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SEMI D25-0600 E © SEMI 2000, 2003 19 Vacant box Customer normal room Customer clean room Figure A1-11 Vacant box, from Customer Clean Room to Customer Normal Room Figure A1-12 Vacant Box, Customer Normal Room
SEMI D25-0600
E
© SEMI 2000, 2003 18
Air shower
Figure A1-9
Customer Normal Room to Air Shower
Customer clean
Figure A1-10
Customer Clean Room
SEMI D25-0600
E
© SEMI 2000, 2003 19
Vacant box
Customer
normal room
Customer clean room
Figure A1-11
Vacant box, from Customer Clean Room to Customer Normal Room
Figure A1-12
Vacant Box, Customer Normal Room
SEMI D25-0600
E
© SEMI 2000, 2003 20
Vacant box returned
Figure A1-13
Vacant Box Returned
Shipping
Figure A1-14
Shipping