semi合集-English.pdf - 第300页
SEMI E47.1-0305 © SEMI 1997, 2005 15 Symbol Used Value Specified Datum Measured From Feature Measured To z 316‡ 7.0 mm minim u m horizontal datum plane rear conveyor placement volume upper boundary z 2 2 mm (0.08 in.) ma…
SEMI E47.1-0305 © SEMI 1997, 2005 14
Symbol
Used
Value Specified
Datum
Measured From
Feature Measured To
y46 71 ± 1 mm (2.80 ± 0.04 in.) facial datum plane front and rear edge of robotic
handling flange
y47 58 mm (2.28 in.) minimum facial datum plane end of robotic handling flange sides
y49 134 mm (5.28 in.) maximum facial datum plane interior of FOUP sides between x51
and x52
y50 130 mm (5.12 in.) minimum facial datum plane rear of upper door frame volume
y51 140 mm (5.51 in.) minimum facial datum plane rear of door
y52 165.5 ± 0.5 mm (6.52 ± 0.02 in.) at door and frame
seal zones and at reserved spaces for vacuum
application and 166 mm (6.54 in.) maximum
elsewhere on door or FOUP shell
facial datum plane FOUP front
y53 190 mm (7.48 in.) maximum facial datum plane FOUP rear
y56‡ 189.75± 0.25 mm (7.470 ± 0.010 in.) facial datum plane outside edge of front and rear bottom
conveyor rails
y57‡ 178 mm (7.01 in.) maximum facial datum plane encroachment of FOUP front and rear
underneath bottom conveyor rails
y58 75 mm (2.95 in.) minimum facial datum plane end of left and right conveyor rails
y60 155 mm (6.10 in.) maximum facial datum plane encroachment of FOUP behind front
clamp flange
y61 3.5 ± 0.5 mm
(0.14 ± 0.02 in.)
front of front clamp
flange at FOUP front
rear of front clamp flange
y62 28 mm (1.10 in.) maximum facial datum plane rear of front retaining feature
y63 37.3 ± 0.5 mm
(1.47 ± 0.02 in.)
facial datum plane rear of ramp on front retaining feature
y64 42.1 ± 0.5 mm
(1.66 ± 0.02 in.)
facial datum plane front of ramp on front retaining
feature and front side of advancing
FOUP sensing pads
y65 104 mm (4.09 in.) minimum facial datum plane front of front retaining feature
y66 50 mm (1.97 in.) minimum facial datum plane rear side of advancing FOUP sensing
pads
y67 25 mm (0.98 in.)
facial datum plane origin of r67 on bilateral datum plane
y68‡ 55 mm (2.17 in.) maximum facial datum plane near end of the front kinematic
groove in the top robotic handling
flange
y242‡ 150 mm (5.75 in.) maximum facial datum plane front conveyor surface edge closest
to facial datum plane
y243‡ If the front conveyor surface is farther from HDP
than the front conveyor rail (defined by bottom of
front seal zone):
161.0 mm (1.0 mm
(6.34 (0.04 in.)
facial datum plane front conveyor surface edge furthest
from facial datum plane
If the front conveyor surface is coplanar with the
front conveyor rail (defined by bottom of front seal
zone):
165.5 mm (0.5 mm
(6.52 (0.02 in.)
y244‡ 155.0 mm maximum facial datum plane rear conveyor placement volume
front boundary
y245‡ 169.0 mm minimum facial datum plane rear conveyor placement volume rear
boundary
SEMI E47.1-0305 © SEMI 1997, 2005 15
Symbol
Used
Value Specified
Datum
Measured From
Feature Measured To
z316‡ 7.0 mm minimum horizontal datum plane rear conveyor placement volume
upper boundary
z2 2 mm (0.08 in.) maximum horizontal datum plane bottom of carrier sensing pads and
info pads (when down)
z41 0 mm (0 in.) minimum external horizontal datum
plane
bottom of FOUP
z43 2 ± 1 mm (0.08 ± 0.04 in.) external horizontal datum
plane
bottom conveyor rails
z44 11 ± 0 mm
(0.43 ± 0 in.)
external horizontal datum
plane
internal horizontal datum plane
z46‡ 60 ± 1 mm
(2.36 ± 0.04 in.)
external horizontal datum
plane
bottom of side fork-lift flanges
z47 210 ± 1 mm
(8.27 ± 0.04 in.)
for 13-wafer FOUP and
330 ± 1 mm
(12.99 ± 0.04 in.)
for 25-wafer FOUP
external horizontal datum
plane
bottom of robotic handling flange
z48 15 mm (0.59 in.) minimum bottom of robotic
handling flange
encroachment of FOUP top
underneath robotic handling flange
z49 8 mm (0.31 in.) maximum bottom of robotic
handling flange
top of robotic handling flange and
upper door frame volume
z50 5 mm (0.20 in.) minimum bottom of robotic
handling flange
encroachment of FOUP top
underneath the center hole in the top
robotic handling flange
z59 72 mm (0.31 in.) minimum external horizontal datum
plane
top of notches in side fork-lift flanges
z60 8.0 ± 0.5 mm
(0.31 ± 0.02 in.)
external horizontal datum
plane
top of slot in center retaining feature
z61 15 mm (0.59 in.) minimum external horizontal datum
plane
top of chamber above slot in center
retaining feature
z62 18 mm (0.71 in.) minimum external horizontal datum
plane
top of front retaining feature
z63 7.5 ± 0.5 mm
(0.30 ± 0.02 in.)
external horizontal datum
plane
top of ramp on front retaining feature
z65 7 mm (0.28 in.) minimum horizontal datum plane upper boundary of cylindrical fork-lift
pin holes in left and right bottom
conveyor rails
z66 55.5 mm (2.19 in.) maximum external horizontal datum
plane
encroachment of FOUP behind
bottom front clamp flange
z67 79.5 mm (3.13 in.) minimum external horizontal datum
plane
encroachment of FOUP behind
bottom front clamp flange
z68 133.5 mm (5.26 in.) maximum
for 13-wafer FOUP and
253.5 mm (9.98 in.) maximum
for 25-wafer FOUP
external horizontal datum
plane
encroachment of FOUP behind top
front clamp flange
z69 157.5 mm (6.20 in.) minimum
for 13-wafer FOUP and
277.5 mm (10.93 in.) minimum
for 25-wafer FOUP
external horizontal datum
plane
encroachment of FOUP behind top
front clamp flange
‡ These dimensions define optional features.
SEMI E47.1-0305 © SEMI 1997, 2005 16
6.8 Human Handles — All handles for use by humans must either be contained within the maximum outer
dimensions of the FOUP, be detached when not in use, or be retractable into the maximum outer dimensions when
not in use. Although such handles may extend past x53, they must still be contained within the upper limits of x50,
y40, and r67. Handles for use by humans (if present) must follow SEMI S8, and they must require the use of both
hands (each using a full wrap-around grip, given the minimum clearance requirement in SEMI E15.1). Automation
handling features shall not be considered dual purpose unless they are designed to meet SEMI S8 guidelines.
6.9 Automation Handling Features — On the top of the FOUP is a robotic handling flange for manipulating the
FOUP. Shown in Figure 12 (on the top robotic handling flange) are a center hole and 3 optional kinematic grooves
(which, if present, must be implemented entirely including the radius at the peak). On the left and right sides of the
FOUP are optional flanges (of unspecified thickness) for use with fork lifts. On the bottom of the FOUP are rails for
use with roller conveyors. Although they are only required to extend x58 to the rear and y58 to the left and right, it is
recommended that they be as long as possible. Beyond x58 and y58, only the lower bounds on z43 and z46 apply.
The side fork-lift flanges and the left and right bottom conveyor rails of the FOUP also have vertical cylindrical pin
holes for fork lift centering. On the bottom edges of the FOUP, 2 required conveyor rails (defined by x56, x57, y58,
and z43) are located on the left and right, and an optional conveyor rail (defined by x58, y56, y57, and z43) is located
on the rear. The Optional Conveyor Placement Volume is a volume of space reserved for the inclusion of alternate
conveyor features (defined by y244 and y245, the Horizontal Datum Plane and z316, and -<x<). The volume
defined by the dimensions above (y244, y245, z316) is the maximum volume into which an alternate conveying
feature must fit.
6.9.1 Optional Front Conveyor Surface — Alternate methods of conveyor transport may require the use of the
optional front conveyor surface. The y-dimension is defined by y242, y
243. In the x-dimension, the optional front
conveyor surface extends up to the left and right bottom conveyor rail edge closest to the BDP. In the z-dimension,
the optional front conveyor surface must be coplanar with the bottom of the front seal zone or farther from the HDP
than the bottom of the front seal zone. The optional front conveyor surface must be coplanar with the left and right
bottom conveyor rails.
6.10 Retaining Features — Figures 8 and 9 show two features on the bottom of the FOUP that may be used for
retaining the FOUP onto the kinematic couplings. This may be needed to prevent the FOUP from being knocked off
the kinematic couplings by the action of pushing the FOUP against the front-opening interface. The front retaining
feature contains a ramp that a wheel might roll up while the FOUP is being pushed toward the front-opening
interface. The arm with the wheel (not specified here) then holds the FOUP down on the kinematic couplings. The
center retaining feature consists of an oblong slot with a chamber above it. The FOUP can be clamped onto the
kinematic couplings by inserting an oblong head on a shaft (not specified here) through the slot and rotating it 90° in
either direction. Either retaining feature would only engage after the FOUP is fully seated on the kinematic coupling
pins. Either retaining feature must be able to withstand a force in any direction of at least f60. It is recommended that
SEMI E15.1 tool load ports be designed to accommodate the minimum hole dimensions of the retaining features to
ensure carrier interchangeability. Projections on the tool load ports that mate with the retaining features should also
not interfere with the misalignment correction function of the kinematic couplings. Figures 5 through 8 also show
front clamp flanges and exclusion volumes (defined by x62, y60, y61, z66, z67, z68, and z69) behind them that can
be used to clamp the FOUP to the FOUP opener when the FOUP is purged with Nitrogen. However, it is strongly
recommended that the front clamp flanges not be used for pulling the FOUP from the undocked position into the
FIMS interface. Also, all of the dimensions of the FOUP (such as the wafer location, etc.) are defined with
reference to the kinematic coupling pins, and most FOUPs are designed so that all of the features are in the proper
location only when the FOUP is held in place on the kinematic coupling pins only by gravity. Thus, if the front
clamp flanges are used, the wafers and the FOUP features may be in a different position than defined in SEMI E1.9
(possibly resulting in damage to wafers, wafer handlers, and the FOUP).
6.11 Inner and Outer Radii — All required concave features may have a radius of up to r65 to allow cleaning and
to prevent contaminant build-up. All required convex features may also have a radius of up to r66 to prevent small
contact patches with large stresses that might cause wear and particles. Note that these limits on the radius of all
required features are specified as a maximum (not a minimum) to ensure that the required features are not rounded
off too much. The lower bound on the radius is up to the carrier supplier. Note also that this radius applies to every
required feature unless another radius is called out specifically. Here a required feature is an area on the surface of
the carrier specified by a dimension (or intersections of dimensions) that has a tolerance and not just a maximum or
minimum (such as the edges of the robotic handling flange).