semi合集-English.pdf - 第1405页

SEMI E30-1103 © SEMI 1992, 2003 79 8 GEM Compliance This section defin es compliance to the GEM standard. It describes the fundame ntal GEM requirem ents and additional GEM capabilities. It p rovides references to other …

SEMI E30-1103 © SEMI 1992, 2003

STREAM 10: Terminal Services

S10,F1 Terminal Request (TRN) S,H<-E

S10,F2 Terminal Request Acknowledge (TRA) S,H->E

S10,F3 Terminal Display, Single (VTN) S,H->E

S10,F4 Terminal Display, Single Acknowledge (VTA) S,H<-E

S10,F5 Terminal Display, Multi-block (VMN) M,H->E

S10,F6 Terminal Display, Multi-block Acknowledge (VMA) S,H<-E

S10,F7 Multi-block Not Allowed (MNN) S,H<-E

STREAM 14: Object Services

S14,F1 GetAttr Request S,H <-> E

S14,F2 GetAttr Data M,H <-> E

STREAM 15: Recipe Management

S15,F1 Recipe Management Multi-block Inquire S,H <-> E

S15,F2 Recipe Management Multi-block Grant S,H <-> E

S15,F21 Recipe Action Request M,H <-> E

S15,F22 Recipe Action Acknowledge M,H <-> E

S15,F27 Recipe Download Request M,H -> E

S15,F28 Recipe Download Acknowledge M,H <- E

S15,F29 Recipe Verify Request M,H -> E

S15,F30 Recipe Verify Data M,H <- E

S15,F31 Recipe Upload Request S,H -> E

S15,F32 Recipe Upload Data M,H <- E

S15,F35 Recipe Delete Request M,H -> E

S15,F36 Recipe Delete Acknowledge M,H <- E

S15,F49 Large Recipe Download Request S,H -> E,reply

S15,F50 Large Recipe Download Acknowledge S,H <- E

S15,F51 Large Recipe Upload Request S,H -> E,reply

S15,F52 Large Recipe Upload Acknowledge S,H <- E

S15,F53 Recipe Verification Send M,H <- E,reply

S15,F54 Recipe Verification Acknowledge S,H -> E

SEMI E30-1103 © SEMI 1992, 2003

8 GEM Compliance

This section defines compliance to the GEM standard.

It describes the fundamental GEM requirements and

additional GEM capabilities. It provides references to

other sections of the standard where detailed

requirements are located. This section also defines

standard terminology and documentation that can be

used by equipment suppliers and device manufacturers

to describe compliance with this standard.

The GEM standard contains two types of specifications:

— fundamental GEM requirements and

— requirements pertaining to additional GEM

capabilities.

The fundamental GEM requirements form the

foundation of the GEM standard. The additional GEM

capabilities provide functionality required for some

types of factory automation or functionality applicable

to specific types of equipment. Figure 8.1 illustrates the

relationship of the fundamental GEM requirements and

the additional GEM capabilities.

8.1 Fundamental GEM Requirements — All

equipment shall comply with the fundamental GEM

requirements listed in Table 8.1. Compliance to these

requirements involves precise and complete adherence

to all sections of the GEM standard referenced in Table

8.1.

Table 8.1 Fundamental GEM Requirements

Requirement Section References

State Models 3.0, 3.1, 3.3

Equipment Processing States 3.4

Host-Initiated S1,F13/F14

Scenario

4.1.5.1

Event Notification 4.2.1.1

On-line Identification 4.2.6

Error Messages 4.9

Control (Operator-Initiated) 4.12 (except 4.12.5.2)

Documentation 8.4

In addition, compliance requires adherence to the

portions of the following sections that are applicable to

the fundamental GEM requirements:

— Variable data items (GEM, Section 5)

— SECS-II data item restrictions (GEM, Section 5)

— Collection events (GEM, Section 6)

Figure 8.1

GEM Requirements and Capabilities

8.2 GEM Capabilities — The following table lists all

GEM capabilities and the sections of the GEM standard

where they are specified. These sections contain the

detailed requirements for implementing a GEM

capability. Requirements for an individual capability

include any referenced portions of the document. As an

example, the Alarm Management capability requires

implementation of the status variables

“AlarmsEnabled” and “AlarmsSet” as defined in

Section 5.

Table 8.2 Section References for GEM Capabilities

Capability Section

References

Establish Communications 4.1, 3.2

Event Notification 4.2.1.1

Dynamic Event Report

Configuration

4.2.1.2

Variable Data Collection 4.2.2

Trace Data Collection 4.2.3

Limits Monitoring 4.2.4

Status Data Collection 4.2.5

On-line Identification 4.2.6

Alarm Management 4.3

Remote Control 4.4

Equipment Constants 4.5

Process Program Management 4.6

Material Movement 4.7

Equipment Terminal Services 4.8

SEMI E30-1103 © SEMI 1992, 2003

Capability Section

References

Error Messages 4.9

Clock 4.10

Spooling 4.11

Control (Operator-Initiated) 4.12 (except

4.12.5.1)

Control (Host-Initiated) 4.12.5.1

8.3 Definition of GEM Compliance — The term “GEM

Compliance” is defined with respect to individual GEM

capabilities to indicate adherence to the GEM standard

for a specific capability. Equipment is GEM-compliant

for a specific GEM capability if, and only if, the

following three criteria are met:

— The fundamental GEM requirements are satisfied.

— The capability is implemented to conform with all

applicable definitions, descriptions, and

requirements defined for the capability in this

standard.

— The equipment does not exhibit behavior related to

this capability that conflicts with the GEM behavior

defined for the capability.

For example, equipment that provides SECS-II

messages for management of process programs must

precisely implement the GEM Process Program

Management capability to be “GEM-Compliant for

Process Program Management.”

Equipment may supply additional functionality not

specified in the GEM standard by using any messages

defined in the SECS-II standard as long as the

additional functionality does not conflict with

compliance to GEM capabilities.

Figure 8.2 illustrates the host view of equipment

communications in relationship to the components of

the GEM standard. The GEM capabilities are built upon

the fundamental GEM requirements and present GEM-

compliant behavior to the host when they are not

obstructed by conflicting functionality. Additional non-

GEM capabilities and non-obstructing extensions to

GEM capabilities provide additional functionality while

maintaining GEM behavior from the host view.

One additional term is defined to facilitate discussion of

GEM capability. Equipment is “Fully GEM Capable” if

and only if it meets the following two criteria:

— The equipment supplies all the GEM capabilities

listed in Section 8.2.

— Every implemented GEM capability is GEM-

Compliant.

8.4 Documentation — This section describes

documentation requirements in addition to those

specified in Sections 3 and 4 of this standard. All

documentation of the SECS-II interface shall be

supplied as a single volume, including Message

Documentation, a Compliance Statement and the

documentation required by Sections 3 and 4.

Figure 8.2

Host View of GEM

8.4.1 Message Documentation — The equipment

supplier shall provide message documentation in

conformance with Chapter 8 (Message Documentation)

of SEMI E5.

8.4.2 GEM Compliance Statement — The SECS-II

interface documentation provided by an equipment

supplier shall address GEM compliance. This

documentation shall include a GEM Compliance

Statement that accurately indicates for each capability

whether it has been implemented and whether it has

been implemented in a GEM-compliant manner. The

format for this statement is supplied as Table 8.3.

The table consists of three columns. The first column

lists the requirements and capabilities. The other two

columns pose questions to the supplier:

Implemented: Does the equipment provide functionality

that is similar to that defined for the GEM requirement

or capability?

GEM-Compliant: Has that requirement or capability

been implemented in a GEM-compliant manner?