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SEMI F11-0998 © SEMI 1993, 1998 5 RELATED INFORMATION 1 SAMPLE TEST DATA SHEET NOTE: This related information is not an off icial part of SEMI F11 and is not intende d to modify or supercede the official guid e. It has b…
SEMI F11-0998 © SEMI 1993, 1998 4
NOTICE: These standards do not purport to address
safety issues, if any, associated with their use. It is the
responsibility of the user of these standards to establish
appropriate safety and health practices and determine
the applicability of regulatory limitations prior to use.
SEMI makes no warranties or representations as to the
suitability of the standards set forth herein for any
particular application. The determination of the
suitability of the standard is solely the responsibility of
the user. Users are cautioned to refer to manufacturer’s
instructions, product labels, product data sheets, and
other relevant literature respecting any materials
mentioned herein. These standards are subject to
change without notice.
The user’s attention is called to the possibility that
compliance with this standard may require use of
copyrighted material or of an invention covered by
patent rights. By publication of this standard, SEMI
takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any
item mentioned in this standard. Users of this standard
are expressly advised that determination of any such
patent rights or copyrights, and the risk of infringement
of such rights, are entirely their own responsibility.
SEMI F11-0998 © SEMI 1993, 1998 5
RELATED INFORMATION 1
SAMPLE TEST DATA SHEET
NOTE: This related information is not an official part of SEMI F11 and is not intended to modify or supercede the official guide.
It has been derived from industry specifications. Publication was authorized by full letter ballot procedures. Determination of the
suitability of the material is solely the responsibility of the user.
Test Date: Operator: Test Facility:
Tube Manufacturer: Fitting Manufacturer:
Tube O.D.: Fitting Type:
Tube Wall Thickness: Fitting Size:
Tube P/N: Fitting P/N:
Tube Material: Fitting Material:
Failure Temperatures = 25° , 75° , 100° , 125° , 150° , 175° , or 200° C
kPa Actual kPa Failure #1 Failure #2 Failure #3
100
200
400
600
800
1000
1200
NOTE: Record the pressures and temperatures at which failures occur.
NOTICE: These standards do not purport to address safety issues, if any, associated with their use. It is the
responsibility of the user of these standards to establish appropriate safety and health practices and determine the
applicability of regulatory limitations prior to use. SEMI makes no warranties or representations as to the suitability
of the standards set forth herein for any particular application. The determination of the suitability of the standard is
solely the responsibility of the user. Users are cautioned to refer to manufacturer’s instructions, product labels,
product data sheets, and other relevant literature respecting any materials mentioned herein. These standards are
subject to change without notice.
The user’s attention is called to the possibility that compliance with this standard may require use of copyrighted
material or of an invention covered by patent rights. By publication of this standard, SEMI takes no position
respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this
standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and
the risk of infringement of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI F12-0998 © SEMI 1993, 19981
SEMI F12-0998
TEST METHOD TO DETERMINE THE SEALING CAPABILITIES OF
FITTINGS, MADE OF FLUOROCARBON MATERIAL, AFTER BEING
SUBJECTED TO A HEAT CYCLE
1 Purpose
1.1 This method provides a uniform procedure to
determine the sealing capabilities of fluorocarbon resin
fittings, after they have been subjected to an elevated
ambient temperature and cooled to room temperature
(hereafter referred to as a “Heat Cycle”).
2 Scope
2.1 This method can be used to characterize the
thermal characteristics of tube fitting connections on
the basis of test data obtained under the conditions
described herein, but the results are not intended to
imply a performance rating.
2.2 When using this test method, a fitting body
temperature range of 23° – 125°C (73° – 257°F) should
be maintained.
2.3 Tube defined in this method is made of
fluorocarbon materials.
2.4 Tube fittings defined in this method are made of
fluorocarbon materials for all parts in contact with the
internal fluid. Parts such as nuts and grippers are not
limited to being made of a fluorocarbon material.
2.5 Only the seal between the tube and tube fitting
being evaluated is within the scope of this document.
All other seals are beyond the scope of this document.
2.6 When using this method for making comparisons
between various tube fitting manufacturers, the user
must be specific in the selection of the tube and tube
fittings to be evaluated.
NOTE: The International System of Units (SI) is used as the
standard unit of measure in this document. The U.S.
Customary Units are in parentheses for reference purposes
only and have been rounded to the nearest whole value.
3 Summary of Method
3.1 Measure the leakage of the tube fitting connection
after being exposed to a heat cycle by subjecting the
fitting to an internal pressure with nitrogen.
4 Significance and Use
4.1 In the manufacturing of semiconductor products,
many types of hazardous chemicals and solvents are
required. As a result, tubing and various fittings made
of fluorocarbon materials (which are chemically
resistant to these fluids) are used to transport those
fluids. It is important to control the testing process
when evaluating various fitting designs, so that accurate
comparisons of the sealing capabilities of tube fitting
connections can be made.
4.2 It is the intent of this method to provide a
procedure which evaluates the sealing capability of the
tube fitting connection when subjected to a change in
ambient temperature.
4.3 The results obtained when usin g this method are
applicable only to conditions that specifically duplicate
the procedures used within this method.
4.4 When using this test method, it is assumed that the
test specimens are truly representative of the material
and manufacturing process specified for that product.
Departure from this assumption could introduce
discrepancies that are greater than those introduced by
departure from the details of the procedure outlined in
this method.
5 Terminology
5.1 Acronyms
5.1.1 O.D. — Outside diameter
5.1.2 P/N — Part number
5.2 Definitions
5.2.1 constant temperature oven — Hot-air oven used
to condition the specimens to the specified temperature.
5.2.2 excessive leakage — Gas leakage (measured in
bubbles) from a fitting connection greater than can be
humanly counted.
5.2.3 seal cap — An end closure or plug to block the
open end of a tube or fitting to allow the specimen to be
pressurized with nitrogen gas]
5.2.4 subject — To expose to.
5.2.5 submersion tank — A transparent tank filled with
room temperature isopropyl alcohol used for observing
leakage of nitrogen from the tube fitting connection. A
cover or lid that does not create an air-tight seal is
recommended while the specimen is being subjected to
pressure.