Safety Levels with Respect to

Human Exposure to Radio Frequency Electromagnetic

Fields, 3 kHz to 300 GHz, C95.1-1991, Piscataway,

New Jersey

5. Interim Guidelines on the Limits of Exposure to

50/60 Hz Electric and Magnetic Fields, IRPA/ICNIRP

Guidelines, Health Physics Vol. 58, No. 1(January), pp.

113-122, 1990

SEMI S2-0703a

RELATED INFORMATION 9

LASER CHECKLIST

NOTICE: The RI below will be withdrawn upon July 1, 2006 publication and replaced by the new sections,

figures, and Tables in Delayed Revisions Section 1. The EH&S Committee has voted that implementation of

the information is OPTIONAL before the effective date.

NOTICE: This related information is not an official part of SEMI S2 and was derived from practical application by

task force members. This related information was approved for publication by vote of the responsible committee on

October 21, 1999.

Laser Manufacturer: __________________________________

Model #: __________________________________

Serial #: __________________________________

Laser Hazard Classification: (During Operation)

1. Classification Number (e.g. 1, 2, 3a, 3b, 4): ________

2. Classification Standard(s) (e.g. FDA/CDRH, IEC, JIS, etc.): ________

NOTE R9-1: If any laser contained in the equipment is Class 2, 3a, 3b or 4 laser system or product, the vendor should make

available upon request a hazard evaluation to include the following information for each laser in the equipment (where

applicable):

Laser Parameters

1. Laser medium type (HeNe, Nd:YAG, CO

, Argon, Excimer, GaAs, etc.): __________

Note: For Excimer lasers, specify gases: _______________

2. Wavelength(s) in nanometers (nm): _______________

3. Continuous Wave

A. Peak Power in Watts (W): ________

B. Available Power in Watts (W): ________

C. Irradiance in Watts/square centimeter (W/cm

): _ ________

4. Pulse Characteristics

A. Duration of Pulse in Seconds (s): ________

B. Energy per Pulse in Joules (J): ________

C. Frequency of Pulses (Pulse Repetition Frequency) in Hertz (Hz): ________

D. Average Power in Watts (W): ________

E. Radiant Exposure in Joules/square centimeter (J/cm

): ________

F. Q-Switch controlled pulses ( ) Yes ( ) No

5. Beam Parameters

A. Emerging beam diameter in millimeters (mm): ________

B. Expanded beam diameter in millimeters (mm): ________

C. Beam divergence in milliradians (mr): ________

D. Collecting optics type: ________

E. Focal length in millimeters (mm): ________

SEMI S2-0703a

Laser Control Measures

1. Identify protective measures required during maintenance. __________________

____________________________________________________________________

2. Laser Controlled Area required for Maintenance procedures? ( ) Yes ( ) No

3. Laser Controlled Area required for Service procedures. ( ) Yes ( ) No

4. If a Nominal Ocular Hazard Distance (NOHD) is used as a control measure, then provide the NOHD

calculations. See IEC 60825-1 for NOHD calculations.

NOTE R9-2: Attach a diagram of the laser beam path and the irradiance/radiant exposure at each significant point.

Personnel Protective Equipment (PPE) (for laser radiation hazards in excess of the MPE)

1. Optical Density (OD) of PPE required during maintenance activities: ___________

2. OD of PPE required during service activities: ___________

3. Recommended PPE manufacturer and model #: ______________________________

Table R9-1 Equipment Safety Features

Equipment

Safety Features

(not an inclusive

list)

USA

Europe

Japan

21 CFR

1040.10

60825-1

JIS 6802

Paragrap

Examples

1. Protective

Housing

( ) Yes

( ) No

(f)(1) 4.2 4.2.1 Aluminum or steel enclosures,

windows that provide adequate

attenuation, optical fibers or

beam tubes.

2. Safety Interlocks ( ) Yes

( ) No

(f)(2) 4.3 4.2.2 See Section 11 of SEMI S2.

3. Remote

Interlock

Connector

( ) Yes

( ) No

(f)(3) 4.4 4.2.3 Usually a 12 to 24 volt set of

contacts available to the user to

integrate additional room control

measures.

4. Key Control ( ) Yes

( ) No

(f)(4) 4.5 4.2.4 A key that is not removable in

the operations mode.

5. Laser Radiation

Emission

Warning

( ) Yes

( ) No

(f)(5) 4.6 4.2.5 A light or indicator that warns

the user of the emission through

the aperture.

6. Beam

Attenuator

( ) Yes

( ) No

(f)(6) 4.7 4.2.6 Shutters, beam blocks or water-

cooled beam dumps

7. Location of

Controls

( ) Yes

( ) No

(f)(7) 4.8 4.2.7

8. Viewing Optics ( ) Yes

( ) No

(f)(8) 4.9 4.2.8 Must block all hazardous

wavelengths to acceptable levels.

9. Scanning

Safeguard

( ) Yes

( ) No

(f)(9) 4.10 4.2.9 Shuts down if the scanning

mechanism (such as a rotating

mirror or galvanometer) fails.