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SEMI S12-0298 © SEMI 1998 1 SEMI S12-0298 GUIDELINES FOR EQU I PMENT DECONTA M INA TION 1 Purpose 1.1 This document establis hes gui d e li nes for dec onta minati ng equip ment wh ich has b een e xpose d to hazardous m …

SEMI S11-1296 © SEMI 19963

13 Seismic Event Design

Minienvironments and associated equipment should be

designed in conformance with SEMI S2, Section 17

(see Section 3.1).

14 Fire Suppression

14.1 Whenever possible, non-combustible materials

should be used in minienvironment design and

construction. Fire detection/suppression should be

incorporated based on evaluation of the

minienvironment size, materials of construction, the

process, equipment enclosed, the facility design, and

interaction with the facility fire detection/suppression

systems.

14.2 If fire sprinklers are used, they should be the

“quick response” (QR) type.

14.3 If the minienvironment prevents personnel

exposure to the tool and process, an automatic gaseous

fire suppression system may be used as an alternative to

sprinklers. Gaseous extinguishing systems should be

actuated by optical detectors.

15 Maintenance & Servicing

15.1 Maintenance and Service Preparation of

Minienvironments with Chemical Process Tools —

Exhaust design at the tool should be adequate to

prevent the concentration buildup of fugitive vapor

emissions in the tool and minienvironment. The exhaust

should be maintained during maintenance and service

operations even though the enclosure doors are open.

15.2 Hazardous materials should be avoided for

service and maintenance requirements.

15.3 Minienvironment panels, doors, and access ports

removed for service or maintenance, should be stored in

a secure manner that will not permit these parts to fall,

obstruct passage ways, or otherwise cause tripping or

handling hazards.

NOTICE: These standards do not purport to address

safety issues, if any, associated with their use. It is the

responsibility of the user of these standards to establish

appropriate safety and health practices and determine

the applicability of regulatory limitations prior to use.

SEMI makes no warranties or representations as to the

suitability of the standards set forth herein for any

particular application. The determination of the

suitability of the standard is solely the responsibility of

the user. Users are cautioned to refer to manufacturer’s

instructions, product labels, product data sheets, and

other relevant literature respecting any materials

mentioned herein. These standards are subject to

change without notice.

The user’s attention is called to the possibility that

compliance with this standard may require use of

copyrighted material or of an invention covered by

patent rights. By publication of this standard, SEMI

takes no position respecting the validity of any patent

rights or copyrights asserted in connection with any

item mentioned in this standard. Users of this standard

are expressly advised that determination of any such

patent rights or copyrights, and the risk of infringement

of such rights, are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o

the contents in whole or in part is forbidden without express written

consent of SEMI.

SEMI S12-0298 © SEMI 19981

SEMI S12-0298

GUIDELINES FOR EQUIPMENT DECONTAMINATION

1 Purpose

1.1 This document establishes guidelines for

decontaminating equipment which has been exposed to

hazardous materials and which is intended for further

productive use. Equipment intended for further

productive use may include, but is not limited to, that

being offered for reuse, resale, repair, refurbishment, or

relocation.

1.2 These guidelines should be adapted at each site

with proper consideration given to local, state, national,

and international regulations and organization policies.

2 Scope

2.1 These guidelines apply to the preparation for

transfer or relocation of equipment which has been

exposed to hazardous or toxic materials and may pose a

threat to human health or the environment. These

activities may include, but are not limited to, shutdown,

dismantling, removing, labeling, and packaging prior to

transport.

2.2 These guidelines describe minimum requirements

for documentation of decontamination and notification

of residual hazards associated with decontamination.

2.3 The level of decontamination required for

equipment designated for reuse in the same service in

the same location may be assessed on a case-by-case

basis by the site Environmental, Health, and Safety

organization.

2.4 These guidelines are intended to be used to ensure

that decontamination prior to transport occurs to the

greatest extent possible, while acknowledging practical

limitations which may exist in individual

circumstances.

3 Referenced Documents

None.

4 Limitations

4.1 These guidelines are not intended to address

decontamination requirements for the preparation of

equipment for final “end-of-life” disposal.

4.2 These guidelines are not intended to supersede

applicable international, governmental, site, or original

equipment manufacturer requirements.

5 Terminology

5.1 decontamination — The remo val of materials in or

on equipment.

5.2 equipment — Process tools, chemical (liquid or

gas) controls and delivery systems, ancillary support

systems, structures, piping, ductwork, parts, and

subassemblies (e.g., vacuum pumps, pump packages,

effluent/exhaust treatment systems).

5.3 hazardous material — Any chemical, substance,

or compound which is defined or interpreted to pose

risks or hazards to human health or the environment by

applicable international, national, regional, or local

laws or regulations.

5.4 health hazard — A chemical for which there is

statistically significant evidence based on at least one

study conducted in accordance with established

scientific principles that acute or chronic health effects

may occur in exposed persons. Health hazards include

chemicals which are carcinogens, toxic or highly toxic

materials, reproductive toxins, irritants, corrosives,

sensitizers, hepatotoxins, neurotoxins, agents which act

on the hematopoietic system, and agents which damage

the lungs, skin, eyes, or mucous membranes.

5.5 transferor — The party with physical custody of

the equipment and responsibility for transfer.

5.6 transferee — The party who will receive physical

custody of the equipment.

6 Responsibility

6.1 It is the responsibility of the equipment transferor

to ensure the removal or minimization of all hazardous

materials associated with the subject equipment prior to

transfer or relocation. Hazards not addressed in the

guideline may exist, including undissipated electrical

charges or mechanical energy. It is recognized that, in

many cases, complete chemical decontamination cannot

be achieved without destruction of the equipment. The

equipment transferor should ensure that all known

remaining potential hazards are clearly identified to the

transferee.

6.2 It is the responsibility of the equipment transferor

to ensure residues, waste materials, and scrap parts/

equipment that are generated as part of the equipment

decontamination process are safely handled and

appropriately disposed of as per local, state, national,

and international regulations or standards.

7 Personnel Safety

7.1 Assessment and decontamination procedures

should be performed only by properly trained and

equipped personnel.

7.2 Any specific procedures used to follow these

guidelines should be pre-approved by the site

environmental, health, and safety organization prior to

decontamination activities.

7.3 Assessment and decontamination procedures

should include requirements for appropriate personal

protective equipment.

8 Equipment Assessment P rior to

Decontamination

8.1 An assessment should be performed on all

equipment prior to transfer. Assessment of equipment

should initially consider history of the equipment and

visual inspection. If initial assessment shows a potential

for equipment to have contacted hazardous materials

during the life of the equipment, further assessment

needs to be performed. (See the flowchart in Figure 1.)