semi合集-English.pdf - 第5094页

SEMI M23.6-0703 © SEMI 2003 3 (111) In Vector Normal to Wafer Surface (100) Vector Normal to (100) plane _ (101) _ (001) _ (011) (010) _ _ (111) In (110) _ (111) P Tolerance Figure 2 Notched InP Wafer Illustra ting Surfa…

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SEMI M23.6-0703 © SEMI 2003 2
_
(111)
P
_
(111)
P
_
(011)
_
(001)
(010)
(110)
(101)
(001)
(011)
_
(110)
_ _
(111)
In
(111)
In
_
(011)
_
(101)
(100)
_ _
(011)
Etch Pit
_
(010)
Cross Section of Etch Figure
on Front Face of Wafer
Figure 1
Diagram Shows a InP Wafer with Notch
SEMI M23.6-0703 © SEMI 2003 3
(111) In
Vector Normal
to Wafer Surface
(100)
Vector Normal
to (100) plane
_
(101)
_
(001)
_
(011)
(010)
_
_
(111)
In
(110)
_
(111)
P
Tolerance
Figure 2
Notched InP Wafer Illustrating Surface Orientation A
SEMI M23.6-0703 © SEMI 2003 4
(111) In
Vector Normal
to Wafer Surface
(100)
Vector Normal
to (100) Plane
Tilt
Angle
_
(101)
_
(001)
_
(011)
(010)
_
_
(111)
In
(110)
_
(111)
P
_
(110)
(100)
Tilt Angle
wafer
(110)
Direction of tilt
toward (110) plane
Figure 3
Notched InP Wafer Illustrating Surface Orientation B, with Tilt