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SEMI MF1392-1103 © SEMI 2003 19 NOTE: Items mar ked with an asterisk (*) are required only for referee measurements. Figure R2-2 Example of Format for Capacitanc e- Voltage Data and Calculatio ns Using the Curv e-Fitting…

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SEMI MF1392-1103 © SEMI 2003 18
NOTE: Items marked with an asterisk (*) are required only for referee measurements.
Figure R2-1
Example of Format for Capacitance-Voltage Data and Calculations Using the Incremental Method
SEMI MF1392-1103 © SEMI 2003 19
NOTE: Items marked with an asterisk (*) are required only for referee measurements.
Figure R2-2
Example of Format for Capacitance-Voltage Data and Calculations Using the Curve-Fitting Method
SEMI MF1392-1103 © SEMI 2003 20
RELATED INFORMATION 3
NUMERICAL CONSTANTS
NOTICE: This related information is not an official part of SEMI MF1392. It was developed during the original
development of the document. This related information was approved for publication by full letter ballot on July 12,
2003.
R3-1.1 The numerical constants given in the equations
in this test method are lumped constants. This appendix
provides details as to the composition of these lumped
constants and the values of the individual constants
used in deriving them. Table R3-1 gives the lumped
constants, their formulas, and their values. The units in
this table include any necessary unit conversions. If
there is no entry for a given equation, either there is no
lumped constant in the equation or the constant is
strictly numeric (for example, as for unit conversion).
Table R3-2 gives the values of the individual constants
used in this test method. The built-in potential, φ, may
vary from about 0.5 to about 0.8 V; the constant value
assumed is an approximation to this parameter.
Table R3-1 Lumped Constants
Equation Formula Value (Note 1)
(13), (17), (18)
φ
0.6 [V]
(14) (19a)
K
Si
ε
0
10359 [pF·µm/cm
2
]
(16)
K
Si
ε
0
/q 6.466 × 10
14
[(F·µm
−2
)/(C·cm
3
)]
(19b)
2/K
Si
ε
0
q 1.2050 × 10
−7
[(cm·F)/(C·pF
2
)]
NOTE 1: The units are given in brackets; the symbol C indicates
coulombs and the symbol F indicates farads.
Table R3-2 Values of Individual Constants
Constant Symbol Value (Note 1)
Built-in potential
φ
0.6 [V]
Permittivity of free space
ε
0
8.8542 × 10
−14
[F/cm]
Dielectric constant of silicon K
Si
11.7
Electronic charge q
1.6022 × 10
−19
[C]
NOTE 1: The units are given in brackets; the symbol C indicates
coulombs and the symbol F indicates farads.
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