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SEMI E40-0705 © SEMI 1995, 2005 22 Parameter Req/Ind Rsp/Cnf Comment PRStatus - M 10.4.6 PRJobAlert — Notification of process job milest ones achieved by the processing resource are communicated using the PRJ obAlert ser…

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10.4.2 PRJobCreateEnh
Table 8 PRJobCreateEnh Service Detail
Parameter Req/Ind Rsp/Cnf Comment
PRJobID M M User supplied Job ID. Must be unique among jobs known by the processing
resource or else the resource shall reject the create request.
PRMtlType M - May be NULL when no material is processed.
(List of)
PRMtlName
M - An ordered list that associates a set materials with process conditions (process
programs or recipes).
PRRecipe M - This is a structure.
PRProcessStart M - Indicates auto or manual start.
PRPauseEvent M - If null, then processing will not be automatically paused.
PRStatus - M Indicates success or failure.
10.4.3 PRJobMultiCreate — This service creates multiple process jobs. Each job can be created uniquely.
Table 9 PRJobMultiCreate Service Detail
Parameter Req/Ind Rsp/Cnf Comment
(List of)
PRJobMultiSpec
M C An ordered list of job specifications as follows:
(list of)
Structure:
PRJobID
PRMtlType
(List of) PRMtlName
PRRecipe
PRProcessStart
PRPauseEvent
(list of) PRJobID - M Shall be returned for process jobs specified in the request service
that the equipment created.
PRStatus - M Indicates success or failure.
10.4.4 PRJobDequeue — Remove one or more jobs from the queue. PRStatus shall indicate any jobs which could
not be removed because they either did not exist or were in the PR JOB ACTIVE state.
Table 10 PRJobDequeue Service Detail
Parameter Req/Ind Rsp/Cnf Comment
PRJobList M M (List of) PRJobID
In the request, PRJobList specifies the jobs to be removed. In the reply,
PRJobList indicates the jobs successfully removed.
PRStatus - M Indicates success or failure.
10.4.5 PRJobCommand — All of the process job commands described in Section 8.2.3 are communicated using the
PRJobCommand service. The commands are Abort, Stop, Cancel, Pause, Resume, and Start Process. This standard
does not specify any required parameters. Abort is the only command which is required to be supported.
Table 11 PRJobCommand Service Detail
Parameter Req/Ind Rsp/Cnf Comment
PRJobID M - Identifies the process job on which to perform the command.
PRCmdName M -
(List of) CmdParameter C - Dependent on the command selected.
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Parameter Req/Ind Rsp/Cnf Comment
PRStatus - M
10.4.6 PRJobAlert — Notification of process job milestones achieved by the processing resource are communicated
using the PRJobAlert service. Process job milestones, which are described in ¶8.2.1, are events which are important
to the control and tracking of the process job. The milestones required to be supported are PR Job Setup, PR Job
Processing, PR Job Processing Complete, and PR Job Complete. An additional milestone, PR Job Waiting for Start,
is used with the manual start option.
Table 12 PRJobAlert Service Detail
Parameter Req/Ind Comment
Timestamp M
PRJobID M Identifies the process job on which the milestone has been reached.
PRJobMilestone M
PRStatus M
10.4.7 PRJobEvent — Process job informational event notification, which is described in ¶8.2.2, is communicated
using the PRJobEvent service. These are defined for Waiting for Material and Process Job State Change events.
Support for informational events is not required.
Table 13 PRJobEvent Service Detail
Parameter Req/Ind Comment
PREventID M
Timestamp M
PRJobID M Identifies the process job which generated the event.
PREventData C
10.4.8 PRJobSetRecipeVariable — Sends a request to change the settings for a list of recipe variable parameters.
Implementation of this service is optional.
Table 14 PRJobSetRecipeVariable Service Detail
Parameter Req/Ind Rsp/Cnf Comment
PRJobID M -
RecVariableList M - (list of)
RecipeVariable
PRStatus - M Indicates success or failure. Failure is if a variable can’t be set. A
List of variables which could not be set is returned in the status.
10.4.9 PRJobSetStartMethod — Sends a request to change the start method for job(s). This request will fail if a
specified job is not in the QUEUED/POOLED state. Implementation of this service is optional.
Table 15 PRJobSetStartMethod Service Detail
Parameter Req/Ind Rsp/Cnf Comment
PRJobList M - (List of) PRJobID
PRProcessStart M - Indicates auto or manual start.
PRStatus - M Indicates success or failure.
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10.4.10 PRGetAllJobs — This message shall return a list containing job identifiers and the associated states of those
jobs for all jobs which have not completed.
Table 16 PRGetAllJobs Service Detail
Parameter Req/Ind Rsp/Cnf Comment
PRJobList - M
10.4.11 PRGetSpace — This message shall return the remaining number of jobs that can be created for the
processing resource.
Table 17 PRGetSpace Service Detail
Parameter Req/Ind Rsp/Cnf Comment
PRJobSpace - M
10.4.12 PRSetMtrlOrder — Request the Processing Management Service to use a specific strategy for the order in
which materials are processed.
Table 18 PRSetMtrlOrder Service Detail
Parameter Req/Ind Rsp/Cnf Comment
PRMtrlOrder M - Sets the value for the strategy the service will use.
PRAck - M Indicates success or failure.
10.5 Mapping of Semantics to Syntax — Table 20 provides the correspondence between the message semantics
defined in Section 8.2 and the syntax as defined in Section 10.4. The use of ‘.req’, ‘.rsp’, or ‘.nfy’ suffixes shows the
direction of message flow. ‘.req’ is a message request from the service user to the service provider. ‘.rsp’ is a
response message from the service provider to the service user. ‘.nfy’ is a notification from the service provider to
the service user.
Table 19 Correspondence of Message Semantics to Syntax
Parameter Comment
PR Job Create PRJobCreate.req
PR Job Create Acknowledge PRJobCreate.rsp
PR Job Setup PRJobAlert.nfy (PRJobMilestone = PR Job Setup)
PR Job Processing PRJobAlert.nfy (PRJobMilestone = PR Job Processing)
PR Job Processing Complete PRJobAlert.nfy (PRJobMilestone = PR Job ProcessingComplete)
PR Job Complete PRJobAlert.nfy (PRJobMilestone = PR Job Complete)
PR Job Waiting for Material PRJobEvent.nfy (PREventID = Waiting for Material)
PR Job State Changes PRJobEvent.nfy (PREventID = Process Job State Change)
PR Job Abort PRJobCommand.req (PRCmdName = ABORT)
PR Job Stop PRJobCommand.req (PRCmdName = STOP)
PR Job Cancel PRJobCommand.req (PRCmdName = CANCEL)
PR Job Pause PRJobCommand.req (PRCmdName = PAUSE)
PR Job Resume PRJobCommand.req (PRCmdName = RESUME)
PR Job Waiting for Start PRJobAlert.nfy (PRJobMilestone = PR Job Waiting for Start)
PR Job Start Process PRJobCommand.req (PRCmdName = STARTPROCESS)
PR Job Start Acknowledge PRJobCommand.rsp (PRSatus.PRAck = TRUE)