semi合集-English.pdf - 第3325页

SEMI E130-1104 © SEMI 2003, 2004 39 R1-1.3.1.8 Stop PJ1 Host Prober PRJobCommand.req (PRCm dName=STOP)() Return PJ01 Substrate 3 to FOUP() Unload substrate from chuck() PS: AWAITING COMMAND to HANDLING MATE RIAL() Move P…

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SEMI E130-1104 © SEMI 2003, 2004 38
R1-1.2.5 Process Remaining Material — The Substrate Tracking events are identical for the remaining substrates in
the two process jobs.
R1-1.3 Scenario III – PJ1 is Stopped on 2
nd
Substrate — This scenario involves the same job description as
Scenario I. After the 2nd substrate from PJ1 is loaded on the chuck, the host issues a PJStop service message. PJ1
is unloaded and PJ2 continues processing. The purpose of this scenario is to demonstrate the affect of an abnormal
job event as it relates to the Process State model.
R1-1.3.1 Preconditions — This section provides a summary of the sequence steps from scenario I leading up to the
PJStop.
R1-1.3.1.1 Job setup. See Section R1-1.1.2.1
R1-1.3.1.2 Job Start. See Section R1-1.1.2.2.
R1-1.3.1.3 Process Material. See Section R1-1.1.2.3
R1-1.3.1.4 Load 2
nd
substrate. See Section R1-1.1.2.4.
R1-1.3.1.5 Process Material. See Section R1-1.1.2.3
R1-1.3.1.6 Physical View
Pre-Align Chuck
CarrierA
PJ02
PJ01
SubstPJ01.02SubstPJ01.03
Figure R1-14
Physical View after 2
nd
Substrate Loaded
R1-1.3.1.7 State Models
Table R1-1 Object States after 2
nd
Substrate Loaded
Object Reference Description States Occupied
PS Process State model AWAITING COMMAND
CJ1 Control Job 1 EXECUTING
PJ01 Process Job 1 PROCESSING
PJ02 Process Job 2 PROCESSING
SubstPJ01.01 PJ1 Substrate 1 AT DESTINATION; PROCESSED
SubstPJ01.02 PJ1 Substrate 2 AT WORK; IN PROCESSED
SubstPJ01.03 PJ1 Substrate 3 AT WORK; NEEDS PROCESSING
SubstPJ02.01 PJ2 Substrate 1 AT SOURCE; NEEDS PROCESSING
SubstPJ02.02 PJ2 Substrate 2 AT SOURCE; NEEDS PROCESSING
SubstPJ02.03 PJ2 Substrate 3 AT SOURCE; NEEDS PROCESSING
SEMI E130-1104 © SEMI 2003, 2004 39
R1-1.3.1.8 Stop PJ1
Host Prober
PRJobCommand.req (PRCmdName=STOP)()
Return PJ01 Substrate 3 to FOUP()
Unload substrate from chuck()
PS: AWAITING COMMAND to HANDLING MATERIAL()
Move PJ02 Substrate 1 to Pre-align()
Load substrate on Chuck()
PJ01: PROCESSING to STOPPING()
SubstPJ01.02: PROCESSING to STOPPED()
SubstPJ01.03: AT WORK to AT SOURCE()
SubstPJ01.02: AT WORK to AT DESTINATION()
Move next substrate to Pre-align()
Align and Profile()
PJ01: STOPPING to Terminal()
PJ02: POOLED to SETTING UP()
PJ02: SETTING UP to PROCESSING()
PS: HANDLING MATERIAL to AWAITING COMMAND()
Figure R1-15
Stop PJ01 Scenario
R1-1.3.1.9 Post Conditions
R1-1.3.1.9.1 State Models
Table R1-2 Object States After PJ01 Stopped
Object Reference Description States Occupied
PS Process State model AWAITING COMMAND
CJ1 Control Job 1 EXECUTING
PJ01 Process Job 1 Terminal (non existent)
PJ02 Process Job 2 PROCESSING
SubstPJ01.01 PJ1 Substrate 1 AT DESTINATION; PROCESSED
SubstPJ01.02 PJ1 Substrate 2 AT DESTINATION; STOPPED
SubstPJ01.03 PJ1 Substrate 3 AT SOURCE; NEEDS PROCESSING
SubstPJ02.01 PJ2 Substrate 1 AT WORK; IN PROCESS
SubstPJ02.02 PJ2 Substrate 2 AT WORK; NEEDS PROCESSING
SubstPJ02.03 PJ2 Substrate 3 AT SOURCE; NEEDS PROCESSING
R1-1.3.1.10 Post Processing — The following sequence would be followed to complete the job:
R1-1.3.1.10.1 Load PJ02 Substrate 2. See Section R1-1.1.2.7
R1-1.3.1.10.2 Process Material. See Section R1-1.1.2.3
SEMI E130-1104 © SEMI 2003, 2004 40
R1-1.3.1.10.3 Load PJ02 Substrate 3. See Section R1-1.1.2.8
R1-1.3.1.10.4 Process Material. See Section R1-1.1.2.3
R1-1.3.1.10.5 Unload PJ02 Substrate 3. See Section R1-1.1.2.9
R1-1.4 Scenario IV – Alarm Condition Causes a Process State Model Transition to the PROCESSING BLOCKED
State — The purpose of this scenario is to demonstrate the behavior of prober when an alarm condition occurs that
causes the processing resource to become unavailable. The Process State model transitions to the PROCESSING
BLOCKED state. The condition does not cause a corresponding transition to the PAUSING state within an
executing Process Job or a transition to the PAUSED state within the active Control Job.
PROCESS
EXECUTING
PROCESSING
BLOCKED
3
C
16
15
4
5
SUBSTRATE
LOADED
6
8
10
9
11
12
13
1
2
IDLE
SETTING UP
AWAITING COMMAND
HANDLING MATERIAL
SERVICE TASK
MOVING XYZ
AWAITING LOAD
7
IDLE WITH ALARMS
PROCESSING ACTIVE
17
18
14
Host Prober
Alarm Notification
PS: MOVINGXYZ to PROCESSING BLOCKED()
MOVE-ABS()
PS: AWAITING COMMAND to MOVING XYZ()
Internal Error Occurs()
User
Notify User()
Bring Up Prober User Interface()
Guide User Through Recover Process
User Determines Maintenance Required
Abort Job(s)
CJAbort
CJAbort
{OR}
{If User issues Abort request through the host, the host sends the CJAbort to the equipment}
Abort PJ
PJ01: PROCESSING to ABORTING()
PS: PROCESSING BLOCKED to HANDLING MATERIAL()
Remove Substrates
PJ01: ABORTING to Terminal
CJ1: EXECUTING to COMPLETED()
PS: HANDLING MATERIAL to IDLE WITH ALARMS()
PROCESS
EXECUTING
PROCESSING
BLOCKED
3
C
16
15
4
5
SUBSTRATE
LOADED
6
8
10
9
11
12
13
1
2
IDLE
SETTING UP
AWAITING COMMAND
HANDLING MATERIAL
SERVICE TASK
MOVING XYZ
AWAITING LOAD
7
IDLE WITH ALARMS
PROCESSING ACTIVE
17
18
14
PROCESS
EXECUTING
PROCESSING
BLOCKED
3
C
16
15
4
5
SUBSTRATE
LOADED
6
8
10
9
11
12
13
1
2
IDLE
SETTING UP
AWAITING COMMAND
HANDLING MATERIAL
SERVICE TASK
MOVING XYZ
AWAITING LOAD
7
IDLE WITH ALARMS
PROCESSING ACTIVE
17
18
14
PROCESS
EXECUTING
PROCESSING
BLOCKED
3
C
16
15
4
5
SUBSTRATE
LOADED
6
8
10
9
11
12
13
1
2
IDLE
SETTING UP
AWAITING COMMAND
HANDLING MATERIAL
SERVICE TASK
MOVING XYZ
AWAITING LOAD
7
IDLE WITH ALARMS
PROCESSING ACTIVE
17
18
14
Figure R1-16
Prober Alarm Scenario